microfluidic

R. Jurischka (a), Ch. Blattert (a), I. Tahhan (a), A. Schoth (a), H. Reinecke (a),
a Laboratory for Process Technology, Institute of Microsystem Technology, University of Freiburg, 79110 Freiburg, Germany

Abstract

Present main applications of microfluidic devices are within the life sciences or chemical analysis. Polymers are ideally suited for these applications due to their material properties and their applicability for high volume production. In this study, we developed a rapid manufacturing technology for disposable microfluidic devices using UV-LIGA and injection molding. Exchangeable inserts for the molding tool were fabricated by a modified UV-LIGA technology. The UV-LIGA process is based on a SU-8 lithography with a metal substrate, which allows for a reduction of the nickel electroplating time. These inserts enable a cost effective structuring of polymers. Different prototypes of chips for microfluidic applications with channel dimensions down to 10 μm and aspect ratios of 8 have been fabricated. The electroplated nickel structure has a hardness of 800 Vickers and an excellent top surface roughness of Ra < 20 nm. Taper angles of 3-8 degrees result in low demolding forces. The main advantage of our rapid processing technology is the availability of the geometry, the specific target material and manufacturing technology right from the start of the development to a cost effective high volume production of microfluidic devices.