The second call for papers can be downloaded from here
Organized by: 4M Network of Excellence
Sponsored by the EC
Rooms have been reserved at the following hotels, the cost includes breakfast. The deadlines for booking rooms at the hotels are as follows:
Hotel Ritter: 1 June 2005
Hotel Berliner: 10 June 2005
Sportpark Jurgen: 13 June 2005
Hotel Eden: 17 June 2005
Zum Goldenen Anker: 17 June 2005
When reserving a room please say you are attending the '4M Conference' as some of the costs listed are at a reduced rate.
| hotel | telephone | fax | rooms | cost |
|---|---|---|---|---|
| Hotel Eden | 0049 (0)721 18180 | 0049 (0)721 1818 222 | 21 | €49 |
| Hotel Residenz | 0049 (0)721 37150 | 0049 (0)721 3715 113 | 60 | €82 |
| Hotel Berliner Hof | 0049 (0)721 18280 | 0049 (0)721 1828 100 | 20 | €69 |
| Sportpark Jürgen Fassbender | 0049 (0)721 707051 | 0049 (0)721 707055 | 9 | €54,50 |
| Hotel Ritter | 0049 (0)7257 880 | 0049 (0)7257 88 111 | 80 | €60 |
| Zum Goldenen Anker | 0049 (0)721 706029 | 0049 (0)721 7782333 | 20 | €46 |
Papers are invited on all aspects of manufacturing of metal, polymer and ceramic microstructures and their application in microsystems-based products, in particular but not limited to:
The above eight sub-topics represent the intended topics of the thematic sessions of the Conference to which the authors are invited to submit papers.
The development of processing systems for electronic and microsystem applications is driven by the constant need for higher performance at smaller sizes. Examples of these developments are components with thinner layers such as MLC:s or printed structure with higher resolution such as LTCC structures. There is also a trend towards use of nanosized powders as in SOFC technology and new ceramic materials such as lead-free piezoceramics. Common for these developments is the need to disperse ceramic powders at high solids contents while controlling the rheology of the suspension. The use of newer types of comb polymer dispersants has given ceramic processing a new tool that make s it possible to tailor the suspension properties to a greater extent than before. Combining these dispersants with new types of latex binders it has been possible to create new environmentally friendly tape casting systems that yields high quality tapes.
Screen printing on tape cast layer can be used in combination with lamination to build a whole range electronic of microsystem devices. Rheological characterization combined with wetting measurements has given us a new systematic way to study pastes for screen printing. Our studies have shown that the viscosity alone cannot be used to explain the behaviour of a screen printing paste. To better understand and develop prints with high resolution and reliable quality it is necessary to study the viscoelastic behaviour of the printing pastes.
Today, a wide range of manufacturing technology is available to produce optical micro and nanostructures, such as diffractive optics, refractive microlens arrays, photonic crystals, resonant grating filters, and nanoparticles. The technology is strongly driven by the needs of microelectronics. Very fine structures with less than 100 nm feature sizes can be realized. This is fine enough for applications in the visible and infrared region. However, this high-end equipment is not really made for optics. For the special needs of optics (accuracy, overlay, material, substrate thickness) the equipment has to be adapted. This makes the fabrication expensive. Therefore, research effort is also focused on flexible and low cost technology. Binary or multilevel elements with feature sizes of 500 nm are commercially available. Electron-beam writing is used for laboratory demonstrators with fine structures. For larger structures laser-beam writing is more suitable (less expensive). Analog structures are still highly challenging. Standard are microlenses, which have spherical or cylindrical surface. Also aspheric shapes are feasible. However, more general structures are difficult to be realized with optical quality.
We will present different examples (diffractive optics, photonic crystal waveguides and optical MEMS) for application wavelengths ranging from the nanometer to micrometer. Challenges and limitations due the miniaturization will be discussed.
Optical methods are increasingly used for measurement of surface texture, particularly for areal measurements where the optical methods are generally faster. A new Working Group under Technical Committee (TC) 213 in the International Organization for Standardization is addressing standardization issues for areal surface texture measurement and characterization and has formed a Project Team to address issues posed by the optical methods. In this paper, we review the different methods of measuring surface texture and we describe a classification scheme for them. We then highlight optical methods and describe some of their characteristics. We compare surface profiling results obtained with several optical methods with those obtained with the stylus method. For moderately rough surfaces (Ra ~ 500 nm) roughness measurements obtained with white light interferometric microscopy (IM), confocal microscopy, and the stylus method seem to provide close agreement on the same roughness samples. For surface roughness measurements in the 50 nm to 300 nm range of Ra, discrepancies between white-light interferometry and the stylus method are observed. In some cases the discrepancy is as large as 80 % of the value obtained with the stylus method. Reasons for this are suggested. By contrast, the results for phase shifting interferometry over its expected range of application (Ra about 150 nm) are essentially in good agreement with those of the stylus technique.
Microfluidic devices are mainly used within the life sciences or chemical analysis. Polymers are ideally suited for these applications due to their physical and chemical properties. The development of micofluidic devices and applications in this device has to be done with respect to the surface properties like roughness or surface energy of the fluidic channels. Especially rapid prototyping methods are leading to surfaces at the devices with uncommon and different behaviour in comparison to the products from the series production processes. In this report, we describe rapid low cost hot embossing technologies with respect to complete process chains to fabricate microstructured prototypes with an excellent and representative surface quality with high aspect ratio. As tools we are using soft tools like PDMS as well as hard tools made of metals or alloys. These methods enables cost effective structuring of technical polymers like polycarbonate or cycloolefin copolymer. The main advantage of these approaches are the availability of the geometry and the specific target material right from the start of the evaluation process of microfluidic devices. The processes described are able to rapid prototyping for the development and evaluation of different microfluidic devices. So the processes can be used for short time to market approaches of micro structured parts.
First, the status of the current research related to a potential application of Lab-on-a-Chip Microsystems in the field of cancer is reviewed and discussed. Then, we will briefly describe research works carried out in my research group and in collaborating laboratories. Our objective is to develop Lab-on-a-Chip analyzers, simple and autonomous, for cancer diagnostics and for monitoring of cancer therapy. The complete system will make use of disposable chip sensors of the size of a credit card and a control unit of the size of a book. The principle of sensors is based on the determination of the concentration of “cancer markers”, which are proteins and DNA fragments present in physiological fluids (blood, saliva…). Our approach is based on the separation of bio-molecules present in the solution by electro-chromatography, carried out in multiple microfluidic channels; this separation shall be coupled with nucleic acid hybridization reactions (DNA) or immunological reactions (proteins) in liquid phase or using appropriate ligands bound to the nano-structured separation matrix. The bio-molecules of interest are finally detected thanks to optical wave-guides integrated in the chip..
Miniaturization of parts and components plays an important role in today’s economy, enabling the design and production of new and highly sophisticated technology in various industrial fields such as medical, bio-chemistry, automotive and telecommunication. Nowadays, production technology faces the challenge to manufacture small components within tight tolerances yet economical in large lots. In order to successfully harness this task, separating processes have been fitted to suit the needs for micro mold manufacturing and were combined with a subsequent injection molding process to satisfy the need for large scale production with a vast variety of possible materials. Hereafter, the scope lies on the production technology for micro mold namely micro milling, micro EDM and micro laser ablation. Characteristics of each process are introduced and compared to each other concerning surface properties, achievable tolerances, potential for miniaturization, machinable scope of materials and manufacturing productivity.
This presentation reviews the various measurement methods that may be used to characterise piezoelectric thin and thick films for applications such as macro-scale and micro-scale actuators. Current methods include; polarisation loop analysis, interferometry, modified Berlincourt methods, Laser Intensity Modulation Method, residual stress based on wafer curvature, modulus via laser flash and indentation methods and nano-scale probes based on modified atomic force microscopy. The material structure is typically characterised using various imaging techniques such as Scanning Electron Microscopy, Transmission Electron Microscopy and optical microscopy. The functional and dielectric properties are often closely linked to the geometry and boundary effects imposed by the material systems. Examples here include the film/substrate interaction where the constraining substrate influences the electroactive response of the piezo thin film. This has the effect of reducing useful actuation. In cases such as these, it is necessary to develop new measurement methods and/or to carefully model the system to understand these interactions. The methods outlined in this talk will include some of the methods that are covered by International standards (typically suitable only for bulk materials), and the vast majority that are devoid of any standards but that require evaluation and validation on an international basis.
Nowadays several qualified technologies have been established for the manufacturing of precision parts and microstructured surfaces in the field of MEMS, e.g. lithography, etching, LIGA, laser beam, ion beam or electron beam machining. However, mechanical processes, e.g. diamond machining, engraving, forming and molding, play also a significant role for the generation of microstructured surfaces and the manufacture of microparts. In this keynote speech the state of the art of mechanical manufacturing methods for microparts and microstructures will be introduced and discussed. Particularly the potential of machining processes like turning, milling and drilling using monocrystallyne diamond tools, deterministic microgrinding and polishing processes for structured surfaces will be concluded. Applications of these methods for optical and mechanical parts will be illustrated . The presentation will also focus on the selection of materials, machining parameters, tool design and measuring techniques.
With the development of micro- and nanotechnological products such as sensors, MEMS/NEMS and their broad application in a variety of market segments new reliability issues will arise. The increasing interface to volume ratio in highly integrated systems and nanoparticle (or nanotube) filled materials and unsolved questions of size effects of nanomaterials are major challenges for experimental reliability evaluation.
The terms “microreliability” and “nanoreliability” characterize this new field within the micro-nano transition region. Advanced simulation tools, new test and characterization methods have to be combined with reliability and life-time estimation concepts taking into account local field measuring techniques and materials testing procedures on different levels.
The author will also present practical applications from the field of automotive sensors and MEMS applications and will show how combined simulation, testing, and crack, fatigue and creep failure avoidance strategies will lead to new solutions to improve reliability as life-time estimation in the micro-nano interface region.
Thematic Session presentations will take place in the Auditory
(Session 1, 3, 5 & 7), Room 157 (Session 2 & 4) and Mittlerer
Horsaal (Session 6 & 8) at FZK. Each participant will be allowed 15
minutes per presentation and at the end of the each session will be 15
minutes question time. Session chairs will make sure the schedule is
respected
In order to avoid technical and connection problems and the
corresponding loss of time, a laptop will be provided by the
organisers. Presentations must be saved on memory stick or CD in
PowerPoint format exclusively (version 2002 or earlier but no earlier
than 97) and pass on it to the technician during the registration on
29th June 2005. Please note that the papers must be presented by one of
the authors and presentation can not be amended after above date.
If you need any special facilities for your oral presentation, please consult the organiser.
The language of the conference will be English and no translation
facilities will be provided. Only one oral and/or one poster
presentation will be accepted from each participant.
4M2005 reserves the right to cancel a presenter’s poster session if the above requirements are not met.
Please see the detailed conference programme for session times and room numbers.
Poster information
Poster Presentation time per person is 2 minutes and two 2 slides as
transparencies. (not in electronic form) to be shown using projector.
Presenters must be available to discuss their displays during their
assigned session. Half of the authors will be scheduled for the
Wednesday evening’s session and half for the Thursday evening’s
session. Authors may bring extra copies for handouts of the poster
paper for interested participants. Please note that the poster must be
displayed during the proceeding coffee break and must be removed at the
end of the session. Please see the detailed conference programme for
session times and room numbers.
Poster material
The Poster Board/Panels for each presentation will be available in
the Canteen, building 211, with approximate dimensions 100 cm wide and
160 cm high. Each poster board/panel is marked with a number on the
upper left corner. Poster should be in A0 format (app. 84 cm x 120 cm).
The presenter must provide pushpins to attach materials to the display
board, along with any other supplies.
All posters must be in English with the paper title (2.5cm), author
names and affiliations (1.5 cm) and the text easily readable. Poster
should include Introduction, development and conclusion with a contact
point.
Illustration layout
Drawings, diagrams and photos are extremely helpful and often
necessary to display results and conclusions. Please do not overload
any chart or drawing with information.
The Organising Committee reserves the right to cancel a presenter’s poster session if the above requirements are not met.
Abstracts and papers must follow the provided templates in order to be included in the Book of Abstracts and the Conference Proceedings.
In case you experience problems downloading the files, you can download them from here
The accepted papers may be selected for oral or poster presentation. All oral and poster presentations will be included in the Conference Proceedings.
Questions may be sent by e-mail to: 4m_conference@*NOSPAM*4m-net.org
All final papers accepted for presentation will be included in 4M Conference 2005 Proceedings to be published by Elsevier . Selected papers will be considered for publication in the Proceedings of the Institution of Mechanical Engineers (IMechE), Part B, Journal of Engineering Manufacture and a special issue of the Proceedings of the IMechE, Part C, Journal of Mechanical Engineering Science.
Prof. Wolfgang Menz, Germany (Conference Chair)
Dr. Stefan Dimov, Cardiff University, UK (Conference Co-Chair)
Dr. Holger Moritz, Forschungszentrum Karlsruhe, Germany
Dr. Andreas Schoth, IMTEK, University of Freiburg, Germany
Prof. Lars Mattsson, Royal Institute of Technology, Stockholm, Sweden
Mr. Erik Jung, The Fraunhofer Institute for Reliability and Microintegration, Berlin, Germany
Prof. Ulf Engel, University of Erlangen-Nuremberg, Germany
Dr. Per Johander, IVF Industrial Research and Development Corporation, Sweden
Mr. Sven Carsten Lange, Fraunhofer Institute of Production Technology, Aachen, Germany
Dr. Martin Richter, The Fraunhofer Institute for Reliability and Microintegration, Munich, Germany
Dr Paul Kirby, University of Cranfield, UK
Jeanette Whyte
Manufacturing Engineering Centre, Cardiff University
Tel: +44-(0)29-20874641
Fax: +44-(0)29-20874880
E-mail: whytejc@NOSPAMcf.ac.uk
| Time | ||
|---|---|---|
| 08:00h to 09:00h | Registration | |
| 09:00h to 9:15h | Opening | |
| 9:15h to 11:00h | Invited Talks
|
|
| 11:00h to 11:30h | Coffee Break | |
| 11:30h to 12:45h | Session 1 Polymers 4 Talks |
Session 2 Ceramics 4 Talks |
| 12:45h to 13:45h | Lunch | |
| 13:45h to 15:00h | Session 3 Metals 4 Talks |
Session 4 Sensors & Actuators 4 Talks |
| 15:00h to 15:30h | Coffee Break | |
| 15:30h to 15:45h | Micro and Nano Manufacturing in FP7 and Manufuture Programmes H .Pedersen, European Commission |
|
| 15:45h to 17:00h | Panel Discussion Multi-Material Micro Manufacture: Industrial Demands (4M Industrial Board) |
|
| 17:05h to 18:00h |
Posters Session 1 |
|
| 18:00h to 19:00h | Posters Session 1 (continuation) Polymers, Ceramics, Metals, Metrology |
|
| 19:00h to 21:00h | Banquet | |
| Time | ||
|---|---|---|
| 08:30h to 10:15h | Invited Talks
|
|
| 10:15h to 10:45h | Coffee Break | |
| 10:45h to 11:45h | Panel Discussion Multi-Material Micro Manufacture: Research Challenges (4M Scientific Board) |
|
| 11:45h to 13:00h | Session 5 Tooling Technologies 4 Talks |
Session 6 Micro Fluidics 4 Talks |
| 13:00h to 14:00h | Lunch | |
| 14:00h to 15:45h | Invited Talks
|
|
| 15:45h to 16:15h | Coffee Break | |
| 16:15h to 17:30h | Session 7 Assembly and Packaging 4 Talks |
Session 8 Metrology 4 Talks |
| 17:35h to 18:30h | Posters Session 2 Short Presentations Tooling Technologies, Micro Fluidics, Assembly and Packaging, Sensors and Actuators |
|
| 18:30h to 20:00h | Posters Session 2 (continuation) Tooling Technologies, Micro Fluidics, Assembly and Packaging, Sensors and Actuators |
|
| Cocktail | ||
| Time | |||
|---|---|---|---|
| 08:00h to 08:30h | Registration | ||
| 08:30h to 10:00h | Workshop 1 | Workshop 2 | Workshop 3 |
| 10:00h to 10:15h | Coffee Break | ||
| 10:15h to 11:30h | Workshop 1 | Workshop 2 | Workshop 3 |
| 11:30h to 11:45h | Break | ||
| 11:45h to 13:00h | Workshop 1 | Workshop 2 | Workshop 3 |
| 13:00h to 14:00h | Lunch | ||
| 13:00h to 14:00h | Non-Micro Systems Guided Tour | ||
| Time | 08:00h to 09:00h |
|---|---|
| Registration | |
| Time | 09:00h to 09:15 |
| Opening | |
| Time | 9:15h to 11:00h |
Invited Talks Manufacturing of Micro Moulds by Conventional and Energy Assisted Processes Hot Embossing for the Rapid Prototyping of Microstructured Polymer Ceramic Processing for Microsystems Applications | |
| Time | 11:00h to 11:30h |
| Coffee Break | |
| Time | 11:30h to 12:45h |
| Session 1 - Polymers Chair: A. Schoth, IMTEK, Germany Double hot-embossing with polymeric intermediate mould Micro Assembly Injection Moulding Potential Application in Medical Science Surface Microstructure Replication in Injection Moulding Polymer technology for disposable microfluidics |
Session 2 Ceramics Chair: P. Johander, IVF, Sweden Rapid prototyping of microstructured ceramic and metal parts using reaction molding techniques Mixed technologies for gas sensors microfabrication Patterned multilayer thick film electroceramic structures for micro electromechanical systems Micro-machining of Metals, Ceramics and Polymers using Nanosecond Lasers |
| Time | 12:45h to 13:45h |
| Lunch | |
| Time | 13:45h to 15:00h |
| Session 3 Metals
Chair: U. Engel, University of Erlangen-Nuremberg, Germany Processing and properties of bi-material parts by micro metal injection moulding Microforming at elevated temperature – forming and material behaviour Micro-extrusion of ultra-fine grain aluminium A friction model for microforming |
Session 4 Sensors & Actuators Chair: P Kirby, University of Cranfield, UK Design study of a capacitive pressure sensor in non-silicon materials Optical Biosensor Based on Integrated Interferometer Using Polymeric Waveguides Stress control in bimaterial sensors and actuators Comparison of hydraulic microactuator configurations |
| Time | 15:00h to 15:30h |
| Coffee Break | |
| Time | 15:30h to 15:45h |
| Micro and Nano Manufacturing in FP7 and Manufuture Programmes H .Pedersen, European Commission |
|
| Time | 15:45h to 17:00h |
Panel Discussion Moderator: W. Menz, Germany
Participants: |
|
| Time | 17:05h to 18:00h |
Posters Session 1
Polymers
Microstructure simulations of over-moulded metal micro-sized needles
Multiphoton assisted micro- and nanoprocessing of materials
Study of the rheological properties of poly(methylmethacrylate)
(PMMA) and cycloolefin-copolymer (COC) to optimize the hot-embossing
process
Thermo-mechanical properties of thermoplastic polymer-nanofiller composites
A new approach in polymer waveguide fabrication
Manufacturing of high quality micro prototypes by injection moulding using hybrid mould technology
Study of Factors Affecting Aspect Ratios Achievable in Micro-injection Moulding
Fabrication Chain for Prototyping of Microfluidic Chips in Polymers
Characterization of polymers for improved shrinkage prediction in micromolding.
High aspect ratio micron-sized vias in "flex" and polymer foils; using ion irradiation
Ceramics
The ceramics substrates microprocessing by high precision laser
technologies for microsystems,microsensors and actuators applications.
Low-Pressure Injection Molding of Ceramic Micro Devices Using Sub-Micron and Nano Scaled Powders
High-resistive micro components produced by high-pressure powder injection moulding
Capability study of the Fcubic direct shell process for casting micro-components
Direct manufacture of ceramic micro components with layered manufacturing methods
Metals
Development of a powder blend device suitable for powder die filling
Nano-porous structures prepared by electrochemical anodisation of Aluminium
An advanced approach in simulation of microforming processes
Flexible tool system for cold forging of micro-components
Spring-back behaviour of thin metal foils in free bending processes
A simulation model for crater formation in laser milling
Discussion on Thin WEDM Error Analysis and Characterisation
Simulating electroplated micro surfaces in 3-D
Multilayered and nanolayered hard nitride thin films for a better yield in micro machining.
Laser striation of groove patterns on metallic surfaces
Micro-stamping of Molybdenum Rhenium Components
Flexible Tool System for Creation of Surface Micro-Geometries
Metrology
Micro metrology tools for local investigation of mechanical phenomena in solids and liquids
Metrology Applications of Two-Dimensional Frequency Analysis for Micro-Features Characterisation |
|
| Time | 18:00h to 19:00h |
| Posters Session 1 (continuation) Polymers, Ceramics, Metals, Metrology |
|
| Time | 19:00h to 21:00h |
| Banquet | |
Details about the oral and poster presentation papers can be found in the book of abstracts
| Time | 8:30h to 10:15h |
|---|---|
Invited Talks Reliability Research on the way from Micro to Nano Challenges in micro-optics Lab-on-Chip Microsystems for cancer diagnostics and for monitoring of cancer therapy | |
| Time | 10:15h to 10:35h |
| Coffee Break | |
| Time | 10:35h to 11:30h |
|
Panel Discussion (4M Scientific Advisory Board) Moderators: W. Menz, Germany & S. Dimov, Cardiff University, UK Participants: | |
| Time | 11:35h to 12:45h |
| Session 5 - Tooling Technologies Chair: C Wenzel S Lange, IPT, Germany Adaptable Five-Axis Polishing Machine Head Miniaturization of the injection abrasive water jet machining process A Comparison between Microfabrication Technologies for Metal Tooling New methods for tool failure detection in micro-milling |
Session - 6 Micro-Fluidics Chair: P. Johander, IVF, Sweden Intelligent intraoral drug delivery microsystem An extended toolbox for fully integrated sample processing and detection on a high-frequency centrifugal microfluidic platform Control of fluidic in a plastic disposable chip used of POC-diagnostics Microfluidic Devices with Micronozzles Fabricated by Injection Moulding |
| Time | 12:45h to 14:00h |
| Lunch | |
| Time | 14:00h to 15:45h |
|
Invited Talks Metal Cutting of Microstructures Comparison of Optical and Stylus Methods for Measurement of Surface Texture Measurement issues related to the characterisation of piezo-actuators | |
| Time | 15:45h to 16:15h |
| Coffee Break | |
| Time | 16:15 to 17:30 |
| Session - 7 Assembly and Packaging Chair: E. Jung, IZM, Berlin, Germany Innovative handling techniques of thin flexible micro parts Micro laser welding of polymer microstructures using low power laser diodes Multifunctional Packages by Assembly of SMD and Bare Dies on Moulded Interconnect Devices (MID) Development of Highly Precise Bonding Procedures for Structured Polyimide Films on Silicon Substrates |
Session - 8 Metrology Chair: L Mattsson, KTH, Sweden Metrological characterisation of micro particles by direct simulation Monte Carlo Through-Transmissive-Media (TTM) Interferometric Techniques Applied to Characterizing Packaged MEMS and MOEMS Devices Surface characterisation in forming processes by functional 3D parameters Assessment of digital cameras for micro-structural sensing of low contrast surface features |
| Time | 17:35 to 18:30 |
|
Posters Session 2
Tooling Technologies, Micro Fluidics, Assembly and Packaging, Sensors and Actuators
Tooling Technologies
Evaluation of dynamic parameters of micromilling tools smaller than 0.3 mm diameter
Micromechanical structuring of polymers, metals and ceramics
Manufacturing of Free-Form Surfaces using a Fast Tool Servo (FTS) and an online Trajectory Generator
Polymeric thin films patterning for direct fabrication of micro-photonic components
Comparison of optimal machining parameters of sinking EDM and micro EDM processes
Single crystalline Cubic Boron Nitride as cutting material for the Ultra precision Machining of steel
A study of micro EDM electrode wear
Some Cutting Technology Problems of Microcutting
Realisation of a New Concept for Optical-Mechanical Precision Parts Produced by Polymers Processing
ECF - An Innovative Technique for Micro Mould Fabrication
Micro Fluidics
Microfluidic Devices Made by Automated Metal Foil LOM
A multi-material micropump for applications in microfluidics
Fast packaging of polymeric cantilever chip by micro milling
Rapid prototyping of all-COC/Topas fluidic microsystems
Mechanical sealing of microfluidic structures Fabrication of a geometrically complex brain slice perfusion device via contact liquid photolithographic polymerization (CLiPP)
Assembly & Packaging
Thermal Process Control for Laser Radiation Bonding of Silicon and Glass
Mechanical evaluation and improvement of microgrippers
Three dimensional force fields for micropart manipulation
Classification of assembly techniques for micro products
Automation of microfactories: towards using small industrial robots
Fuzzy control in micropart manipulation using programmable force fields
Robot based assembly and processing micro/nano operations
LTCC Packaging for Microsystems
Correct Modelling of the Material Properties in the Design and Simulation of Precision Micro-Parts
Maskless and electroless Ni-Au bump deposition
Micro Sensors & Actuators
A novel non-resonant technique for measuring the rheological
properties of fluids using microfabricated thermal bimorph actuators
Micro product development - how do we focus on the right issues?
Spectrally encoded fiber optic measurement of diffusive target displacement
Micropellistor for methane detection
Magnetic field flux density study of MEMS component mini actuator
Micro Power Generation with Micro Gas Turbines: a Challenge
Determination of critical volume fraction for composite sensors and actuators
Complex contour features in silicon by modified Deep Reactive
Ion Etching (DRIE) processes for infrared collection applications and
hot embossing applications | |
| Time | 18:30h to 20:00h |
| Posters Session 2 (Continuation) Cocktail | |
Details about the oral and poster presentation papers can be found in the book of abstracts
| Time | 08:00h to 08:30h | |
|---|---|---|
| Registration | ||
| Time | 08:30h to 10:00h | |
| Workshop 1 Metrology Issues in Micro-Engineering: Industrial Demands and Research Challenges Prof. Kiyoshi Takamasu, University of Tokyo |
Workshop 2 Lab-on-Chip Microsystems Dr Stanislas Krawczyk, CNRS, France |
Workshop 3 Polymer Technology Toward Nano, Future Technology for Europe Dr Martin Ganz, Battenfeld, Austria |
| Time | 10:15h to 11:30h | |
| Coffee Break | ||
| Time | 10:00h to 10:15h | |
| Workshop 1 (continuation) |
Workshop 2 (continuation) |
Workshop 3 (continuation) |
| Time | 11:30h to 11:45h | |
| Break | ||
| Time | 11:45h to 13:00h | |
| Workshop 1 (continuation) |
Workshop 2 (continuation) |
Workshop 3 (continuation) |
| Time | 13:00h to 14:00h | |
| Lunch | ||
| Time | 13:00h to 14:00h | |
| Non-Micro Systems Guided Tour | ||
Registration fees include: admission to the Plenary and Thematic Sessions, lunches, the banquet, the cocktail, transport from hotels to the conference site and the conference proceedings. Accompanying guest fee includes the banquet and the cocktail on 29th and 30th June.
| Paid before June, 12 2005 |
Paid after June, 12 2005 |
|
|---|---|---|
| 4M NoE Partners and Delegates from NMS & ACC | 150 € | 200 € |
| Non-partners in 4M NoE | 300 € | 350 € |
| Post-Conference Workshop (free for 4M NoE Partners) | 100 € | 125 € |
| Accompanying guest | 50 € | 70 € |
To register please download and fill the conference registration form. The submission instructions are outlined in the form.
Visit here to download presentations from our first conference - 4M2005
Registration fees: free for 4M NoE partners, 100 € for all other
participants.
The Workshops will provide a good overview of the current
state-of-the-art in the field and outline the main research challenges
and technology gaps that require attention.
1st July 2005
Dr. Stanislas Krawczyk
CNRS Research Director, LEOM-CNRS-Ecole Centrale de Lyon, France
We will try to discuss and to “design” together a future Lab-on-a-Chip Microsystem(s) for medical applications, in particular, in the field of cancer. These Labs-on-a-Chip should detect quantitatively some proteins considered as cancer markers and DNA mutations typical for some cancers. These devices will be designed for point-of-care applications (small medical centers, doctor’s cabinets…) rather than for big hospitals, which requires high throughput operation systems. Various technologies and association of various functional blocks will be considered. Some of discussed points will be the following :
A large participation of the audience, critical remarks and everything what you wish (including COLD eggs on my head) are permitted and encouraged. Nobody knows everything in this large and interdisciplinary field.
1st July 2005
Prof. Kiyoshi Takamasu
Department of Precision Engineering, The University of Tokyo
Organisation and Chair: Martin Ganz, Battenfeld BTG Group Austria
Co Chair: Bertrand Fillon, CEA France
Suggestions for visitor tours in and around Karlsruhe