IMT

The National Institute for Research and Development in Microtechnologies is a non-budgetary research unit supervised by the Ministry of Education, Research and Youths. The Institute of Microtechnology set up in 1993, by a decision of the Romanian Government, became in 1996 a National Institute and this status was re-confirmed in 2001after the Evaluation initiated by the Ministry of Education and Research .
The field of activity of IMT-Bucharest comprises: Development of micro and nano fabrication technologies, micro and nanostructures, microsystems and subsystems, including computer-aided design, simulation and testing of microstructures and microsystems and microelectronic components and development of microphysical and functional characterization technologies. The basic activities of IMT-Bucharest are: Research, development and services in the field of Micro and nanotechnologies, new materials; Information and communication technologies (networks, web-sites, Internet, Intranet, Extranet); Technological assistance for SMEs: consulting, design, technology transfer, training on the job; Organizing scientific events (e.g. the International Semiconductor Conference CAS) and training courses; Studies for industrial restructuring and modernization; Strategies of development.

Technological facilities: Clean room class 100; Equipments and facilities for masks and wafers fabrication; Available processes: Oxidation, diffusion, ion implantation; Si3N4 and polysilicon deposition; spinning for resists, polymers, sol-gel materials; thin layer metals deposition (Au, Cr, Al, Ti, W, Mo, Cu, Pt); photolithography; lift-off; plasma etching; bulk micromachining (silicon anisotropic etching, glass etching; double side alignment, bonding; ); surface micromachining (sacrificial layer technique); SEM; AFM; testing; characterisation; packaging

Softwares for simulation and design for both MEMS and electronics: COVENTOR; ANSYS; CADENCE; IE 3D; FIDELITY; Opto FDTD

For more information visit::

www.imt.ro