Themes

Papers are invited to present the latest advances in developing new processes and process chains for multi-material micro manufacture and their applications in microsystems-based products, in particular but not limited to:

• Novel materials: characterisation and processing;
• Process modelling and simulation;
• Process characterisation including process chains;
• Metrology: inspection and characterisation methods;
• Components: fabrication and assembly technologies;
• Systems: novel product and system designs.

The above six sub-topics represent the intended topics of the thematic sessions of the Conference to which the authors are invited to submit papers.