Multi Material Micro Manufacture Network of Excellence - sensors

Measurement of frequency response of the bone ossicles in the sheep middle ear by the fiber-optic microphone

Wed, 30 Jul 2008 11:21:18 +0000

Z.V. Djinovic (a),(b), R. Pavelka (c), L. Manojlovic (b), D. Vujanic (b), M.C. Tomic (d)

(a) Institute of Sensor and Actuator Systems, Vienna University of Technology, Vienna 1040, Austria
(b) Integrated Microsystems Austria, Wiener Neustadt 2700, Austria
(c) Schwerpunktkrankenhaus, 2700 Wr.Neustadt, Austria
(d) Institut Bezbednosti, Belgrade 11000, Serbia

Abstract

In this paper we present a contactless technique for measurement of acoustic vibrations and frequency response of the bone ossicles in the sheep middle ear. This technique is based on high-coherence interferometry performed by a single mode fiber-optic sensing configuration with just one sensing fiber directed against the target. High-coherence light of 1310 nm wavelength has been impinging a retroreflective target that is firmly fixed upon the incus of the middle ear. We measured frequency response of the middle ear causing vibration of the incus by generation of air pressure from a well calibrated acoustic source in the range of 50 to 90 dB SPL and frequency from 250 Hz to 6 kHz.

Mixed technologies for gas sensors microfabrication

Tue, 20 May 2008 09:22:26 +0000

Carmen Moldovan (a), Sebastian Sosin (a), Oana Nedelcu (a), Ulrike Kaufmann (b), Hans-Joachim Ritzhaupt-Kleissl (b),
Stefan Dimov (c), Petko Petkov (c), Robert Dorey (d), Katrin Persson (e), David Gomez (f), Per Johander(g)
a National Institute for R&D in Microtechnologies, Erou Iancu Nicolae 32 B, Bucharest 077190, Romania
b Forschungszentrum Karlsruhe, Institut für Materialforschung III, P.O. Box 3640, 76021 Karlsruhe, Germany ;
c Manufacturing Engineering and Multidisciplinary Technology Centre, Cardiff University;
d Nanotechnology Group, Cranfield University, Cranfield, Bedfordshire, UK;
e IMEGO, Arvid Hedvalls Backe 4, SE 411 33 Goteborg, Sweden;
f Fundacion Tekniker
g IVF - Industrial Research and Development Corporation; Argongatan 30, S431 53 Molndal, Sweden

Abstract

The paper presents the development of a novel suspended membrane resistive gas sensor on a ceramic substrate. The sensor is designed and simulated to be fabricated by combining laser milling techniques, conductive ceramic technology, thin film technology, and semiconductor metal oxides. Trenches are created in the alumina substrate in order to define the geometry of the heater using laser processing of the substrate. The heater is completed by filling the trenches with conductive ceramic paste and then baking to remove the solvent from the paste. The next step consists of polishing the surface to obtain a surface roughness small enough for thin film technology. A dielectric (SiO2 or ceramic) material is then deposited, acting as hot plate and also as electrical isolation between the heater and sensing electrode. The sensing electrode consists of an interdigitated resistor made of Au or Pt with thickness in the range of 2000 -3000 Å. The gas sensitive layer (SnO2) is deposited by screen printing or spinning. When heated it react with gas molecules and changes its resistivity, thereby acting as a sensor. The final step involves releasing the sensor, enabling it to be suspended on four bridges, to minimise the dissipation of the heat in the substrate.

A New Concept for an Absolutely Encoded Angular Resolver

Mon, 12 Nov 2007 16:23:32 +0000

V. Mayer, T. Botzelmann, K.-P. Fritz, J. Seybold, H. Kück
Hahn-Schickard-Gesellschaft, Institute of Micro Assembly Technology, Allmandring 9b, 70569 Stuttgart, Germany

Abstract

At HSG-IMAT a new concept for an absolutely encoded optical angular resolver has been developed. The key element of the sensor concept is a disc with a high precision solid measure which is fabricated using the well known manufacturing process for compact discs (CD-Technology). Using this process, it is possible to fabricate a high precision solid measure in high quantities and at low manufacturing costs. To detect the absolute angular position, a laser beam is focused onto the solid measure. The beam is deflected by the diffractive gratings of the solid measure, whereupon the different first orders fall onto separated elements of a photo diode array. To verify the principle of operation an experimental setup assembled under a microscope, with a CCD-chip instead of a photodiode array, was used to demonstrate the signal modulation. Based on these experiments, a small size demonstrator device was designed and assembled. The successful experimental results with this demonstrator device show the large potential of this new sensor concept for different applications.

A New Approach to Qualitiy Assurance in Resistance Welding for Microsensors Packaging

Mon, 12 Nov 2007 16:23:32 +0000

D. Ulieru(a), Alina Matei(b), Elena Ulieru(c), A. Tantau(c)
a: ROMES S.A., 126A, Iancu Nicolae Str., Bucharest, 72996, Romania
b: National Institute for Research and Development in Microtechnologies, 32B, Erou Iancu Nicolae Str., Bucharest, 077190, Romania
c: SITEX 45 SRL, 114, Ghica Tei Blvd., bl. 40, ap. 2, Dept. 2, Bucharest 72235, Romania

Abstract

The permanent development of microelectronics technologies provide new challenges for miniaturization and complexity increasing for new packaging technologies. So the exciting applications for microsystems, sensors and actuators production are looking for the best quality hermetic sealing of metal packages. The paper showed our researches and experiments results for a new approach to quality assurance in resistance welding. These will analyze the main causes of weld failures and also our methods of determining its value. On the basis of this requirement have monitored through the weld sequence, integrated concept of power monitor. The technical features developed a modern concept applicable to a wider range of fields. Our monitor could be used to wide range of welding technologies like distributed spot and focused spot, projection, roller spot and mash welding machines, working with single or three phase, ac. or dc. The experiments with our equipment have proven its advantage for fast production assembly line.

Photosensor of CDSSE for Fiber Optics Applications

Mon, 12 Nov 2007 16:23:32 +0000

Peter Shindov(a), Nasko Elektronov(b),Valery Serbezov(c), Franz Herbst(c)
a: Technical College-"John Atanasoff"
b: JN-Corp.
c: Multicoats Ltd.

Abstract

The development of new generations of laser source for fiber optic’s applications require more fast new photosensors with spectral characteristics in visible range. The idea of this work is development of technology and device – fast photosensor with spectral range adapted to modern lasers for the quickly increasing needs of optoelectronics and fiber optics communications. By pulsed laser deposition (PLD) usage UV N2 Laser for ablation λ=337.1 nm, energy per pulse 8 mJ and CW 60 W CO2 Laser for heating are produced thin CdSxSe1-x films on quartz substrate. Polycrystalline thin films with thickness from 0.5 to 2.0 μm and dominant orientation – (002) are formed by energy density 4.5 J/cm2 and repetition rate 20 Hz .The thin films are investigated by EDAX and SEM. The films are additional thermo treatment for increasing ratio photocurrent – dark current. This ratio reaches 107. By means of TEA UV N2 Laser with energy per pulse-0.3 mJ, pulse duration 2 ns are formed planar Ohm contacts from CdO directly onto thin film. The contacts are investigated by XRD. By means of coordinate table the contacts are formed on the backside of the structure. The dimension of photosensitive structure is 250x250 μm. The distance between contacts areas is 10 μm. The spectral response of devices is measured. The maximum spectral sensitive is at λ=575 nm. Lux ampere characteristics are measured. The increasable fronts and decreаsаble fronts at the structure are measured. They are 2 ns, at ratio 1000.

Bimaterial Actuators and Sensor with Built-in Compensation of the Ambient Temperature Interference

Mon, 12 Nov 2007 16:23:32 +0000

J. Matović(a), Z. Jakšić(b)
a: ISAS, Technical University, 1040, Vienna, Austria
b: IHTM, University of Belgrade, 11000, Belgrade, Serbia

Abstract

We present a novel simple and efficient method for the full removal of the influence of ambient temperature variations to the operation of bimaterial-based MEMS actuators and sensors. The removal of the undesired interference is achieved through the very structure of the bimaterial cantilever, by reversing the order of bimaterial constituent materials at a certain length. Thus an extremely simple geometry is obtained for full self-compensation of the structures. We performed the full simulation of our devices by the finite element method. The structures require standard surface micromachining and utilize only Si-technology compatible materials like polyimides or SU-8. A simple rule for the determination of the zero-deflection condition is presented. The described compensation method enables a significantly reduced bimaterial device area and a much higher packaging density in element arrays, as well as an improved signal-to-noise ratio. The method is especially convenient for photodetector arrays for direct conversion of infrared radiation spatial distribution into a visible image.

Feasibility study for microfluidic separation device for biological fluids

Mon, 02 Apr 2007 14:10:43 +0000

4M Partner:
Imego AB

4M Partner No:
18

Collaborator Name:
Denator AB

Proposal for extended project to RAS:
Yes

Technology enquiry/solution sought:

The study requested is a preparation for a possible research and development project of a product that can perform fast separation and inactivation of biological fluids. Proteins, peptides and metabolites are rapidly degraded after extraction, which causes large problems for both academic and industrial protein research. In this study, Imego will investigate the feasibility of fabricating low-cost glass and polymer chips that combine microfluidic separation with Denator’s proprietary preservation technology.

USTUTT

Tue, 30 Jan 2007 13:05:53 +0000

Facilities/Hardware:

Sensors and actuators based on metallized polymers, precision micro injection moulding, environmental testing
website: www.uni-stuttgart.de/izfm

RAS contact:
kueck

Thu, 01 Jan 1970 00:00:00 +0000

n/a

FEMTO-ST/DPT. LPMO

Mon, 14 Aug 2006 12:56:52 +0000

Facilities/Hardware:

FEMTO-ST has fully equipped clean room equipment (laser mask writer; photolithography; RIE and DRIE); hot embossing; ultrasonic machining.

For more information about the facilities available, visit the FEMTO-ST website at:

RAS contact:
Chantal

KTH - Microsystem Technology & Cleanroom fabrication facility

Thu, 19 May 2005 15:20:45 +0000

Facilities/Hardware:

our research and advisory potential: http://www.s3.kth.se/mst/research/index.shtml.
For our cleanroom facilities: http://www.electrumlaboratoriet.se/.

The Microsystem Technology lab (MST) is a part of the department of Signals, Sensors and Systems (S3). Our research is mainly centered around Microelectromechanical Systems (MEMS) and its applications, with a focus on silicon-based applied sensor and actuator technology. Our research staff has developed a significant number of devices with promising performance. The group fabricates its silicon structures and devices at the KTH microelectronics laboratory, comprising 1200m2 of cleanroom area with all the facilities of small-scale microelectronics and for research on and development of special purpose structures and components in silicon. The group works on applications in the medical field (MedMEMS), the biotechnology field (BioMEMS), optical components (OptoMEMS) and radio frequency signal components (RFMEMS).

RAS contact:
wouter

KU Leuven

Tue, 12 Apr 2005 12:40:08 +0000

Facilities/Hardware:

K.U.Leuven is one of the three divisions of the department of Mechanical Engineering. PMA is active in the following areas: manufacturing processes, machine and instrument design, structural dynamics, acoustics, CAD/CAM/CIM, robotics, assembly automation, mechatronics, micro- and precision engineering, and metrology. The PMA division work includes original fundamental work as well as successful industry-oriented projects carried out in collaboration with small, medium and large companies and with international organisations like the European Space Agency. An important role of the research activities of the PMA division is based on international collaboration as shown by the participation of the division in more than 40 EC funded projects. The PMA division has also been nominated as Centre of Excellence by the Belgian Government.

RAS contact:
dominiek reynaerts

Cranfield University

Thu, 07 Apr 2005 08:54:13 +0000

Facilities/Hardware:

The activity at Cranfield University will involve the integration of activities in two areas: Nanotechnology and Precision Engineering. The Nanotechnology Group at Cranfield University, specialises in fusing micro-engineering and nanotechnology with the industrial application and development of functional materials (especially ferroelectric) to produce novel devices.

RAS contact:
Paul B Kirby

IVF

Fri, 01 Apr 2005 14:39:10 +0000

Facilities/Hardware:

IVF Working in the interface between academic research and industrial applications, IVF develops products and processes by initiating and carrying out research and implementing its results. IVF today actively work with development and integration of Microsystems in industrial products. We adopt an industrial generic approach and production development process includes hardware, software and mechanics. In co-operation with Chalmers University of Techynology, we develop technology to integrate electronics and micro systems into industrial products with the main focus on developing highly reliable microsystems. Our philosophy is to secure reliability in an early stage of the product development process, based on profound knowledge about the design, materials, production process and physical wear and abuse that degrade the electronics hardware. We base reliability prediction and verification on tests and simulations. Efficient integration of electronics and microsystems into products reduces the number of parts with less contacts, less materials, more efficient production and less environmental impact. Our strategy is to develop generic technology platforms with verified reliability and produceability. Direct production of micro mechanical components is an important area for IVF. Due to the small size is direct production very suitable for direct production of micro mechanical parts. IVF have developed a new method for direct production of ceramic components.

RAS contact:
Per Johander

TNO Science and Industry

Thu, 31 Mar 2005 14:13:55 +0000

Facilities/Hardware:

TNO Industrial Technology increases the competitive strength of companies by providing them support in the development of products, materials and production processes. In order to solve our customers' problems and help them fulfil their ambitions, we combine our competences with the customers' own expertise and, if necessary, we involve other TNO institutes and third parties.

RAS contact:
Pieter Bolt