Micro-/Nano Engineering Synchrotron Beamline for high-aspect-ratio structures and LIGA applications

STFC Technology (CMF of the Rutherford Appleton Laboratory) and Diamond Light Source are holding a workshop on "Micro-/Nano Engineering Synchrotron Beamline for high-aspect-ratio structures and LIGA applications".
The intention of the workshop is to inform about technical capabilities of a potential LIGA beamline at the Diamond Light Source. The workshop will also give a good opportunity to form a LIGA / X-ray Lithography interest and user group for the intended beamline in the UK.
The workshop should suit industrial partners as well as academia. The benefits of a UK LIGA beamline will be discussed. There will be also the opportunity to present your company or research group in a poster exhibition.

The provisional workshop outline is:

Start 10:00 am
- Update of Diamond Light Source (Colin Norris)
- Introduction / Basic overview of beamline purpose - LIGA & LIGA-type techniques (RAL-CMF)
- Materials Processing: the role of LIGA and its complementarily to other techniques (RAL-CMF)
- Industrial needs: high aspect micro/nano fabrication (Peter Jefferies - TECAN)
- Commercialisation of LIGA (Ron Lawes)
- Novel Resists for polymers for LIGA (TBA)
- LIGA & LIGA-type applications for sensors and actuators (Cranfield Univ.)
- Experience at other SR facilities (Volker Saile - Forschungszentrum Karlsruhe FZK)
- Optical requirements for beamline (Kawal Sawhney - Diamond)

In the afternoon we continue with small round table discussions to identify your requirements for engineering high-aspect-ratio and high resolution micro-/nano-structures.

If you interested in participating the workshop, please contact Andreas Schneider. Further detailed information will be sent out to workshop participants soon.