Budapest University of Technology and Economics

Diamond turning, micro milling and micro drilling
Environment of the machine:
Csepel Ultraturn (Hembrug)with
• conditional room ( 20°C ± 0,5°C ),
• relative moisture 50 %,
• active alleviation with air-spring,
• hydrostatic bearings
• smallest programming increment 0,1 micron,
• workpiece clamper in vacuum gripper,
Additional investigation devices
1. AFM (TopoMetrix Explorer, Santa Clara, CA). We used soft silicon nitride cantilevers Thermomicroscopes, Coated Sharp Microlevers, Model No. MSCT-AUHW, with typical force constant 0.01-0.03 N/m, 20 nm radius of curvature. The examinations were acquired in contact mode in water at room temperature. Range of measuring: 50 micron x 50 micron
2. Dimension tolerances: CMM, ZEISS UMC 850 OPTON. Accuracy: 1 micron
3. Surface roughness: PERTHOMETER S6P. We used with diamond and laser sensor.
4. Microhardness measuring (with max. 500 g weight)
5. Optical Microscope: Olympus PME-3
6. Scanning Electro Microscope + EDS + EBSD Philips XL30