micro-valve actuators
Towards Batch Integration of SMA into Microsystems: An Actuator Prototype
D. Clausi, J. Peirs, D. Reynaerts
Katholieke Universiteit Leuven, Department of Mechanical Engineering, Division PMA
Abstract
Shape Memory Alloys have a considerable potential for integration into microsystems, where scaling down of their size allows favorable exploitation of the intrinsic adaptive capabilities, providing an actuation mechanism for applications (e.g. micropneumatics) requiring large force control and large actuator stroke. However, the implementation of these materials into actual structures is rather complex and mostly confined to depositing thin NiTi films onto certain target substrates, resulting in devices having a relatively high cost-per-piece. This paper is aimed at investigating a novel approach for batch integration of SMA to microactuators, which might provide a cost-effective alternative to thin film technology while enhancing functional properties and design flexibility. Indicative requirements for the actuator design have been drawn from typical microvalve applications. In order to evaluate the actuator performance, brass microcantilevers have been produced, with prestrained SMA thin wires bonded on top of them, eccentrically with respect to the cantilever’s neutral plane. The activation of SMA element is obtained by direct heating through electrical current. The bending actuation of the cantilever leads to large strokes, expected to match the requirements of a wide range of applications.
categories
actuator | actuators | Micro-electro-mechanical-system (MEMS) | Micro-fluidics | micro-fluidics | micro-valve actuators | micro-valves | microsystems | microvalves | SMAFeasibility study for microfluidic separation device for biological fluids
Imego AB
18
Denator AB
Yes
The study requested is a preparation for a possible research and development project of a product that can perform fast separation and inactivation of biological fluids. Proteins, peptides and metabolites are rapidly degraded after extraction, which causes large problems for both academic and industrial protein research. In this study, Imego will investigate the feasibility of fabricating low-cost glass and polymer chips that combine microfluidic separation with Denator’s proprietary preservation technology.
categories
blanking/punching | blood diagnostics | consultancy | design for manufacture | dies | DNA protein analysis | drilling | dry etching | flow | glass | heat exchangers | Injection moulding | Laser ablation | Measurement / Metrology | Medical | metals | Micro-fluidics | Micro-sensors & actuators | micro-valve actuators | Pharmaceutical | polishing | polymers | pressure | sensors | small scale production | surface finishing | temperature | 10 Days (€5000) maximumUSTUTT
Sensors and actuators based on metallized polymers, precision micro injection moulding, environmental testing
website: www.uni-stuttgart.de/izfm
kueck
categories
acceleration | actuators | advisory service | drilling | Electrochemical machining (ECM) | flow | Laser ablation | Mechanical machining | metals | Micro-sensors & actuators | micro-valve actuators | milling | moulds | polymers | pressure | sensors | tool design | toolingFEMTO-ST/DPT. LPMO
FEMTO-ST has fully equipped clean room equipment (laser mask writer; photolithography; RIE and DRIE); hot embossing; ultrasonic machining.
For more information about the facilities available, visit the FEMTO-ST website at:
Chantal
categories
acceleration | actuators | advisory service | Aerospace | ceramics | consultancy | design for manufacture | dry etching | Hot/UV embossing | masks | Mechanical machining | Medical | Micro-fabrication | Micro-fluidics | Micro-sensors & actuators | micro-valve actuators | polymers | Scientific / Academic Community | sensorsKTH - Microsystem Technology & Cleanroom fabrication facility
our research and advisory potential: http://www.s3.kth.se/mst/research/index.shtml.
For our cleanroom facilities: http://www.electrumlaboratoriet.se/.
The Microsystem Technology lab (MST) is a part of the department of Signals, Sensors and Systems (S3). Our research is mainly centered around Microelectromechanical Systems (MEMS) and its applications, with a focus on silicon-based applied sensor and actuator technology. Our research staff has developed a significant number of devices with promising performance. The group fabricates its silicon structures and devices at the KTH microelectronics laboratory, comprising 1200m2 of cleanroom area with all the facilities of small-scale microelectronics and for research on and development of special purpose structures and components in silicon. The group works on applications in the medical field (MedMEMS), the biotechnology field (BioMEMS), optical components (OptoMEMS) and radio frequency signal components (RFMEMS).
wouter
categories
actuators | Assembly & packaging | Automotive | Communications | consultancy | design for manufacture | DNA protein analysis | drug delivery systems | dry etching | Electroplating | flow | gas | general | glass | Mechanical machining | Medical | Micro-fabrication | Micro-fluidics | micro-mixers | Micro-optics | micro-reactors | Micro-sensors & actuators | micro-valve actuators | new materials | pressure | Scientific / Academic Community | sensors | switches
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