Multi Material Micro Manufacture Network of Excellence - Mechanical machining

Fabrication of piezoelectric thick-film bimorph micro-actuators from bulk ceramics using batch-scale methods

Tue, 29 Jul 2008 12:52:44 +0000

R.P.Jourdain and S.A.Wilson
Materials Department, School of Applied Sciences, Cranfield University, Cranfield, Bedfordshire, MK43 0AL, United Kingdom

Abstract

Piezoelectric ceramic films in the 20-60 micron thickness range are rarely employed today in commercial micro-mechanical devices, even though their expected force capability suggests that they are well suited to many micro-fluidic and micro-pneumatic applications. Some examples would be micro-scale fuel cells and micro-combustors. Head sliders, radio-frequency (RF) micro-switches and powered micro-optics are further potential application areas. These are only a few and the barriers in bringing them into reality are those of processing compatibility rather than commercial desirability. Such issues are being addressed in the EU Framework 6 Project ‘Q2M’, which focuses on batch-scale fabrication issues for high quality new micromechanical devices that are cost-effective and which have extended capabilities.
This paper discusses a potential batch-scale production route for piezoelectric thick-film bimorph microactuators that combines ultra-precision grinding of ceramics and femto-second laser machining, along with standard micro-fabrication techniques such as wafer bonding. This new method has the key advantage that many different shapes and thicknesses of actuator can be made with only minor process changes, meaning that actuators can be designed to suit their intended application. It contrasts with current practice whereby micro-actuators are often designed around a limited range of standard components, with consequent reduction in their achievable performance. The examples used are a 6mm diameter plane-spiral bimorph actuator for integration into a polymeric micro-valve and 2-5mm long bimorph cantilevers intended for use in
a new type of silicon ‘house’ micro-valve, with pneumatic applications.

Double hot-embossing with polymeric intermediate mould

Mon, 19 May 2008 12:33:38 +0000

Chantal Khan Maleka, Gaël Thuilliera, Roland Duffaitb , Laurent Guyoutc
a Laboratoire FEMTO-ST, CNRS UMR 6174, Département LPMO, 32 Avenue de l’Observatoire, 25044 Besançon Cedex, France.
b Centre de Transfert des Micro et Nanotechnologies (CTMN), 39 Avenue de l’Observatoire, BP 1445-25007 Besançon Cedex 3, France.
c Department of Applied Mechanical Engineering, University of Franche Comté, 16 Route de Gray, 25030 Besançon Cedex, France.

Abstract

Our approach uses a two-step replication process for hot embossing and a rigid polymeric intermediate mould. This process overcomes some geometrical limitations in microstructured mould fabrication, enables positive-tone imprinting, prolongs the lifetime of the master, and lowers the overall cost of the replication process.

Development of a Dynamic High Precision Miniature Milling Machine

Mon, 12 Nov 2007 16:23:32 +0000

C. Brecher(a)(b), R. Klar(b), C. Wenzel(b)
a: Werkzeugmaschinenlabor (WZL), RWTH Aachen University, Aachen, Germany
b: Fraunhofer-Institute for Production Technology, Aachen, Germany

Abstract

One of the main focuses in many research fields is the miniaturisation of work pieces and components. Micro fluidic, micro mechanic, micro electronic and micro optical functional groups are integrated into smallest space to microsystems for medical, information technology or automotive purposes. Directly opposed to the miniaturisation trend of these products are the machine tools used for the production becoming bigger and bigger, with the result that the proportion between the machining space and the needed floor space is more and more inefficient. To meet the process requirements as well as the requirements of the machine users of flexible and small high performance machine tools the Fraunhofer IPT developed and designed a compact high precision milling machine. The paper describes current trends in the field of compact machine tools under special consideration of the mechanical setup and the development of a small and high precise as well as high dynamic micro milling machine.

DLC Based BioMEMS Probe for Electrical Activity Recording of Tissues and Cells

Mon, 12 Nov 2007 16:23:32 +0000

C. Moldovan(a), R. Iosub(a), C.P. Lungu(b), A.M. Lungu(b), B. Firtat(a), C. Roman(a), R. Albulescu(c
a: National Institute for Research and Development in Microtechnologies, IMT-Bucharest, 126A Erou Iancu Nicolae Street, 077190 Bucharest, Romania
b: National Institute for Laser, Plasma and Radiation Physics, POBox MG-36, Magurele, Bucharest, Romania
c: National Institute for Chemical-Pharmaceutical R&D, 112 Calea Vitan, Bucharest, Romania

Abstract

An implantable probe for electrical activity monitoring of living tissues was engineered and fabricated on a silicon chip at IMT-Bucharest, Romania. In order to improve the mechanical resistance and biocompatibility of the device, the technology of Thermionic Vacuum Arc (TVA) deposition was used for coating the implantable parts with diamond like carbon (DLC) with zero stress (0SC). The paper presents the design and manufacturing steps of an DLC based 8-channel microprobe for recording the electrical activity of neural cells and tissues. The specific fabrication processes of the integrated microprobe are presented. The microprobe was packaged using gold wire bonding, in order to allow the electrical signals reading and processing. The electronics implemented on the board accomplish the separation and reduction of the biological noise recording. The microprobe functionality was tested in vivo and in vitro, in specialized laboratories, by recording electrical signals from cells cultures and mice organs. Biocompatibility tests were performed on implantable microprobes, coated with DLC/0SC, introduced in cells cultures. The integrated microprobe for monitoring tissues electrical activity can be used in laboratories and research centres acting in the biomedical field, which study the cells growth and their response to physico-chemical stimuli, in hospitals and treatment centres for people suffering from neurological diseases.

A Synopsis of U.S. Micro-Manufacturing Research and Development Activities and Trends

Mon, 12 Nov 2007 16:23:32 +0000

Kornel F. Ehmann(a)(b)(c)(d)
a: Department of Mechanical Engineering, Northwestern University, Evanston IL, USA
b: Department of Mechanical Science and Engineering, University of Illinois at Urbana/Champaign, USA
c: Department of Mechanical Engineering, Indian Institute of Technology – Kanpur, India
d: Department of Mechanical Engineering, Chung Yuan Christian University, Chung Li, Taiwan

Abstract

Micro-manufacturing in the context of this presentation is defined as the manufacture of components and products in the sub-millimeter to a few-millimeter range with micron size feature characteristics of high accuracy and precision in a wide range of engineering materials by non-lithography based processes. The paper addresses three topics. First, the findings of a worldwide study on micro-manufacturing, conducted by the World Technology Evaluation Center, Inc. (WTEC) will be summarized. This summary will compare U.S. efforts to those in a number of Asian and European countries. Second, a précis of selected ongoing work conducted at U.S. universities with leading programs in the field will be given. Topics to be discussed include the development of miniaturized machine tools for cutting, forming and manipulation as well as the modeling of micro-manufacturing processes. An account of the growing industrial activities related to the development of micro-manufacturing equipment will also be included. Third, emerging directions and challenges in the development of micro-manufacturing technologies will be reflected upon.

USTUTT

Tue, 30 Jan 2007 13:05:53 +0000

Facilities/Hardware:

Sensors and actuators based on metallized polymers, precision micro injection moulding, environmental testing
website: www.uni-stuttgart.de/izfm

RAS contact:
kueck

University of Naples Federico II

Wed, 10 Jan 2007 17:14:33 +0000

Facilities/Hardware:

Manufacturing processes and simulation
Contact and non-contact reverse engineering
Rapid product development
2D and 3D metrology systems
Advanced materials mechanical characterisation
Metallographic analysis
Nondestructive testing and evaluation
Intelligent sensor systems

RAS contact:
tetiro

FEMTO-ST/DPT. LPMO

Mon, 14 Aug 2006 12:56:52 +0000

Facilities/Hardware:

FEMTO-ST has fully equipped clean room equipment (laser mask writer; photolithography; RIE and DRIE); hot embossing; ultrasonic machining.

For more information about the facilities available, visit the FEMTO-ST website at:

RAS contact:
Chantal

KTH - Microsystem Technology & Cleanroom fabrication facility

Thu, 19 May 2005 15:20:45 +0000

Facilities/Hardware:

our research and advisory potential: http://www.s3.kth.se/mst/research/index.shtml.
For our cleanroom facilities: http://www.electrumlaboratoriet.se/.

The Microsystem Technology lab (MST) is a part of the department of Signals, Sensors and Systems (S3). Our research is mainly centered around Microelectromechanical Systems (MEMS) and its applications, with a focus on silicon-based applied sensor and actuator technology. Our research staff has developed a significant number of devices with promising performance. The group fabricates its silicon structures and devices at the KTH microelectronics laboratory, comprising 1200m2 of cleanroom area with all the facilities of small-scale microelectronics and for research on and development of special purpose structures and components in silicon. The group works on applications in the medical field (MedMEMS), the biotechnology field (BioMEMS), optical components (OptoMEMS) and radio frequency signal components (RFMEMS).

RAS contact:
wouter

Bayerisches Laserzentrum

Wed, 18 May 2005 09:08:57 +0000

Facilities/Hardware:

Various laser systems for ablation, soldering, welding, marking, adjustment, sintering, stereolithography, LOM.

RAS contact:
Stephan Roth

KU Leuven

Tue, 12 Apr 2005 12:40:08 +0000

Facilities/Hardware:

K.U.Leuven is one of the three divisions of the department of Mechanical Engineering. PMA is active in the following areas: manufacturing processes, machine and instrument design, structural dynamics, acoustics, CAD/CAM/CIM, robotics, assembly automation, mechatronics, micro- and precision engineering, and metrology. The PMA division work includes original fundamental work as well as successful industry-oriented projects carried out in collaboration with small, medium and large companies and with international organisations like the European Space Agency. An important role of the research activities of the PMA division is based on international collaboration as shown by the participation of the division in more than 40 EC funded projects. The PMA division has also been nominated as Centre of Excellence by the Belgian Government.

RAS contact:
dominiek reynaerts

Cranfield University

Thu, 07 Apr 2005 08:54:13 +0000

Facilities/Hardware:

The activity at Cranfield University will involve the integration of activities in two areas: Nanotechnology and Precision Engineering. The Nanotechnology Group at Cranfield University, specialises in fusing micro-engineering and nanotechnology with the industrial application and development of functional materials (especially ferroelectric) to produce novel devices.

RAS contact:
Paul B Kirby

TNO Science and Industry

Thu, 31 Mar 2005 14:13:55 +0000

Facilities/Hardware:

TNO Industrial Technology increases the competitive strength of companies by providing them support in the development of products, materials and production processes. In order to solve our customers' problems and help them fulfil their ambitions, we combine our competences with the customers' own expertise and, if necessary, we involve other TNO institutes and third parties.

RAS contact:
Pieter Bolt

Fraunhofer-IBMT

Mon, 21 Mar 2005 13:58:36 +0000

Facilities/Hardware:

The Fraunhofer-Institut für Biomedizinische Technik (IBMT) is one of the five institutes of the Alliance Life Science of the Fraunhofer-Gesellschaft. IBMT applies its potential on subjects, such as non- or minimal-invasivity, microsystems engineering, implant technology (interfaces between technical and biological microsystems), molecular and cellular biotechnology, nano(bio)technology, telemetric data and energy transfer, health telematics and multilocal sensor systems connected by communication technologies.
One main research field of the Miniaturized Systems Group at IBMT is the development of microfluidic devices for point of care applications. IBMT has a fully equipped class 100 clean room and has expertise in designing and fabricating microfluidic biochip interfaces as well as in the whole field of biochip packaging. Technologies like reel-to-reel hot embossing and lamination as well as moulding are available. Another research field is the development of modules and systems for the wireless transmission of biological & physiological signals for bio-monitoring and remote control of active medical implants. Included herein is the wireless transmission of energy for the operation of medical implants. The group has about 10 scientific and technical fulltime employees.

RAS contact:
Thomas Velten

IMT

Fri, 18 Mar 2005 12:30:44 +0000

Facilities/Hardware:

The National Institute for Research and Development in Microtechnologies is a non-budgetary research unit supervised by the Ministry of Education, Research and Youths. The Institute of Microtechnology set up in 1993, by a decision of the Romanian Government, became in 1996 a National Institute and this status was re-confirmed in 2001after the Evaluation initiated by the Ministry of Education and Research .
The field of activity of IMT-Bucharest comprises: Development of micro and nano fabrication technologies, micro and nanostructures, microsystems and subsystems, including computer-aided design, simulation and testing of microstructures and microsystems and microelectronic components and development of microphysical and functional characterization technologies. The basic activities of IMT-Bucharest are: Research, development and services in the field of Micro and nanotechnologies, new materials; Information and communication technologies (networks, web-sites, Internet, Intranet, Extranet); Technological assistance for SMEs: consulting, design, technology transfer, training on the job; Organizing scientific events (e.g. the International Semiconductor Conference CAS) and training courses; Studies for industrial restructuring and modernization; Strategies of development.

RAS contact:
Carmen Moldovan