milling

Chantal Khan Maleka, Gaël Thuilliera, Roland Duffaitb , Laurent Guyoutc
a Laboratoire FEMTO-ST, CNRS UMR 6174, Département LPMO, 32 Avenue de l’Observatoire, 25044 Besançon Cedex, France.
b Centre de Transfert des Micro et Nanotechnologies (CTMN), 39 Avenue de l’Observatoire, BP 1445-25007 Besançon Cedex 3, France.
c Department of Applied Mechanical Engineering, University of Franche Comté, 16 Route de Gray, 25030 Besançon Cedex, France.

Abstract

Our approach uses a two-step replication process for hot embossing and a rigid polymeric intermediate mould. This process overcomes some geometrical limitations in microstructured mould fabrication, enables positive-tone imprinting, prolongs the lifetime of the master, and lowers the overall cost of the replication process.