Multi Material Micro Manufacture Network of Excellence - Micro-optics

Fabrication of Highly Precise Fiber Optical Array Products by use of Laser Based Micro Alignment

Mon, 12 Nov 2007 16:23:32 +0000

M. Zimmermann, L. Schaefer, M. Rank, M. Schmidt, S. Roth
Bayerisches Laserzentrum gGmbH, Konrad-Zuse-Str. 2-6, 91052 Erlangen, Germany

Abstract

The proceeding integration and miniaturization of mechanical and optical functions in systems for optical communication, for sensor and environmental technologies or for life sciences require an improvement and a customization of the manufacturing technologies. For fiber optical systems and components, especially for singlemode applications, adequate methods for a precise adjustment are necessary which allow a fast and cost-efficient alignment of fibers and other optical components like microlenses or laserdiodes. The demands on the adjustment process rise additionally for array applications. Laser based micro alignment is a promising technology for such critical adjustment tasks. We investigated the use of this technology for the alignment of fibers within fiber arrays. They are used for the assembly of fiber collimator arrays. We developed and analysed suitable actuator geometries for this application. In this paper we show some important results of the FEM based analyses to demonstrate the influence of the laser irradiation regime. First experimental results confirm the actuator behaviour calculated in the FEM analysis. Based on the simulations and experimental results, we are developing a compact alignment module which is adapted to the demands on the assembly process of fiber optical components. This alignment tool is one module within a complete miniaturised, scaleable and modular assembly line for the production of fiber collimator arrays.

KTH - Microsystem Technology & Cleanroom fabrication facility

Thu, 19 May 2005 15:20:45 +0000

Facilities/Hardware:

our research and advisory potential: http://www.s3.kth.se/mst/research/index.shtml.
For our cleanroom facilities: http://www.electrumlaboratoriet.se/.

The Microsystem Technology lab (MST) is a part of the department of Signals, Sensors and Systems (S3). Our research is mainly centered around Microelectromechanical Systems (MEMS) and its applications, with a focus on silicon-based applied sensor and actuator technology. Our research staff has developed a significant number of devices with promising performance. The group fabricates its silicon structures and devices at the KTH microelectronics laboratory, comprising 1200m2 of cleanroom area with all the facilities of small-scale microelectronics and for research on and development of special purpose structures and components in silicon. The group works on applications in the medical field (MedMEMS), the biotechnology field (BioMEMS), optical components (OptoMEMS) and radio frequency signal components (RFMEMS).

RAS contact:
wouter

Bayerisches Laserzentrum

Wed, 18 May 2005 09:08:57 +0000

Facilities/Hardware:

Various laser systems for ablation, soldering, welding, marking, adjustment, sintering, stereolithography, LOM.

RAS contact:
Stephan Roth

KU Leuven

Tue, 12 Apr 2005 12:40:08 +0000

Facilities/Hardware:

K.U.Leuven is one of the three divisions of the department of Mechanical Engineering. PMA is active in the following areas: manufacturing processes, machine and instrument design, structural dynamics, acoustics, CAD/CAM/CIM, robotics, assembly automation, mechatronics, micro- and precision engineering, and metrology. The PMA division work includes original fundamental work as well as successful industry-oriented projects carried out in collaboration with small, medium and large companies and with international organisations like the European Space Agency. An important role of the research activities of the PMA division is based on international collaboration as shown by the participation of the division in more than 40 EC funded projects. The PMA division has also been nominated as Centre of Excellence by the Belgian Government.

RAS contact:
dominiek reynaerts

CEA Grenoble

Fri, 01 Apr 2005 08:43:53 +0000

Facilities/Hardware:

The CEA (Atomic Energy Commission) is a French Governmental Research Organisation (1500 employees) devoted to both fundamental and industrial R&D. The CEA-Grenoble research center is operated by the DRT (Technological Research Direction) in the fields of technologies for information, communication and of technologies for new energies. The two main laboratories (LETI and LITEN) involved in 4M are developing polymers micro systems for various fields of applications (biotechnology, micro fluidics, micro fuel cells, photonics and micro heat exchanger).These two laboratories are one of the largest European R&D operators in the micro & nanotechnologies, nano-materials and electronics. It mainly aims at helping companies to increase their competitiveness through technological innovation and transfer of its technical know-how to industry. CEA/DRT has also an active policy of start-up creation. More than 20 permanent people are working on the following topics relevant to 4M:
•UV LIGA micromolding fabrication process: thick photoresist photolithography, mould fabrication, hot embossing
•Prototyping of polymers microcomponents: direct fabrication with thick photoresist, polymer Deep Etching, casting
•Assembling and packaging of polymer Microsystems.
•Manufacturing technologies of energy microsources.
•Active Surface treatment (Hydrophobic, Hydrophilic,…)
•Characterization of polymer properties (Strain, viscosity, Surface roughness,…)

RAS contact:
bertrand fillon

CCLRC - Rutherford Appleton Laboratory

Wed, 09 Mar 2005 09:07:28 +0000

Facilities/Hardware:

CCLRC is the largest UK national research facility employing ~2000 scientists, engineers and support staff. The project-related tasks for 4M will be carried out by the Central Microstructure Facility (CMF) at CCLRC-RAL. CMF is a division of the CCLRC engaged in R&D activities in micro and nano systems technology for the past 20 years. It has been involved with large number of nationally funded and EC funded projects. CCLRC -RAL has led many Nationally funded programmes including the £19 million Innovations in Industrial Lithography (ISL) programme funded by the UK Department of Trade and Industries. The CMF is a major national centre for microsystems technology. As a national facility we interact with over 100 universities in the UK. Our European involvement is also very strong. We have led many EU projects.
The Central Microstructure Facility (CMF) provides state-of-the-art microfabrication services and R&D facilities, based on electron-beam lithography and semiconductor equipment, to universities and industry. A central well-found research and prototype manufacturing service is available using advanced technology for microelectronics, masks, interconnects, direct write and for microsystems technology/microelectromechanical systems (MEMS). CMF is a neutral site where academic-industry and industry-industry collaborations offer good technology transfer opportunities.

RAS contact:
Andreas Schneider