Measurement issues related to the characterisation of piezo-actuators

M. G. Cain
National Physical Laboratory, Teddington, TW11 0LW, UK

This presentation reviews the various measurement methods that may be used to characterise piezoelectric thin and thick films for applications such as macro-scale and micro-scale actuators. Current methods include; polarisation loop analysis, interferometry, modified Berlincourt methods, Laser Intensity Modulation Method, residual stress based on wafer curvature, modulus via laser flash and indentation methods and nano-scale probes based on modified atomic force microscopy. The material structure is typically characterised using various imaging techniques such as Scanning Electron Microscopy, Transmission Electron Microscopy and optical microscopy. The functional and dielectric properties are often closely linked to the geometry and boundary effects imposed by the material systems. Examples here include the film/substrate interaction where the constraining substrate influences the electroactive response of the piezo thin film. This has the effect of reducing useful actuation. In cases such as these, it is necessary to develop new measurement methods and/or to carefully model the system to understand these interactions. The methods outlined in this talk will include some of the methods that are covered by International standards (typically suitable only for bulk materials), and the vast majority that are devoid of any standards but that require evaluation and validation on an international basis.

Keywords
metrology, piezoelectrics, actuators