Multi Material Micro Manufacture Network of Excellence - micro-valve actuators

Towards Batch Integration of SMA into Microsystems: An Actuator Prototype

Tue, 29 Jul 2008 12:41:18 +0000

D. Clausi, J. Peirs, D. Reynaerts
Katholieke Universiteit Leuven, Department of Mechanical Engineering, Division PMA

Abstract

Shape Memory Alloys have a considerable potential for integration into microsystems, where scaling down of their size allows favorable exploitation of the intrinsic adaptive capabilities, providing an actuation mechanism for applications (e.g. micropneumatics) requiring large force control and large actuator stroke. However, the implementation of these materials into actual structures is rather complex and mostly confined to depositing thin NiTi films onto certain target substrates, resulting in devices having a relatively high cost-per-piece. This paper is aimed at investigating a novel approach for batch integration of SMA to microactuators, which might provide a cost-effective alternative to thin film technology while enhancing functional properties and design flexibility. Indicative requirements for the actuator design have been drawn from typical microvalve applications. In order to evaluate the actuator performance, brass microcantilevers have been produced, with prestrained SMA thin wires bonded on top of them, eccentrically with respect to the cantilever’s neutral plane. The activation of SMA element is obtained by direct heating through electrical current. The bending actuation of the cantilever leads to large strokes, expected to match the requirements of a wide range of applications.

Feasibility study for microfluidic separation device for biological fluids

Mon, 02 Apr 2007 14:10:43 +0000

4M Partner:
Imego AB

4M Partner No:
18

Collaborator Name:
Denator AB

Proposal for extended project to RAS:
Yes

Technology enquiry/solution sought:

The study requested is a preparation for a possible research and development project of a product that can perform fast separation and inactivation of biological fluids. Proteins, peptides and metabolites are rapidly degraded after extraction, which causes large problems for both academic and industrial protein research. In this study, Imego will investigate the feasibility of fabricating low-cost glass and polymer chips that combine microfluidic separation with Denator’s proprietary preservation technology.

USTUTT

Tue, 30 Jan 2007 13:05:53 +0000

Facilities/Hardware:

Sensors and actuators based on metallized polymers, precision micro injection moulding, environmental testing
website: www.uni-stuttgart.de/izfm

RAS contact:
kueck

FEMTO-ST/DPT. LPMO

Mon, 14 Aug 2006 12:56:52 +0000

Facilities/Hardware:

FEMTO-ST has fully equipped clean room equipment (laser mask writer; photolithography; RIE and DRIE); hot embossing; ultrasonic machining.

For more information about the facilities available, visit the FEMTO-ST website at:

RAS contact:
Chantal

KTH - Microsystem Technology & Cleanroom fabrication facility

Thu, 19 May 2005 15:20:45 +0000

Facilities/Hardware:

our research and advisory potential: http://www.s3.kth.se/mst/research/index.shtml.
For our cleanroom facilities: http://www.electrumlaboratoriet.se/.

The Microsystem Technology lab (MST) is a part of the department of Signals, Sensors and Systems (S3). Our research is mainly centered around Microelectromechanical Systems (MEMS) and its applications, with a focus on silicon-based applied sensor and actuator technology. Our research staff has developed a significant number of devices with promising performance. The group fabricates its silicon structures and devices at the KTH microelectronics laboratory, comprising 1200m2 of cleanroom area with all the facilities of small-scale microelectronics and for research on and development of special purpose structures and components in silicon. The group works on applications in the medical field (MedMEMS), the biotechnology field (BioMEMS), optical components (OptoMEMS) and radio frequency signal components (RFMEMS).

RAS contact:
wouter

KU Leuven

Tue, 12 Apr 2005 12:40:08 +0000

Facilities/Hardware:

K.U.Leuven is one of the three divisions of the department of Mechanical Engineering. PMA is active in the following areas: manufacturing processes, machine and instrument design, structural dynamics, acoustics, CAD/CAM/CIM, robotics, assembly automation, mechatronics, micro- and precision engineering, and metrology. The PMA division work includes original fundamental work as well as successful industry-oriented projects carried out in collaboration with small, medium and large companies and with international organisations like the European Space Agency. An important role of the research activities of the PMA division is based on international collaboration as shown by the participation of the division in more than 40 EC funded projects. The PMA division has also been nominated as Centre of Excellence by the Belgian Government.

RAS contact:
dominiek reynaerts

IMTEK

Thu, 10 Mar 2005 08:08:33 +0000

Facilities/Hardware:

The Institute for Microsystem Technology (IMTEK), founded in 1995, is one of the largest academic institutions in this field. As it was created completely from scratch as part of the new-founded Faculty of Applied Sciences we share a new campus with modern teaching and training facilities together with the Institute of Computer Science. The foundation of a new technical faculty provided the chance not only to use new facilities but also to create a novel engineering course which differs significantly from traditional engineering disciplines. So the basis for the specification of the course has been the questions for the indispensable skills of a ‘universal’ engineer of the 21st century. The curriculum was inaugurated in October 1996 when the first classes started in the course microsystem technology. The first graduations have been in spring 2001. Between 1998 and 2001 about 90 freshmen started studying Microsystem Technology every year. The curriculum has been modified several times since 1996 in order to comply more and more with our initial goals.

RAS contact:
Andreas Schoth

CCLRC - Rutherford Appleton Laboratory

Wed, 09 Mar 2005 09:07:28 +0000

Facilities/Hardware:

CCLRC is the largest UK national research facility employing ~2000 scientists, engineers and support staff. The project-related tasks for 4M will be carried out by the Central Microstructure Facility (CMF) at CCLRC-RAL. CMF is a division of the CCLRC engaged in R&D activities in micro and nano systems technology for the past 20 years. It has been involved with large number of nationally funded and EC funded projects. CCLRC -RAL has led many Nationally funded programmes including the £19 million Innovations in Industrial Lithography (ISL) programme funded by the UK Department of Trade and Industries. The CMF is a major national centre for microsystems technology. As a national facility we interact with over 100 universities in the UK. Our European involvement is also very strong. We have led many EU projects.
The Central Microstructure Facility (CMF) provides state-of-the-art microfabrication services and R&D facilities, based on electron-beam lithography and semiconductor equipment, to universities and industry. A central well-found research and prototype manufacturing service is available using advanced technology for microelectronics, masks, interconnects, direct write and for microsystems technology/microelectromechanical systems (MEMS). CMF is a neutral site where academic-industry and industry-industry collaborations offer good technology transfer opportunities.

RAS contact:
Andreas Schneider