Conference Programme

Day 1: Wednesday, June 29, 2005

Day 2: Thursday, June 30, 2005

Day 3: Friday, July 1, 2005

Day 1, June 29, 2005

Time	08:00h to 09:00h
Registration
Time	09:00h to 09:15
Opening
Time	9:15h to 11:00h
Invited Talks Chair: W. Menz, Germany Manufacturing of Micro Moulds by Conventional and Energy Assisted Processes Jürgen Fleischer,University of Karlsruhe,Germany Hot Embossing for the Rapid Prototyping of Microstructured Polymer H. Reinecke,IMTEK, Germany Ceramic Processing for Microsystems Applications Elis Carlstrom, SCI, Sweden
Time	11:00h to 11:30h
Coffee Break
Time	11:30h to 12:45h
Session 1 - Polymers Chair: A. Schoth, IMTEK, Germany Double hot-embossing with polymeric intermediate mould C. K. Maleka, G. Thuilliera, LPMO, France. R. Duffaitb, CTMN, France L. Guyoutc, University of Franche Comté, France. Micro Assembly Injection Moulding Potential Application in Medical Science W. Michaeli, D. Opfermann, RWTH Aachen University, Germany Surface Microstructure Replication in Injection Moulding H. N. Hansen, U. A. Theilade, DTU, Denmark Polymer technology for disposable microfluidics R. Jurischka, C. Blattert, I. Tahhan, A. Schoth, H. Reinecke, IMTEK, Germany	Session 2 Ceramics Chair: P. Johander, IVF, Sweden Rapid prototyping of microstructured ceramic and metal parts using reaction molding techniques T. Hanemann, J. Hausselt, FZK, Germany K. Honnef, Albert-Ludwigs-Universität Freiburg, Germany Mixed technologies for gas sensors microfabrication C. Moldovan1, S. Sosin1, IMT, Romania U. Kaufmann, H.J. Ritzhaupt-Kleissl, FZK, Germany S. Dimov, P. Petkov, Cardiff University, UK R. Dorey, Cranfield University, UK K. Person, IMEGO, Sweden D. Gomez, Tekniker, Spain P. Johander, IVF, Sweden Patterned multilayer thick film electroceramic structures for micro electromechanical systems F. Dauchy, R.A.Dorey, Cranfield University, UK Micro-machining of Metals, Ceramics and Polymers using Nanosecond Lasers M.R.H Knowles, G. Rutterford, D. Karnakis, A. Ferguson, Oxford Lasers Ltd, UK
Time	12:45h to 13:45h
Lunch
Time	13:45h to 15:00h
Session 3 Metals Chair: U. Engel, University of Erlangen-Nuremberg, Germany Processing and properties of bi-material parts by micro metal injection moulding Ph. Imgrund, Dr. A. Rota, L. Kramer , IFAM, Germany Microforming at elevated temperature – forming and material behaviour B. Eichenhueller, U. Engel, University of Erlangen-Nuremberg, Germany Micro-extrusion of ultra-fine grain aluminium A. Rosochowskia, University of Strathclyde, UK W. Preszb, L. Olejnikb, Warsaw University of Technology, Poland M. Richertc, AGH University of Science and Technology, Poland A friction model for microforming H.J.Jeon, A.N.Bramley, University of Bath, UK	Session 4 Sensors & Actuators Chair: P Kirby, University of Cranfield, UK Design study of a capacitive pressure sensor in non-silicon materials M.H.H. Meuwissen, E.P. Veninga, M.W.W.J. Tijdink, M.G.H. Meijerink, TNO, The Netherlands Optical Biosensor Based on Integrated Interferometer Using Polymeric Waveguides D. Esinenco, R. Muller, M. Kusko, IMT, Romania S.D. Psoma, A. Schneider, S.E. Huq, CCLRC, U.K. A. S. Gazzé, Progenica, Spain Stress control in bimaterial sensors and actuators J. Matovic, Vienna University of Technology, Austria Comparison of hydraulic microactuator configurations M. De Volder, J. Peirs, D. Reynaerts, J. Coosemans, R. Puers, Katholieke Universiteit Leuven, Belgium O. Smal, B. Raucent, Université Catholique de Louvain, Belgium
Time	15:00h to 15:30h
Coffee Break
Time	15:30h to 15:45h
Micro and Nano Manufacturing in FP7 and Manufuture Programmes H .Pedersen, European Commission
Time	15:45h to 17:00h
Panel Discussion Multi-Material Micro Manufacture: Industrial Demands 4M Industrial Board Moderator: W. Menz, Germany Participants: F. Bartels, Bartels Microtechnologies, Germany M. Ganz, Battenfeld, Austria C. Hanisch, Festo, Germany R. Wimberger-Friedl, Phillips Research Laboratories, The Netherlands D. Ulieru, Romes - SA, Romania J. Anjeby, Saab Ericsson Space AB, Sweden G. Mills, Ultratools, UK L. Cuccaro, AVIO, Italy U. Ljungblad, Micronic Laser Systems, Sweden
Time	17:05h to 18:00h
Posters Session 1 Polymers, Ceramics, Metals, Metrology Chair:Irmgard Langbein Short Presentations (2 slides and up to 2 min per presentation) Polymers Microstructure simulations of over-moulded metal micro-sized needles W. Michaeli, M. Bussmann, B. Renner, RWTH Aachen University, 52062 Aachen, Germany Multiphoton assisted micro- and nanoprocessing of materials H. Schuck, T. Velten, T. Anhut, D. Sauer, R. Le Harzic, K. König, IBMT, Germany Study of the rheological properties of poly(methylmethacrylate) (PMMA) and cycloolefin-copolymer (COC) to optimize the hot-embossing process M. Sahli, C. Roques-Carmesa, ENSMM, France R. Duffait, CTMN, France C. Khan Malek, LPMO, France Thermo-mechanical properties of thermoplastic polymer-nanofiller composites E. Ritzhaupt-Kleissl, J. Haußelt, T. Hanemann, FZK, Germany A new approach in polymer waveguide fabrication O. Geschke, S Dahms, DTU, Denmark, Manufacturing of high quality micro prototypes by injection moulding using hybrid mould technology A. Frick, C. Stern, U. Berger, University of Applied Sciences, Germany Study of Factors Affecting Aspect Ratios Achievable in Micro-injection Moulding B. Sha, S.S. Dimov, D.T. Pham, C. A. Griffiths, Cardiff University, UK Fabrication Chain for Prototyping of Microfluidic Chips in Polymers T. Brenner, C. Müller, H. Reinecke, R. Zengerle, J. Ducrée, IMTEK, Germany Characterization of polymers for improved shrinkage prediction in micromolding. M.H.E. van der Beek, TNO, The Netherlands G.W.M. Peters, H.E.H. Meijer, Eindhoven University of Technology, The Netherlands High aspect ratio micron-sized vias in "flex" and polymer foils; using ion irradiation H. Yousef, M. Lindeberg, K. Hjort, Uppsala University, Sweden Ceramics The ceramics substrates microprocessing by high precision laser technologies for microsystems,microsensors and actuators applications. D. Ulieru, ROMES S.A., Romania I. Cernica, IMT, Romania Low-Pressure Injection Molding of Ceramic Micro Devices Using Sub-Micron and Nano Scaled Powders M. Müller, W. Bauer, H.-J. Ritzhaupt-Kleissl, FZK, Germany High-resistive micro components produced by high-pressure powder injection moulding V. Piotter, G. Finnah, K. Plewa, R. Ruprecht, J. Hausselt, FZK, Germany Capability study of the Fcubic direct shell process for casting micro-components J-F. Charmeux, R. Minev, S. Dimov, E. Minev, S. Su, Cardiff University, UK U. Harrysson, Fcubic, Sweden Direct manufacture of ceramic micro components with layered manufacturing methods P Johander , IVF, Sweden U. Harrysson , Fcubic, Sweden U. Kaufmann, H.-J. Ritzhaupt-Kleissl, FZK, Germany Metals Development of a powder blend device suitable for powder die filling L. Federzoni, M.L. Penaud, P Revirand, O. Dauchot, CEA, France Nano-porous structures prepared by electrochemical anodisation of Aluminium D. Regonini, C.R. Bowen, D.Allsopp, R. Stevens, University of Bath, UK An advanced approach in simulation of microforming processes S. Geißdörfer, U. Engel, M. Geiger, University of Erlangen-Nuremberg, Germany Flexible tool system for cold forging of micro-components C. P-Withen , J. R. Marstrand , M. Arentoft , N. A. Paldan, DTU, Denmark Spring-back behaviour of thin metal foils in free bending processes A. Diehl, U. Engel, M. Geiger, University of Erlangen-Nuremberg, Germany A simulation model for crater formation in laser milling T Dobrev, D T Pham, S S Dimov, Cardiff University, Cardiff, CF24 3AA Discussion on Thin WEDM Error Analysis and Characterisation A. Herrero, L. Uriarte, J. Esmoris, Tekniker, España J.A. Sánchez, ETSII, España Simulating electroplated micro surfaces in 3-D H. J. Jeon, J Low, A. R. Mileham, A.N. Bramley, University of Bath, UK C. Johal, Glacier Vandervell Bearings Ltd, UK Multilayered and nanolayered hard nitride thin films for a better yield in micro machining. C. Ducros, B. Fillon, F. Sanchette, France Laser striation of groove patterns on metallic surfaces C. Vincent, G. Monteil, Laboratoire de Microanalyse des Surfaces, Besançon, France T. Barrière, J.C. Gelin, Institut FEMTO-ST, France Micro-stamping of Molybdenum Rhenium Components S. Thibaud, N. Boudeau, J.F. Michel, J.C. Gelin, FEMTO-ST Institute, France Flexible Tool System for Creation of Surface Micro-Geometries M. Rosochowskaa, K. Chodnikiewicza, R. Balendraa, University of Strathclyde, UK R. Smith, Pascoe Engineering Ltd., UK Metrology Micro metrology tools for local investigation of mechanical phenomena in solids and liquids P.I. Koulev, I.R. Roussev, Bulgarian Academy of Sciences, Bulgaria Metrology Applications of Two-Dimensional Frequency Analysis for Micro-Features Characterisation R. Teti, University of Naples Federico II, Italy L. Mattsson, KTH, Sweden B. Jurisevic, University of Ljubljana, Slovenia
Time	18:00h to 19:00h
Posters Session 1 (continuation) Polymers, Ceramics, Metals, Metrology
Time	19:00h to 21:00h
Banquet

Details about the oral and poster presentation papers can be found in the book of abstracts

Day 2, June 30, 2005

Time	8:30h to 10:15h
Invited Talks Chair: S. Dimov, Cardiff University, UK Reliability Research on the way from Micro to Nano Bernd Michel, IZM, Germany Challenges in micro-optics H. P. Herzig, Institut de Microtechnique, Neuchatel Switzerland Lab-on-Chip Microsystems for cancer diagnostics and for monitoring of cancer therapy Stanislas Krawczyk, CNRS, France
Time	10:15h to 10:35h
Coffee Break
Time	10:35h to 11:30h
Panel Discussion (4M Scientific Advisory Board) Multi-Material Micro Manufacture: Research Challenges Moderators: W. Menz, Germany & S. Dimov, Cardiff University, UK Participants: K. Takamasu, University of Tokyo, Japan H. Reinecke, IMTEK, Germany E. Brinksmeier, Universitat Bremen, Germany E. Carlstrom, SCI, Sweden T. Vorburger, NIST, USA, B. Michel, Fraunhofer-IZM, Germany S. Krawczyk, CNRS, France H. P. Herzig, Institut de Microtechnique, Neuchatel , Switzerland M. Cain, NPL, UK A. Dietzel, TU Eindhoven, The Netherlands
Time	11:35h to 12:45h
Session 5 - Tooling Technologies Chair: C Wenzel S Lange, IPT, Germany Adaptable Five-Axis Polishing Machine Head C. Brecher, C. Wenzel, IPT, Germany Miniaturization of the injection abrasive water jet machining process H. Orbanic, B. Jurisevic, D. Kramar, M. Junkar, University of Ljubljana, Slovenia M. Grah, Litostroj E.I., Slovenia A Comparison between Microfabrication Technologies for Metal Tooling L. Uriarte, Tekniker, Spain A. Ivanov, Cardiff University, UK H. Oosterling, TNO, The Netherlands L. Staemmler, HSG-IMAT, Germany P. Torben, DTU, Denmark D. Allen, Cranfield University, UK New methods for tool failure detection in micro-milling E. Gandarias, S. Dimov, D. T. Pham, A. Ivanov, K. Popov, Cardiff University, UK R. Lizarralde, Ideko S.Coop, Spain. P.J. Arrazola, Mondragon Unibertsitatea, Spain.	Session - 6 Micro-Fluidics Chair: P. Johander, IVF, Sweden Intelligent intraoral drug delivery microsystem T. Velten, H. H. Ruf, T. Knoll, T. Koch, O. Scholz, IBMT, Germany A. Wolff, B. Z. Beiski, Assuta Hospital, Israel An extended toolbox for fully integrated sample processing and detection on a high-frequency centrifugal microfluidic platform T.Brenner, M.Grumann, S.Haeberle, L.Riegger, J.Steigert, F.v. Stetten, R.Zengerle and J. Ducrée, IMTEK, Germany, Control of fluidic in a plastic disposable chip used of POC-diagnostics J.E. Wipenmyr, A. Krozer, Imego AB, Sweden Microfluidic Devices with Micronozzles Fabricated by Injection Moulding H. Kück, D. Warkentin, HSG-IMAT, Germany K. Hiltmann, P. S. Messner, HSG-IMIT, Germany Koltay, R. Steger, R. Zengerle, IMTEK, Germany
Time	12:45h to 14:00h
Lunch
Time	14:00h to 15:45h
Invited Talks Metal Cutting of Microstructures Prof. E. Brinksmeier, University of Bremen, Germany Comparison of Optical and Stylus Methods for Measurement of Surface Texture Dr. Theodore Vorburger, National Institute of Standards and Technology, NIST, USA Measurement issues related to the characterisation of piezo-actuators Dr. Markys Cain, National Physical Laboratory (NPL), UK
Time	15:45h to 16:15h
Coffee Break
Time	16:15 to 17:30
Session - 7 Assembly and Packaging Chair: E. Jung, IZM, Berlin, Germany Innovative handling techniques of thin flexible micro parts C. Brecher, C. Peschke, IPT, Germany Micro laser welding of polymer microstructures using low power laser diodes T. Ussing, L.V. Petersen, MEMSflow ApS, Denmark B. Helbo, L. Højslet, DTI, Denmark Multifunctional Packages by Assembly of SMD and Bare Dies on Moulded Interconnect Devices (MID) Ulrich Keßler, Wolfgang Eberhardt, Heinz Kück, HSG-IMAT, Germany Development of Highly Precise Bonding Procedures for Structured Polyimide Films on Silicon Substrates T.Goettsche, M.Stehr, H.Ashauer, P.Nommensen, HSG-IMIT, Germany	Session - 8 Metrology Chair: L Mattsson, KTH, Sweden Metrological characterisation of micro particles by direct simulation Monte Carlo M.D. Mikrenska, P.I. Koulev, Bulgarian Academy of Sciences, Bulgaria J.-B. Renard, CNRS, France Through-Transmissive-Media (TTM) Interferometric Techniques Applied to Characterizing Packaged MEMS and MOEMS Devices Sen Hana, Veeco Tucson Inc., USA Freek Pasop, Udo Volz, Veeco Instruments GmbH, Germany Surface characterisation in forming processes by functional 3D parameters S. Weidel, U. Engel, M. Geiger , University of Erlangen-Nuremberg, Germany Assessment of digital cameras for micro-structural sensing of low contrast surface features A. Temun, L. Mattsson, KTH, Sweden
Time	17:35 to 18:30
Posters Session 2 Tooling Technologies, Micro Fluidics, Assembly and Packaging, Sensors and Actuators Chair: B. Peat, Cardiff University, UK Short Presentations (2 slides and up to 2 min per presentation) Tooling Technologies Evaluation of dynamic parameters of micromilling tools smaller than 0.3 mm diameter L. Uriarte, M. Zatarain, G. Santiso, Tekniker, Spain L.N. Lopéz de Lacalle, J. Albizuri, ETSII, Spain Micromechanical structuring of polymers, metals and ceramics T. Gietzelt, L. Eichhorn, K. Schubert, FZK, Germany Manufacturing of Free-Form Surfaces using a Fast Tool Servo (FTS) and an online Trajectory Generator C. Brecher, M. Winterschladen, M. Merz, IPT, Germany Polymeric thin films patterning for direct fabrication of micro-photonic components P. Obreja, D. Cristea, E. Manea, M. Kusko, IMT, Romania Comparison of optimal machining parameters of sinking EDM and micro EDM processes O. Blatnik, J. Valentinčič, M. Junkar, University of Ljubljana, Slovenia Single crystalline Cubic Boron Nitride as cutting material for the Ultra precision Machining of steel U. Grimm, C. Müller, H. Reinecke, M. Wölfle, IMTEK, Germany A study of micro EDM electrode wear S. Bigot, A. Ivanov, K. Popov, Cardiff University, UK Some Cutting Technology Problems of Microcutting I. Mészáros, M. Takács, J. Nyir, Budapest University of Technology and Economics, Hungary Realisation of a New Concept for Optical-Mechanical Precision Parts Produced by Polymers Processing J. Wilde , D. Arnold , A. Schoth, W. Greger, H. Reinecke, I MTEK, Germany, ECF - An Innovative Technique for Micro Mould Fabrication L. Staemmler, K. Hofmann, H. Kück, HSG-IMAT, Germany Micro Fluidics Microfluidic Devices Made by Automated Metal Foil LOM M. Prechtl, BLZ gGmbH, Germany S. Seidel, A. Otto, University of Erlangen-Nuremberg, Germany A multi-material micropump for applications in microfluidics M. Richter, Y. Congar, M. Wackerle, IZM, Munich, Germany Fast packaging of polymeric cantilever chip by micro milling A. Johansson, G. Perozziello, O. Geschke, A. Boisen, DTU, Denamrk Rapid prototyping of all-COC/Topas fluidic microsystems F. Bundgaard, G. Perrozziello, O. Geschke, DTU, Denmark Mechanical sealing of microfluidic structures I. Tahhan, C. Blattert, R. Jurischka, A. Schoth, H. Reinecke, IMTEK, Germany Fabrication of a geometrically complex brain slice perfusion device via contact liquid photolithographic polymerization (CLiPP) K.T. Haraldssona,KTH, Sweden P.A. Passeraub,University of Applied Sciences, Switzerland, Assembly & Packaging Thermal Process Control for Laser Radiation Bonding of Silicon and Glass F. Sari, A. Gillner, R. Poprawe, Fraunhofer Institute for Laser Technology, Germany Mechanical evaluation and improvement of microgrippers F. Székely, T. Szalay, Budapest University of Technology and Economics, Hungary Three dimensional force fields for micropart manipulation P. Lazarou, N.A. Aspragathos, University of Patras, Greece Classification of assembly techniques for micro products G. Tosello, H.N. Hansen, A. Gegeckait*, M. Arentoft, L. Marin, DTU, Denmark Automation of microfactories: towards using small industrial robots T. Eriksson, H. N. Hansen, DTU, Denmark Fuzzy control in micropart manipulation using programmable force fields N. Aspragathos, K. Papaxrisanthou, University of Patras, Patras Greece Robot based assembly and processing micro/nano operations K. Gr. Kostadinov, R. L. Hradynarski, T. Tiankov, Bulgarian Academy of Sciences, Bulgaria F. Ionescub, University of Applied Sciences, Germany LTCC Packaging for Microsystems K. Persson, C. Rusu, B. Ottosson, Imego, Sweden Correct Modelling of the Material Properties in the Design and Simulation of Precision Micro-Parts J. Wilde, IMTEK, Germany Maskless and electroless Ni-Au bump deposition R.Brennera, F.Edling, Uppsala University, Sweden T. Gruszecki, P.Johander, IVF, Sweden Micro Sensors & Actuators A novel non-resonant technique for measuring the rheological properties of fluids using microfabricated thermal bimorph actuators R.J. Dunn, Heriot-Watt University, UK V. Djakov, S.E. Huq, Rutherford Appleton Laboratory, UK M.Y. Al Aioubi, University of Birmingham, UK Micro product development - how do we focus on the right issues? H. N. Hansen, A. De Grave, G. Bissacco, DTU, Denmark Spectrally encoded fiber optic measurement of diffusive target displacement Z.V. Djinovic, A. Vujanic, Vienna University of Technology, Austria M.C. Tomic, Institut Bezbednosti, Serbia and Montenegro Micropellistor for methane detection S. Sosin, C. Moldovan, R. Iosub, M. Zaharescu, IMT, Romania Magnetic field flux density study of MEMS component mini actuator G. Todorov, K. Kamberov, A. Ivanov, L. Dimitrov, Technical University of Sofia, Bulgaria Micro Power Generation with Micro Gas Turbines: a Challenge J. Peirs, T. Waumans, P. Vleugels, S. Stevens, R. D'hulst, T. Stevens, F. Verplaetsen, J. Driesen, R. Belmans, M. Baelmans, D. Reynaerts, K.U.Leuven, Belgium R. Van den Braembussche, von Karman Institute for Fluid Dynamics, Belgium Determination of critical volume fraction for composite sensors and actuators C.R.Bowen, A.C.Dent, R.Stevens, University of Bath, Bath, BA2 7AY, UK M.Cain, M.Stewart, NPL, UK Complex contour features in silicon by modified Deep Reactive Ion Etching (DRIE) processes for infrared collection applications and hot embossing applications S. Landi, C. P. Shaw, P. B. Kirby and R. W. Whatmore, Cranfield University, UK
Time	18:30h to 20:00h
Posters Session 2 (Continuation) Cocktail

Details about the oral and poster presentation papers can be found in the book of abstracts

Day 3, July 1, 2005

Day 1: Wednesday, June 29, 2005

Time	08:00h to 08:30h
Registration
Time	08:30h to 10:00h
Workshop 1 Metrology Issues in Micro-Engineering: Industrial Demands and Research Challenges Prof. Kiyoshi Takamasu, University of Tokyo	Workshop 2 Lab-on-Chip Microsystems Dr Stanislas Krawczyk, CNRS, France	Workshop 3 Polymer Technology Toward Nano, Future Technology for Europe Dr Martin Ganz, Battenfeld, Austria
Time	10:15h to 11:30h
Coffee Break
Time	10:00h to 10:15h
Workshop 1 (continuation)	Workshop 2 (continuation)	Workshop 3 (continuation)
Time	11:30h to 11:45h
Break
Time	11:45h to 13:00h
Workshop 1 (continuation)	Workshop 2 (continuation)	Workshop 3 (continuation)
Time	13:00h to 14:00h
Lunch
Time	13:00h to 14:00h
Non-Micro Systems Guided Tour