Session 1
Process Characterisation (Auditorium)
Chair: A. Schoth, IMTEK, Germany
11:15h Hot embossing of high aspect ratio sub-µm structured surfaces for micro fluidic applications
M. Heckele, M. Worgull, Forschungszentrum Karlsruhe, Germany
T. Mappes, University of Karlsruhe, Germany
G. Tosello, H. N. Hansen, Technical University of Denmark, Denmark
T. Metz, P. Koltayd, University of Freiburg, Germany
J. Gavillet,French Atomic Energy Commission (CEA), France
11:30h Micro injection moulding: an experimental study on the relationship between the filling of micro parts and runner designs
C. Griffiths, S. Dimov, E.Brousseau, Cardiff University, UK
11:45h A study of factors affecting the performance of micro square endmills in milling of hardened tool steels
P. Li, H.H. Langen, R.H. Munnig Schmidt, Delft University of Technology, The Netherlands
P. Aristimuno, P. Arrazola, Mondragon University, Spain
A.M. Hoogstrate, J.A.J. Oosterling, TNO Science and Industry, The Netherlands
12:00h Manufacturing and verification of tools for ECF
K. Hofmann,Institute of Micro- and Precision Engineering (IZFM), Germany
L. Staemmler, Greiner Bio-One GmbH, Germany
H. Kücka, Hahn-Schickard-Institute for Micro Assembly Technology, Germany |
Session 2
Components (Room 0.31)
Chair: E. Jung, FZK, Germany
11.15 Manufacturing of Versatile Ceramic or Metal Micro Components by Powder Injection Moulding
V. Piotter, K. Plewa, J. Prokop, A. Ruh, H.-J. Ritzhaupt-Kleissl, J. Hausselt
Forschungszentrum Karlsruhe, Germany
11.30 Large-area metal-coated dielectric nanopillar array for excitation of surface plasmon resonance
X. Chen, K. Jiang, University of Birmingham, UK
11:45h Concept for packaging of a silicon based biochip
T. Velten, M. Biehl, T. Knoll, W. Haberer
Fraunhofer Institute for Biomedical Engineering, Germany
12:00h Flexible microfluidics based on commercial SU8 foils
C. Khan Malek, L. Robert, Institute FEMTO-ST/Dpt. FRANCE
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"FP7 Infrastructures' Discussion(Auditorium)
Chair: W. Menz, Germany and S. Dimov, MEC, UK
4M Industrial Board
C. Hanisch, Festo, Germany
D. Ulieru, Romes - SA, Romania
F. Bartels, Bartels Microtechnologies, Germany
M. Ganz, Martin Ganz, Austria
R. Wimberger-Friedl, Phillips Research Laboratories, The Netherlands
U. Ljungblad, ARCAM, Sweden |
Session 3
Systems (Auditorium)
Chair: M. Richter, IZM, Germany
16:00h An integrated all-optical microfluidic cell sorter
S. Valkai, H. I. Kirei, L. Oroszi, P. Ormos, Hungarian Academy of Sciences, Hungary
16:15h Feasibility of polymers for wafer scale capping of RF MEMS
P. Bolt, J. Bullema, R. Korbee, R. Kusters, TNO Science and Industry, The Netherlands
16:30h Active microvalves for micro-fluidic networks in plastics – selecting suitable actuation schemes
A.Boustheen, F. Homburg, Eindhoven University of Technology, The Netherlands
J. Bullema, TNO Science and Industry, The Netherlands
A. Dietzela, Holst Center, The Netherlands
16:45h Low-power humidity sensor for RFID applications
L. Löfgren, B. Löfving, T. Pettersson, B. Ottosson, C. Rusu, S. Haasl, K. Persson, The Imego Institute, Sweden
O. Vermesan, SINTEF ICT, Norway
N. Pesonen, VTT, Finland
P. Enoksson, Chalmers University of Technology, Sweden
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Session 2
Metrology (Room 0.31)
Chair: L. Mattsson, KTH, Sweden
16:00h Measurement of frequency response of the bone ossicles in the sheep middle ear by the fiber-optic microphone
Z.V. Djinovic, Vienna University of Technology and Integrated Microsystems Austria, Austria
L. Manojlovic, D. Vujanic, Integrated Microsystems Austria, Austria
R. Pavelka, Schwerpunktkrankenhaus, Austria
M.C. Tomic, Institut Bezbednosti, Serbia
16:15h How reliable are surface roughness measurements of micro-features? - Experiences of a Round Robin test within nine 4M laboratories
L. Mattsson, A. Temuna, KTH – the Royal Institute of Technology, Sweden
P. J. Bolt , E. Gelink, TNO Science and Industry, The Netherlands
S. Azcarate, A. Retolaza, Tekniker Technological Center. Spain
E. Brousseau, C. Griffiths, Cardiff University, UK
B. Fillon, P. Tiquet, French Atomic Energy Commission (CEA), France
C. Fowler, A. Schneider, Rutherford Appleton Laboratory (RAL), UK
C. Khan Malek, FEMTO-ST Institute, France
S. Marson, Cranfield University, UK
A. Schoth, University of Freiburg, Germany
G. Tosello, Technical University of Denmark, Denmark
16:30h Micro-Ultrasonic Metrology of Multi-Material Electronic Devices
R. Teti, P. De Santo, University of Naples Federico II, Italy
16:45h Approaching a sub-micron capability index using a Werth Fibre Probe System WFP
R. Thelena, J. Schulza, P. Meyera, V. Sailea, Research Centre Karlsruhe, Germany
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