dry etching

The study requested is a preparation for a possible research and development project of a product that can perform fast separation and inactivation of biological fluids. Proteins, peptides and metabolites are rapidly degraded after extraction, which causes large problems for both academic and industrial protein research. In this study, Imego will investigate the feasibility of fabricating low-cost glass and polymer chips that combine microfluidic separation with Denator’s proprietary preservation technology.

FEMTO-ST has fully equipped clean room equipment (laser mask writer; photolithography; RIE and DRIE); hot embossing; ultrasonic machining.

For more information about the facilities available, visit the FEMTO-ST website at:

our research and advisory potential: http://www.s3.kth.se/mst/research/index.shtml.
For our cleanroom facilities: http://www.electrumlaboratoriet.se/.

The Microsystem Technology lab (MST) is a part of the department of Signals, Sensors and Systems (S3). Our research is mainly centered around Microelectromechanical Systems (MEMS) and its applications, with a focus on silicon-based applied sensor and actuator technology. Our research staff has developed a significant number of devices with promising performance. The group fabricates its silicon structures and devices at the KTH microelectronics laboratory, comprising 1200m2 of cleanroom area with all the facilities of small-scale microelectronics and for research on and development of special purpose structures and components in silicon. The group works on applications in the medical field (MedMEMS), the biotechnology field (BioMEMS), optical components (OptoMEMS) and radio frequency signal components (RFMEMS).

The activity at Cranfield University will involve the integration of activities in two areas: Nanotechnology and Precision Engineering. The Nanotechnology Group at Cranfield University, specialises in fusing micro-engineering and nanotechnology with the industrial application and development of functional materials (especially ferroelectric) to produce novel devices.

The Fraunhofer-Institut für Biomedizinische Technik (IBMT) is one of the five institutes of the Alliance Life Science of the Fraunhofer-Gesellschaft. IBMT applies its potential on subjects, such as non- or minimal-invasivity, microsystems engineering, implant technology (interfaces between technical and biological microsystems), molecular and cellular biotechnology, nano(bio)technology, telemetric data and energy transfer, health telematics and multilocal sensor systems connected by communication technologies.
One main research field of the Miniaturized Systems Group at IBMT is the development of microfluidic devices for point of care applications. IBMT has a fully equipped class 100 clean room and has expertise in designing and fabricating microfluidic biochip interfaces as well as in the whole field of biochip packaging. Technologies like reel-to-reel hot embossing and lamination as well as moulding are available. Another research field is the development of modules and systems for the wireless transmission of biological & physiological signals for bio-monitoring and remote control of active medical implants. Included herein is the wireless transmission of energy for the operation of medical implants. The group has about 10 scientific and technical fulltime employees.