Multi Material Micro Manufacture Network of Excellence - LIGA

Electrochemical finishing of nickel microstructures

Mon, 04 Aug 2008 13:33:06 +0000

S. Kissling, K. Bade
Forschungszentrum Karlsruhe, Institut für Mikrostrukturtechnik, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany

Abstract

One method to manufacture high aspect ratio metallic microstructures is the LIGA technique. The acronym LIGA stands for the German words for lithography, electroforming and moulding. A resist layer (e.g. PMMA) is structured using deep X-ray lithography. The resist is developed and the resulting mould is filled with metal by electroplating. Though electroplating is an essential part of the LIGA process there are still challenges concerning the deposit surfaces. Nevertheless, extremely precise metal structures can be manufactured. In particular, the sidewall surface quality can be in the sub-micrometer range. But due to irregularities during the deposition process, resulting in rough or wavy surfaces, the emerging surface does not meet required tolerances. For this reason, a finishing process is necessary. Electrochemical techniques such as electro- or plasmapolishing have been evaluated. Electropolishing, a common anodic dissolution technique widely used in industry to obtain smooth, bright and burr-free surfaces, as well as plasmapolishing, also a technique based on the anodic dissolution are presented. First results of both an electropolished and a plasmapolished nickel microstructure are reported.

Analysis of Micro-Structuring Polymer Replication by Micro-Injection Moulding and Hot Embossing

Mon, 12 Nov 2007 16:23:32 +0000

M. Sahli(a)(b)(c), C. Millot(a), C. Roques-Carmes(a), C. Khan Malek(b), J.C. Gelin(c) and T. Barriere(c)
a: Surface Microanalysis Laboratory (LMS), ENSMM, 25030 Besançon cedex, France
b: FEMTO-ST Institute/Dpt. LPMO, CNRS UMR 6174, , 25044 Besançon cedex, France
c: FEMTO-ST Institute, CNRS UMR 6174, ENSMM, 25030 Besançon cedex, France

Abstract

This paper focuses on the comparison between two manufacturing techniques to realize micro-structural replications on a polymer substrate. The micro-technologies that are considered consist in replication through micro-injection moulding on one hand, and in replication through hot embossing in the other hand. The same mould with microstructured cavities produced by high-speed milling or indentation was used for both replication methods. The replication process parameters are analyzed in both cases, and the resulting polymeric shapes and surface states are characterized in using 3D scanning mechanical microscopy. It is shown that both replication processes give accurate results if the processing cycle as well as pressure and temperature are well adapted.

KU Leuven

Tue, 12 Apr 2005 12:40:08 +0000

Facilities/Hardware:

K.U.Leuven is one of the three divisions of the department of Mechanical Engineering. PMA is active in the following areas: manufacturing processes, machine and instrument design, structural dynamics, acoustics, CAD/CAM/CIM, robotics, assembly automation, mechatronics, micro- and precision engineering, and metrology. The PMA division work includes original fundamental work as well as successful industry-oriented projects carried out in collaboration with small, medium and large companies and with international organisations like the European Space Agency. An important role of the research activities of the PMA division is based on international collaboration as shown by the participation of the division in more than 40 EC funded projects. The PMA division has also been nominated as Centre of Excellence by the Belgian Government.

RAS contact:
dominiek reynaerts

Research Centre Karlsruhe (FZK)

Tue, 22 Mar 2005 12:41:30 +0000

Facilities/Hardware:

The Institute of Material Research III, as one of about 20 scientific institutes of the Forschungszentrum (Research Center) Karlsruhe, works alongside other scientific work on the development of manufacturing processes for polymer and ceramic micro-components.

RAS contact:
langbein

CCLRC - Rutherford Appleton Laboratory

Wed, 09 Mar 2005 09:07:28 +0000

Facilities/Hardware:

CCLRC is the largest UK national research facility employing ~2000 scientists, engineers and support staff. The project-related tasks for 4M will be carried out by the Central Microstructure Facility (CMF) at CCLRC-RAL. CMF is a division of the CCLRC engaged in R&D activities in micro and nano systems technology for the past 20 years. It has been involved with large number of nationally funded and EC funded projects. CCLRC -RAL has led many Nationally funded programmes including the £19 million Innovations in Industrial Lithography (ISL) programme funded by the UK Department of Trade and Industries. The CMF is a major national centre for microsystems technology. As a national facility we interact with over 100 universities in the UK. Our European involvement is also very strong. We have led many EU projects.
The Central Microstructure Facility (CMF) provides state-of-the-art microfabrication services and R&D facilities, based on electron-beam lithography and semiconductor equipment, to universities and industry. A central well-found research and prototype manufacturing service is available using advanced technology for microelectronics, masks, interconnects, direct write and for microsystems technology/microelectromechanical systems (MEMS). CMF is a neutral site where academic-industry and industry-industry collaborations offer good technology transfer opportunities.

RAS contact:
Andreas Schneider