Nanomembrane technology and nanomembrane based devices

Lead Division
Micro-sensors & Actuators, Division 11

Other Divisions Participating
Polymer Processing, Division 4
Metrology, Division 5
Micro-optics, Division 9
Micro-fluidics, division 10

Summary
This project is a joint effort of Polymers, Methrology, Microoptics, Microfludics, and Sensors & Actuators divisions to define an ambitious and high quality EU project in nanomembrane devices and the technologies underpinning their development.

The nanomembrane is a new MEMS/NEMS structural element. The term “nanomembrane” stems from its main property - an extremely low thickness. This free-standing element has a thickness of 8 – 20 nm, which corresponds to the thickness of 25 – 60 atomic layers. In contrast to its thickness, the lateral dimension of nanomembrane attains 3 – 5 mm and the aspect ratio is up to 500,000. Those properties classify nanomembranes in both NEMS and MEMS: NEMS because of its thickness and MEMS due to its area.

Despite their minuscule thickness, nanomembranes are robust enough to be applied in a variety of MEMS devices. Apparently, nanomembrane constitutive materials with atomic level thicknesses have very different properties from the bulk ones and so bring novel characteristics to the future MEMS devices. Nanomembrane technology is now in its embryonic state and there is a long way to go to the practical use of nanomembrane technologies. This goal could be achieved through a large and long term project. The basic objectives of this 4M cross-divisional project are:

• to form an interdisciplinary team from Polymers, Metrology, Microoptics, Microfludics, and Sensors & Actuators divisions
• to make a comparative analysis of the efforts and results from others
• to define the IPR issues of new technologies and devices,
• to organize a limited number of experiments, necessary for verification of some key properties of the nanomembranes.
• to prepare a workprogramme for an ambitious R&D project with the following key elements:

• R&D plan for nanomembrane fabrication technologies;
• measurement and characterization program;
• program and plan for the application and practical use of nanomembrane technologies (for sensors, MOEMS, microfluidics and other devices)

Status of this cross-divisional project
Completed.The Roadmap Report arising from this deliverable is available to 4M Partners here.