Post-Conference Half-day Workshops

1. “Metrology Issues in Micro-Engineering: Industrial Demands and Research Challenges”,
   Prof. Kiyoshi Takamasu, University of Tokyo
2. “Lab-on-Chip Microsystems”, Dr Stanislas Krawczyk, CNRS, France
3. Polymer Technology toward Nano, future technology for Europe? Martin Ganz, Battenfeld BTG Group Austria, Bertrand Fillon, CEA France

Registration fees: free for 4M NoE partners, 100 € for all other
participants.

The Workshops will provide a good overview of the current
state-of-the-art in the field and outline the main research challenges
and technology gaps that require attention.

Lab-on-Chip Workshop

1st July 2005

Dr. Stanislas Krawczyk

CNRS Research Director, LEOM-CNRS-Ecole Centrale de Lyon, France


We will try to discuss and to “design” together a future Lab-on-a-Chip Microsystem(s) for medical applications, in particular, in the field of cancer. These Labs-on-a-Chip should detect quantitatively some proteins considered as cancer markers and DNA mutations typical for some cancers. These devices will be designed for point-of-care applications (small medical centers, doctor’s cabinets…) rather than for big hospitals, which requires high throughput operation systems. Various technologies and association of various functional blocks will be considered. Some of discussed points will be the following :

1. Introduction to Lab-on-a-Chip Microsystems.
   
   • Birth of new concept,
   • Infancy (first applications),
   • Adolescence (trying everything),
   • Advantages and potential applications in the field of medicine,
   • High throughput and point of care application – two different approaches,
   • The field of Lab-on-a-Chip is larger than that of micro-electronics – you must choose your favorite(s) before getting married.
2. How to make Lab-on-a-Chip Microsystems ?
   
   • the simplest technologies,
   • why to make complicated, when we can make simple ?
   • overview of various structures,
   • critical issues to win (what ?)
   • nano – micro – bio, integrated optics and other stuffs in mode.
3. Advanced Lab-on-a-Chip structures.
   
   • useful and not-useful structures (at least in the 3rd millennium),
   • glass, silicon, polymers and their friends,
   • combining various materials as a challenging issue,
   • 3D structures,
   • collective fabrication on large surfaces,
   • millions of pieces by year or nothing.
4. Let’s design a diagnostic Lab-on-a-Chip even if we still don’t know
   
   • if it will work.
   • overview of various functional blocks,
   • relevant proteins, DNA or both from a “drop of blood” for healthy life,
   • Lab-on-a-Chip in the field of cancer,
   • critical issues,
   • looking for publications, for new effects or something which will (probably) work – to search or to find ?
   • speculating about the future (shall we stay in Europe, move to USA or to China ?).

A large participation of the audience, critical remarks and everything what you wish (including COLD eggs on my head) are permitted and encouraged. Nobody knows everything in this large and interdisciplinary field.

Metrology Workshop

1st July 2005

Prof. Kiyoshi Takamasu

Department of Precision Engineering, The University of Tokyo

1. Introduction
2. Tutorial: Traceability and traceable nanometrology
   
   • What is “Traceability”?
     
     • Definition of Traceability
     • Traceability of Length: definition of metre, iodine stabilized laser, gauge block
   • Uncertainty of measurement
     
     • Analysis procedure of uncertainty of measurement: examples
     • Uncertainty in comparison measurement
     • Uncertainty in length measurement
   • Traceable nanometrology
     
     • Gaps in nanometrology
     • NanoSurf: Precision surface roughness measurement with laser interferometer
     • Metrological AFM (Atomic Force Microscope)
     • Combined optical and X-ray Interferometer: COXI
     • Precision CMM (Coordinate Measuring Machine)
3. Standardization in nanometrology by CD (Critical Dimension) -AFM (Atomic Force Microscope)
   
   • Principle of AFM
     
     • Construction of AFM: force curve, piezo actuator, optical lever
     • Cantilever of AFM
   • CD-AFM
     
     • CD-AFM at standard laboratories: NMIJ/AIST, NIST, PTB, METS, NPL
       Standard artifact for nanometrology: pitch, level, two dimension grating, line width
     • Establishment of traceability in nanometrology by CD-AFM
   • Development of CD-AFM with laser interferometer (NMIJ: National Metrology Institute of Japan)
     
     • Construction of CD-AFM
     • Uncertainty estimation of pitch measurement for 240 nm and 50 nm pitch
     • Design for pitch standard under 100 nm
     • Level measurement for 20 nm, 70 nm and 300 nm levels
4. Development of Nano-CMM
   
   • Basic construction of CMM (Coordinate Measuring Machine)
     
     • Cartesian coordinates system and three scales
     • Probing system: touch probe, optical probe, scanning probe
     • Calibration of CMM: ball plate, step gauge
     • Virtual CMM: uncertainty estimation of CMM
   • Precision CMM and probing system for nanometrology
     
     • Precision CMM: IBS (TUE), small scale CMM (NPL), Ultra precision CMM (METAS)
     • Precision probe: NPL, TUE, PTB, METAS, Mitutoyo
   • Development of Nano-CMM (The University of Tokyo)
     
     • Concept and construction of Nano-CMM
     • Development of Nano-probe
5. Conclusions and future on nanometrology

Polymer Technology toward Nano, future technology for Europe?

Organisation and Chair: Martin Ganz, Battenfeld BTG Group Austria
Co Chair: Bertrand Fillon, CEA France

• Welcome, Introduction and short Interview of the audience - Martin Ganz, Bertrand Fillon
• Micro Injection Moulding and Compression Moulding - Martin Ganz
  1. Definition: what is micro moulding? (Type and specific dimension)
  2. Principle micro moulding technology (availability physical limits)
  3. Different micro moulding process (Variotherm, Injection compressing, 2K)
  4. Production environment requirement (mould,handling,Quality inspection)
  5. Micro parts
• New Trends in Replication by Hot Embossing - Matthias Heckele, FzK Germany
  
  1. Hot Embossing - stamping or molding?
  2. Hot Embossing – replication at the lab
  3. Towards industrial fabrication
  4. Applications
• Nanoimprint Lithography - Helmut Schift, PSI Switzerland
  
  1. Nanoreplication techniques
  2. Nanoimprint - molding of thin polymer layers
  3. Pattern transfer
  4. Applications
     
• Wrap up, Summary and results of the workshop - Martin Ganz, Bertrand Fillon