Programme

Monday, 8-Sept-08 (Q2M Workshop)

Day 1: Tuesday, 9-Sept-08

Day 2: Wednesday, 10-Sept-08

Day 3: Thursday, 11-Sept-08

Please note that the Posters will be displayed from Tuesday 9th to Thursday 11th September 2008. In addition a poster session have been organised

Day 1: Tuesday, 9-Sept-08

08:00h - 09:00h
Registration
09:00h to 09:30h
Opening (Auditorium) Rhodri Morgan, First Minister for Wales David Grant, Vice-Chancellor Stefan Dimov, 4M2008 Conference Chair
09:30h to 10:45h
Keynote Speakers (Auditorium) Chair: S. Dimov, MEC, UK 09.30h Traceable measurement of areal surface texture Prof Richard Leach, NPL, UK 10:00h Mircofabrication using a Single Mode Yb Fiber Laser Dr Bill O'Neill, University of Cambridge, UK
10:45h to 11:15h
Coffee Break/Poster Session
11:15h to 12:30h
Session 1 Process Characterisation (Auditorium) Chair: A. Schoth, IMTEK, Germany 11:15h Hot embossing of high aspect ratio sub-µm structured surfaces for micro fluidic applications M. Heckele, M. Worgull, Forschungszentrum Karlsruhe, Germany T. Mappes, University of Karlsruhe, Germany G. Tosello, H. N. Hansen, Technical University of Denmark, Denmark T. Metz, P. Koltayd, University of Freiburg, Germany J. Gavillet,French Atomic Energy Commission (CEA), France 11:30h Micro injection moulding: an experimental study on the relationship between the filling of micro parts and runner designs C. Griffiths, S. Dimov, E.Brousseau, Cardiff University, UK 11:45h A study of factors affecting the performance of micro square endmills in milling of hardened tool steels P. Li, H.H. Langen, R.H. Munnig Schmidt, Delft University of Technology, The Netherlands P. Aristimuno, P. Arrazola, Mondragon University, Spain A.M. Hoogstrate, J.A.J. Oosterling, TNO Science and Industry, The Netherlands 12:00h Manufacturing and verification of tools for ECF K. Hofmann,Institute of Micro- and Precision Engineering (IZFM), Germany L. Staemmler, Greiner Bio-One GmbH, Germany H. Kücka, Hahn-Schickard-Institute for Micro Assembly Technology, Germany	Session 2 Components (Room X/0.04) Chair: E. Jung, FZK, Germany 11.15 Manufacturing of Versatile Ceramic or Metal Micro Components by Powder Injection Moulding V. Piotter, K. Plewa, J. Prokop, A. Ruh, H.-J. Ritzhaupt-Kleissl, J. Hausselt Forschungszentrum Karlsruhe, Germany 11.30 Large-area metal-coated dielectric nanopillar array for excitation of surface plasmon resonance X. Chen, K. Jiang, University of Birmingham, UK 11:45h Concept for packaging of a silicon based biochip T. Velten, M. Biehl, T. Knoll, W. Haberer Fraunhofer Institute for Biomedical Engineering, Germany 12:00h Flexible microfluidics based on commercial SU8 foils C. Khan Malek, L. Robert, Institute FEMTO-ST/Dpt. FRANCE
12:30h to 14:00h
Lunch
14:00h to 15:30h
"FP7 Infrastructures' Discussion(Auditorium) Chair: W. Menz, Germany and S. Dimov, MEC, UK 4M Industrial Board C. Hanisch, Festo, Germany D. Ulieru, Romes - SA, Romania F. Bartels, Bartels Microtechnologies, Germany M. Ganz, Martin Ganz, Austria R. Wimberger-Friedl, Phillips Research Laboratories, The Netherlands U. Ljungblad, ARCAM, Sweden
15:30h to 16:00h
Coffee Break/Poster Session
16:00h to 17:30h
Session 3 Systems (Auditorium) Chair: M. Richter, IZM, Germany 16:00h An integrated all-optical microfluidic cell sorter S. Valkai, H. I. Kirei, L. Oroszi, P. Ormos, Hungarian Academy of Sciences, Hungary 16:15h Feasibility of polymers for wafer scale capping of RF MEMS P. Bolt, J. Bullema, R. Korbee, R. Kusters, TNO Science and Industry, The Netherlands 16:30h Active microvalves for micro-fluidic networks in plastics – selecting suitable actuation schemes A.Boustheen, F. Homburg, Eindhoven University of Technology, The Netherlands J. Bullema, TNO Science and Industry, The Netherlands A. Dietzela, Holst Center, The Netherlands 16:45h Low-power humidity sensor for RFID applications L. Löfgren, B. Löfving, T. Pettersson, B. Ottosson, C. Rusu, S. Haasl, K. Persson, The Imego Institute, Sweden O. Vermesan, SINTEF ICT, Norway N. Pesonen, VTT, Finland P. Enoksson, Chalmers University of Technology, Sweden	Session 2 Metrology (Room X/0.04) Chair: L. Mattsson, KTH, Sweden 16:00h Measurement of frequency response of the bone ossicles in the sheep middle ear by the fiber-optic microphone Z.V. Djinovic, Vienna University of Technology and Integrated Microsystems Austria, Austria L. Manojlovic, D. Vujanic, Integrated Microsystems Austria, Austria R. Pavelka, Schwerpunktkrankenhaus, Austria M.C. Tomic, Institut Bezbednosti, Serbia 16:15h How reliable are surface roughness measurements of micro-features? - Experiences of a Round Robin test within nine 4M laboratories L. Mattsson, A. Temuna, KTH – the Royal Institute of Technology, Sweden P. J. Bolt , E. Gelink, TNO Science and Industry, The Netherlands S. Azcarate, A. Retolaza, Tekniker Technological Center. Spain E. Brousseau, C. Griffiths, Cardiff University, UK B. Fillon, P. Tiquet, French Atomic Energy Commission (CEA), France C. Fowler, A. Schneider, Rutherford Appleton Laboratory (RAL), UK C. Khan Malek, FEMTO-ST Institute, France S. Marson, Cranfield University, UK A. Schoth, University of Freiburg, Germany G. Tosello, Technical University of Denmark, Denmark 16:30h Micro-Ultrasonic Metrology of Multi-Material Electronic Devices R. Teti, P. De Santo, University of Naples Federico II, Italy 16:45h Approaching a sub-micron capability index using a Werth Fibre Probe System WFP R. Thelena, J. Schulza, P. Meyera, V. Sailea, Research Centre Karlsruhe, Germany
19:00h to 22:00h
Banquet (Bayside Brasserie, Cardiff Bay)

Day 2: Wednesday, 10-Sept-08

09:00h - 10:15h

Keynote Speakers (Auditorium) Chair: W. Menz, Germany 09:00h Engineered Self-assembly From Nano to Milli Scales Prof. Karl Boehringer, University of Washington, USA 09:30h Microfluidic chips for biochemical and cell analysis Prof. Michael Vellekoop, Vienna University of Technology, Austria

10:15h - 11:15h

Poster Session/Coffee break (Exhibition area)

11:15h - 12:30h

Session 5 Novel materials (Auditorium) Chair: P. Johander, IVF, Sweden 11:15h Micromachined silicon electrodes for electrochemical micromachining C. Blattert, Hahn-Schickard-Gesellschaft e. V. Institute for Micromachining and Information Technology, Germany C. Müller, University of Freiburg, Germany H. Reinecke, Hahn-Schickard-Gesellschaft e. V. Institute for Micromachining and Information Technology and University of Freiburg, Germany 11:30h Machining of polystyrene by UV laser radiation for patch clamping device fabrication S. Wilson, Forschungszentrum Karlsruhe, Germany and Cranfield University, UK P.Kirby, Cranfield University, UK W.Pfleging, A. Welle, Forschungszentrum Karlsruhe, Germany M.Przylbyski, ATL Lasertechnik GmbH, Germany 11:45h DRIE of non-conventional materials: first results S. Queste, G. Ulliac, J-C Jeannot, C. Khan Malek, Institute FEMTO-ST/Dpt. France 12:00h Micro-extrusion of ultrafine grained copper S. Geißdörfer, U. Engel, University of Erlangen-Nuremberg, Germany A. Rosochowski, University of Strathclyde, UK L. Olejnikc, Warsaw University of Technology, Poland

Session 6 Process Modelling/simulation (Room: X/0.04) Chair: U. Engel, Erlangen, Germany 11:15h Micro injection moulding: simulation of melt flow behaviour C.A. Griffiths, S.S. Dimov, E. B. Brousseau, M. S. Packianather, Cardiff University, UK 11:30h Numerical modelling and experimental characterization of short pulse laser microforming of thin metal sheets J.L. Ocaña, M. Morales, C. Molpeceres, O. García, J.A. Porro, J.J. García-Ballesteros, Centro Láser UPM, Spain 11:45h Modelling the Solidification-Structure of Al Micro-Castings as a function of their Aspect Ratio and Mould Pouring Temperature J-F. Charmeuxa, R. Mineva, S. Dimova, E. Mineva, Cardiff University, UK 12:00h Simulation of Microforming Processes by Applying a Mesoscopic Model S. Geißdörfera, U. Engela, M. Geigera, University of Erlangen-Nuremberg, Germany

12:30h - 14:00h

Lunch

14:00h - 15:30h

Q2M Special Session (Auditorium) Chair: W. Wijngaart, KTH, Sweden 14:00h The integration of mono-crystalline silicon micro-mirrors on CMOS for SLM applications F. Zimmer, M. Friedrichs, M. Mueller, H. Schenk, H. Lakner, Fraunhofer Institute for Photonic Microsystems (IPMS), Germany T. Bakke, SINTEF Department of Mikrosystems and Nanotechnology, Norway M. Lapisa, F. Niklaus, KTH-The Royal Institute of Technology, Sweden 14:15h Batch Fabrication Methods for Polymer Based Active Microsystems using Hot Embossing and Transfer Bonding Technologies T. Grund, M. Heckele, M. Kohl, Forschungszentrum Karlsruhe GmbH, Germany 14:30h Wafer-scale manufacturing of robust trimorph bulk SMA microactuators N. Sandström, S. Braun, G. Stemme, W. van der Wijngaart, KTH-Royal Institute of Technology, SWEDEN T. Grund, M. Kohl, Forschungszentrum Karlsruhe GmbH, GERMANY 14:45h Material aspects for batch integration of PZT thin films using transfer bonding technologies – Q2M development D. Bhattacharyya, R. V. Wright, Q. Zhang, P.B. Kirby, Cranfield University, UK R. Guerre, U. Drechsler, M. Despont, IBM Research Gmbh, Switzerland F. Saharil, J. Oberhammer, KTH – Royal Institute of Technology, Sweden 15:00h Towards Batch Integration of SMA into Microsystems: an Actuator Prototype D. Clausi, J. Peirs, D. Reynaerts, Katholieke Universiteit Leuven, Belgium 15:15h Fabrication of piezoelectric thick-film bimorph micro-actuators from bulk ceramics using batch-scale methods R.P.Jourdain, S. A.Wilson, Cranfield University, UK

15:30h - 16:00h

Coffee Break/Poster Session

16:00h - 17:15

Session 7 Process-material interactions (Auditorium) Chair: P. Bolt, TNO, The Netherland 16:00h Influence of process parameter variation on ceramic feedstock flow behaviour J. Aroni, Forschungszentrum Karlsruhe, Germany T. Hanemann, Forschungszentrum Karlsruhe, Germany and Albert-Ludwigs-Universität Freiburg, Germany 16:15h Micro Electrical Discharge Machining of Si3N4-based Ceramic Composites K. Liu, J. Peirs, E. Ferraris, B. Lauwers, D. Reynaerts, Katholieke Universiteit Leuven, Belgium 16:30h Investigation of the mechanical behaviour of thin metal sheets using the hydraulic bulge test A. Diehl, D. Staud, U. Engel, University of Erlangen-Nuremberg, Germany 16:45h An analysis of the effects of nanolayered nitride coatings on the lifetime and wear of tungsten carbide micromilling tools D. Zdebski, D.M. Allen, D.J.Stephenson, J. Hedge, Cranfield University, UK C. Ducros, F. Sanchette, CEA Grenoble, France

Session 8 Novel processes and process chains (Room X/0.04) Chair: 16:00h 16:15h A new tool for aligned embossing and nano-imprinting T.Rogers, I.Malmros, Applied Microengineering Limited, UK 16:30h Microfabrication of Components for a Novel Biomimetic Neurological Endoscope A. Schneider, S. E. Huq, Rutherford Appleton Laboratory, UK L. Frasson, F. M. Rodriguez Y Baena, B. L. Davies, Depart. of Mechanical Engineering., Imperial College, UK T. Parittotokkapornc, Institute of Biomedical Engineering, UK 16:45h Single- and multi-layer conductive patterns fabricated using M3D technology B. Obliers-Hommrich, A. Fischerb, H. Willeck, W. Eberhardt, Hahn-Schickard-Institute of Microassembly Technology HSG-IMAT, Germany H. Kück, University of Stuttgart, Germany

19:00h - 20.30h

A Cocktail Reception

Day 3: Thursday, 11-Sept-08

09:00h - 10:15h
Keynote Speakers (Auditorium) Chair: B. Fillon, CEA, France 09:00h Biphasic reactions in microreactors Prof. Thomas Wirth, Cardiff University, UK 09:30h Utilising Electrochemical Deposition for Micro Manufacturing Dr Peter Torben Tang, IPU Manufacturing, Denmark
10:15h - 10:45h
Coffee Break/Poster Session
10:45h to 12:00h
Session 9 Process Characterisation (Room X/0.04) Chair: A. Schoth, IMTEK, Germany 10:45h Wire electro discharge grinding: surface finish optimisation A. Rees, E. Brousseau, S.S. Dimov, Cardiff University, UK H. Gruber, I. Paganetti, AGIE AG für Industrielle Elektronik, Switzerland 11:00h Micro-Injection moulding: surface treatment effects on part demoulding  C.A. Griffiths, S. S. Dimov, E.B. Brousseau, S. Bigot, Cardiff University, UK C. Chouquet, J. Gavillet, French Atomic Energy Commission (CEA), France 11:15h Investigations in Variothermal Injection Moulding of Microstructures and Microstructured Surfaces  W. Michaeli, F. Klaiber, RWTH Aachen University, Germany S. Scholz, Cardiff University, UK 11:30h Fabrication of NIL templates incorporating different length scale features G. Lalev, P. Petkov, V. Velkova, S. Dimov, Cardiff University, UK N. Sykes, D. Barrow, metaFAB, Cardiff University, UK	Session 10 Components (Auditorium) Chair: M. Richter, IZM, Germany 10:45h Concept for Fluidic Self-Assembly of Micro-Parts Using Electro-Static Forces J. Dalin, J. Wilde, University of Freiburg – IMTEK, Germany A. Synodinos, P. Lazarou, N. Aspragathos, University of Patras, Greece 11:00h Towards automation in AFM based nanomanipulation and electron beam induced deposition for microstructuring F. Krohs, T. Luttermann, C. Stolle, S. Fatikow, University of Oldenburg, Germany E. Brousseau, S. Dimov, Cardiff University, UK 11:15h Manufacturing and replication of cell aligning micro structures C. Brecher, RWTH Aachen University and Fraunhofer-Institute for Production Technology Aachen, Germany R. Klar, F. Pretzsch, C. Wenzel, Fraunhofer-Institute for Production Technology Aachen, Germany 11:30h X-Ray pattern analysis of electroplated two component moulds used for Production of micro gear wheels J. Lorenz, V. Piotter, H.-J. Ritzhaupt-Kleissl, A. Roch, Forschungszentrum Karlsruhe GmbH, Germany J. Prokop, J. Haußelt, Forschungszentrum Karlsruhe GmbH and University of Freiburg, Germany
12:00h - 13:00h
Lunch

Poster presentations

Process Characterisation including Process Chains
Electrochemical finishing of nickel microstructures S. Kissling, K. Bade, Forschungszentrum Karlsruhe, Germany Improved bonding strength in hybrid micro parts by using plasma W. Michaeli, T. Kamps, Institute of Plastics Processing at RWTH Aachen University, Germany Force analysis in micro milling Al 6082 T6 in various engagement conditions G. Bissacco, University of Padova, Italy T. Gietzelt, Forschungszentrum Karlsruhe Institut für Mikroverfahrenstechnik, Germany H. Hansen, Technical University of Denmark, Denmark Strategies for material removal in laser milling P. Petkov, S. Scholz, S. Dimov, Cardiff University, UK TEM/SEM and FT-IR characterization of biocompatible magnetic nanoparticles K.Alexandrova, A. Gigova,I. Dragieva, Bulgarian Academy of Sciences, Bulgaria I. Markova–Deneva, University of Chemical Technology and Metallurgy, Bulgaria
Components: Fabrication and Assembly Technologies
Ultrasonic welding of micro plastic parts W. Michaeli, W.-M. Hoffmann, E. Haberstroh, RWTH Aachen University, Germany High Density Interconnections Fabrication by UV Lasers Microprocessing of Microvias and Microstructures D. Ulieru, ROMES S.A., Romania A. Matei, National Institute for Research and Development in Microtechnologies, Romania E. Ulieru, A. Tantau, c SITEX 45 SRL, Romania F. Babarada, University of Bucharest, Romania Fabrication of stainless steel micro components using softlithography M. Imbaby, K. Jiang, I. Chang, University of Birmingham, UK Investigation of Material Compatibility for Embedding Stereolithography T. Rechtenwald, M. Devrient, T. Frick, M. Schmidt, Bayerisches Laserzentrum GmbH, Germany A. Kopczynska, E. Schmachtenberg, Friedrich-Alexander Universität, Germany Electric fields in a hybrid batch fluidic micromanipulation concept P. Lazarou, N.A. Aspragathos, University of Patras, Greece E. Jung, Chip Interconnection Technologies, Germany
Novel Materials: Characterisation and Processing
Dielectric properties of hydroxyapatite based ceramics J.P. Gittings, C.R.Bowen, I.G.Turner, A.C.E.Dent, F.R.Baxter, J.B. Chaudhuri, University of Bath, UK Carbon nanotubes grown directly on printed electrode of electrochemical sensor J. Prasek, J. Hubalek, M. Adamek, Brno University of Technology, Czech Republic O. Jasek, Masaryk University, Czech Republic Micromachining of amorphous and crystalline Ni78B14Si8 alloys using micro-second and pico-second lasers I. Quintana, 1CIC marGUNE., Spain A. Aranzabe, Fundación Tekniker, Spain T. Dobrev, G. Lalev, S. Dimov, Cardiff University, UK FT-IR study of nanosurface phenomena I. Markova–Deneva, University of Chemical Technology and Metallurgy–Sofia, Bulgaria 3D micro and nanostructuring of an epoxy based resist by electron beam lithography G. Rius, J. Bausells, C. Martín, A. Llobera and F. Pérez-Murano, Institut de Microelectrònica de Barcelona, IMB-CNM-CSIC, SPAIN Explosive welding of Ni- based amorphous foils for micro-tooling applications R. Minev, N. Festchiev, Rousse University, Bulgaria S. Dimov, G.Lalev, Cardiff University, UK S. Koev, BOM Ltd, Bulgaria
Process Modelling and Simulation
Implementation strategies for the optimization of micro injection moulding simulations G. Tosello, Technical University of Denmark, Denmark A. Schoth, Department of Microsystems Engineering IMTEK),Germany H. Hansen, University of Freiburg, Germany Geometry Optimization of Micro Milling Tools J. Fleischer, M. Deuchert, C. Kühlewein, C. Ruhs, Universität Karlsruhe, Germany On the force between two metallic plates of a gripper immersed in a nonpolar fluid D. Dantchev, K. Kostadinov, Bulgarian Academy of Sciences, Bulgaria А study of the gate size effects on the process of optical data storage micro-scale D. S. Trifonov, Y. Toshev, Bulgarian Academy of Sciences, Bulgaria Influence of Force Components on Thin Wire EDM A. Herrero, S. Azcarate, Fundacion Tekniker, Spain A. Rees, Cardiff University, Cardiff, UK A. Gehringer, A. Schoth, University of Freiburg, Germany J.A. Sanchez, Faculty of Engineering of Bilbao, Spain
Systems: Novel Product and Process Designs
Sub-Micron Referencing System for Ultraprecision Machining Processes M. Weinzierl, Fraunhofer Institute for Production Technology IPT, Germany C. Brecher, Fraunhofer Institute for Production Technology IPT and RWTH Aachen University, Germany A. Rashid, System 3R Intl. AB, Sweden R. Schmitt, D. Köllmann, RWTH Aachen University, Germany