Patterned multilayer thick film electroceramic structures for micro electromechanical systems

F. Dauchy, R.A.Dorey
Nanotechnology Group, School of Industrial and Manufacturing Science, Cranfield University, Cranfield, Bedfordshire, UK

Abstract

The fabrication and structuring of multilayer thick film piezoelectric (PZT – lead zirconate titanate) structures, using composite sol gel techniques and wet etching, will be described.

The composite sol gel technique involves producing a PZT powder/sol composite slurry, which when spun down yields films a few micrometers thick. Repeated layering, and infiltration, has been used to produce PZT films between 10 and 40μm thick. Due to the low firing temperature (<720oC) it has also been possible to produce PZT films with embedded thin (ca 200nm thick) metal electrodes.

The PZT thick films have also been structured using a wet etching technique. Examples of features and cavities with lateral dimensions in the order of 10’s of micrometers are presented.

The ability to fabricate and structure thick functional films, with embedded metal electrode structures, offers the possibility to create novel micro-device structures suitable for use in micro electromechanical systems (MEMS)