Programme

Day 1: Wednesday, 20-Sept-06

Day 2: Thursday, 21-Sept-06

Day 3: Friday, 22-Sept-06

Please note that the Posters will be displayed from Wed 20th to Fri 22nd September 2006.

Day 1: Wednesday, 20-Sept-06

• Invited Talk

08:00h - 09:00h
Registration
09:00h to 09:45h
Opening J-C. Guibert, Director of Minatec B.Fillon, Conference Chair G. Fioraso, French political invited speaker
09:50h to 11:05h
Keynote Speakers Chair: B. Fillon, CEA/LITEN, France Micromoulding – Precision Processing for Controlled Products P. Coates, School of Engineering, Design & Technology, University of Bradford, UK Automatic Nanohandling Station inside a Scanning Electron Microscope S. Fatikow, Division Microrobotics and Control Engineering, University of Oldenburg, Germany
11:05h to 11:35h
Coffee Break/Poster Session
11:35h to 12:45h
Session 1 Process characterisation Chair: A. Schoth, IMTEK, Germany Micro-Injection Moulding: Factors Affecting the Replication Quality of Micro Features B. Sha, The Manufacturing Engineering Centre, Cardiff University, UK S. Dimov, The Manufacturing Engineering Centre, Cardiff University, UK C. Griffiths, The Manufacturing Engineering Centre, Cardiff University, UK M. S. Packianather, The Manufacturing Engineering Centre, Cardiff University, UK Microfluidics on foil T. Velten, Fraunhofer Institute for Biomedical Engineering (IBMT), Germany M. Richter, Fraunhofer Institute for Reliability and Microintegration (IZM), Germany G. Klink, Fraunhofer Institute for Reliability and Microintegration (IZM), Germany K. Bock, Fraunhofer Institute for Reliability and Microintegration (IZM), Germany C. Khan Malek, Laboratoire FEMTO-ST/Dpt. LPMO, UMR CNRS, France S. Polster, Bayrisches Laserzentrum, Erlangen, Germany P. Bolt, TNO Science & Industry, The Netherlands Large Area Plastic Replication with Modular Molding Tools M. Heckele, Institute for Microstructure Technoloyg (IMT), Karlsruhe Research Centre, Germany C. Mehne, Institute for Microstructure Technology, University of Karlsruhe, Germany R. Steger, IMTEK, Lab for MEMS Applications, University of Freiburg, Germany P. Koltay, IMTEK, Lab for MEMS Applications, University of Freiburg, Germany D. Warkentin, Hahn-Schickhard Institute for Microassembly Technology (HSG-IMAT), Germany Microforming of titanium – forming behaviour at elevated temperature B. Eichenhüller, University of Erlangen-Nuremberg, Germany U. Engel, University of Erlangen-Nuremberg, Germany	Session 2 Components Chair: M. Richter, IZM, Germany Polymer Based Multifunctional 3D-Packages for Microsystems W. Eberhardt, Hahn-Schickard-Institute for Microassembly Technology HSG-IMAT, Germany D. Ahrendt, Hahn-Schickard-Institute for Microassembly Technology HSG-IMAT, Germany U. Keßler, Hahn-Schickard-Institute for Microassembly Technology HSG-IMAT, Germany D. Warkentin, Hahn-Schickard-Institute for Microassembly Technology HSG-IMAT, Germany H. Kück, University of Stuttgart, Institute for Micro and Precision Engineering, Germany Dimensional tolerances of micro precision parts made by ceramic injection moulding M. Beck, Institute for Materials Research III, Forschungszentrum Karlsruhe Gmb, Germany V. Piotter, Institute for Materials Research III, Forschungszentrum Karlsruhe Gmb, Germany R. Ruprech, Institute for Materials Research III, Forschungszentrum Karlsruhe Gmb,Germany J. Haußelta, Institute of Microsystem Technology (IMTEK), University of Freiburg, Germany Automated tool exchange for ultraprecision diamond milling and turning applications C. Brecher, Fraunhofer-Institute for Production Technology IPT, Germany S. Lange, Fraunhofer-Institute for Production Technology IPT, Germany F. Niehaus, Fraunhofer-Institute for Production Technology IPT, Germany C. Wenzel, Fraunhofer-Institute for Production Technology IPT, Germany Membrane-less mass flow micro sensor T. Velten, Fraunhofer Institute for Biomedical Engineering (IBMT), 66386 St. Ingbert, Germany H. Schuck, Fraunhofer Institute for Biomedical Engineering (IBMT), 66386 St. Ingbert, Germany T. Knoll, Fraunhofer Institute for Biomedical Engineering (IBMT), 66386 St. Ingbert, Germany N.Graf, Fraunhofer Institute for Biomedical Engineering (IBMT), 66386 St. Ingbert, Germany W. Haberer, Fraunhofer Institute for Biomedical Engineering (IBMT), 66386 St. Ingbert, Germany
12:45h to 13:45h
Lunch/Poster Session
13:45h to 15:15h
Session 3 Market Studies Chair: B. Fillon, CEA/LITEN, France A roadmapping study in Multi-Material Micro Manufacture B. Peat, The Manufacturing Engineering Centre, Cardiff University, UK Market Forecasts for Roll-to-roll Electronics Manufacturing D.P. Lawrence, IDTechEx, Ltd. UK 2003-2009 SiC market analysis for material, components and applications J-C Eloy, YOLE DEVELOPPEMENT, France SME’s Perspectives: 4M current capabilities and future requirements C. Neuy, IVAM Microtechnology Network, Germany
15:15h to 15:45h
Coffee Break/Poster Session
15:45h to 17:00h
Panel Discussion 4M Industrial Board Chair: B. Fillon, CEA/LITEN, France and W. Menz, Germany C. Hanisch, Festo, Germany R. Wimberger-Friedl, Phillips Research Laboratories, The Netherlands D. Ulieru, Romes - SA, Romania J. Anjeby, Saab Ericsson Space AB, Sweden L. Cuccaro, AVIO, Italy U. Ljungblad, Micronic Laser Systems, Sweden D. Lawrence, IDTechEx, UK M. Knowles, Oxfrod Lasers, UK
19:00h to 22:30h
Banquet Chateau de la Baume

Day 2: Thursday, 21-Sept-06

08:30h - 09:45h
Keynote speakers Chair: W. Menz, Germany Microfluidics: technology, market and business trends. What evolution is expected? G. Andrieux, YOLE Développement, France Lab on a Chip : Advances in packaging for MEMS and Lab on a Chip F. Sauter-Starace, CEA, LETI, Department Microtechnology for Biology and Health-care, France
09:45h - 10:15h
Coffee Break/Poster Session
10:15h - 10:30h
H. Pedersen EC Micro/Nano Manufacturing in FP7
10:30h - 11:30h
Panel Discussion 4M Scientific Board Chair: W. Menz, Germany and S. Dimov, MEC, UK S. Faticow, University of Oldenburg, Germany A. Dietzel, TU Eindhoven, Netherlands N. Mohri , University of Tokyo, Japan G. Andrieux,Yole, France F. Sauter, CEA-LETI, France P. Coates, School of Engineering, Design & Technology, University of Bradford UK
11:30h - 11:45h
Coffee Break/Poster Session
11:45h - 13:00h
Session 4 Novel materials Chair: P. Johander, IVF, Sweden Characterization of Molecularly Imprinted Polymers as Novel Materials for Biochemical Sensors N. Hosseinia, MC2, Chalmers Univ. of Technology, Sweden C. Rusu, Imego AB, Sweden A. Krozea, Imego AB, Sweden S. Haasl, Imego AB, Sweden K. Reimhult, Imego AB, Sweden J-O Lindgren, Imego AB, Sweden P. Enoksson, MC2, Chalmers Univ. of Technology, Sweden L. Yec, Applied Biotechnology, Lund University, Sweden Indirect Tooling Based on Micromilling, Electroforming and Selective Etching P.T. Tang, Technical University of Denmark, Denmark J. Fugl, Technical University of Denmark, Denmark L. Uriarte, Fundacion Tekniker, Spain G. Bissacco, Technical University of Denmark, Denmark H.N. Hansen, Technical University of Denmark, Denmark An Ultrathick SU-8 UV Lithographic Process and Sidewall Characterization K Jiang1, Centre for MicroEnigineering and NanoTechnology, The University of Birmingham, U.K C-H Lee, Centre for MicroEnigineering and NanoTechnology, The University of Birmingham, U.K P. Jin, Centre for MicroEnigineering and NanoTechnology, The University of Birmingham, U.K Influence of the process parameters on themicrostructure of screenprinted Ba0.6Sr0.4TiO3 (BST60) thick-films on alumina-substrates F. Paul, Forschungszentrum Karlsruhe, Institute for Materials Science III, Germany J.R. Binder, Forschungszentrum Karlsruhe, Institute for Materials Science III, Germany A. Berto, Forschungszentrum Karlsruhe, Institute for Materials Science III, Germany G. Link, Forschungszentrum Karlsruhe, Institute for Materials Science III, Germany H.-J. Ritzhaupt-Kleissl, Forschungszentrum Karlsruhe, Institute for Materials Science III, Germany	Session 5 Modelling/simulation Chair: U. Engel, Erlangen, Germany Modelling and simulation of piezoelectric actuation and reliability of micropumps Meiling Zhu, School of Industrial and Manufacturing Science, Cranfield University, UK Paul B. Kirby, School of Industrial and Manufacturing Science, Cranfield University, UK Martin Richter, Fraunhofer Institute for reliability and microintergration (IZM), Germany Yucel Congar, Fraunhofer Institute for reliability and microintergration (IZM), Germany Alexander Diehl, Chair of Manufacturing Technology, University Erlangen-Nuremberg, Germany Ralf Voelkl, Chair of Manufacturing Technology, University Erlangen-Nuremberg, Germany Mechanistic Modelling of the Micro- End Milling Operation L. Uriarte, Fundación Tekniker, Spain S. Azcarate, Fundación Tekniker, Spain A. Herrero, Fundación Tekniker, Spain L.N. Lopez de Lacalle, Dpto. Ing. Mecanica, ETSII, Spain A. Lamikiz, Dpto. Ing. Mecanica, ETSII, Spain Design procedure of planar compliant microgrippers with flexural joints F. Székely, Budapest University of Technology and Economics, Hungary T. Szalay, Budapest University of Technology and Economics, Hungary Finite Element Analysis of Glass Moulding C. Brecher, Fraunhofer Institute for Production Technology IPT, Germany M. Winterschladen, Fraunhofer Institute for Production Technology IPT, Germany S. Lange, Fraunhofer Institute for Production Technology IPT, Germany F. Klocke, Fraunhofer Institute for Production Technology IPT, Germany G. Pongs, Fraunhofer Institute for Production Technology IPT, Germany F. Wang, Fraunhofer Institute for Production Technology IPT, Germany
13:00h - 14:00h
Lunch/Poster Session
14:00h - 15:30h
Session 6 EC Projects Chair: S.Dimov, MEC, UK A dynamics-driven approach to precision machines design for micro-manufacturing and its implementation perspectives K. Cheng, Leeds Metropolitan University, UK A New Technology Platform for Fully Integrated Polymer based Micro Optical Fluidic Systems J. Nestler, Chemnitz University, Germany An Innovation tool for Nanostructured Polymer materials and Nanocomposites J.F. Gerald, INSA-LYON, France Material science and technogy roadmapping in the SMART SSA project P. Juliet,CEA, France
15:30h - 16:00h
Coffee Break/Poster Session
16:00h - 17:15
Session 7 Metrology Chair: L. Mattson, KTH, Sweden Measurement and characterisation of the microtopography in the contact area between workpiece and tool in microforming S. Weidel, University of Erlangen-Nuremberg, Germany U. Engel, University of Erlangen-Nuremberg, Germany Repeatability analysis of two methods for height measurements in the micrometer range C. Ferri, The Manufacturing Engineering Centre, Cardiff University,UK E. Brousseau, The Manufacturing Engineering Centre, Cardiff University,UK S. Dimov, The Manufacturing Engineering Centre, Cardiff University,UK L. Mattsson, Department of Production Engineering, Royal Institute of Technology, Sweden Comparison of the control of laser striation on lamellar cast iron with various techniques C. Vincenta, Institut FEMTO-ST, France G. Monteil, Laboratoire de Microanalyse des Surfaces, France T. Barrière, Institut FEMTO-ST, France J.C. Gelin, Institut FEMTO-ST, France Localizing micro-defects on rough metal surfaces. A. Témun, Dep. of Production Engineering, KTH – Royal Institute of Technology, Sweden L. Mattsson, Dep. of Production Engineering, KTH – Royal Institute of Technology, Sweden I. Heikkilä, KiMAB, Sweden	Session 8 Systems Chair: E. Jung, IZM, Germany Low Cost Capacitive Inclination Sensors based on selectively metallized polymer Benz Daniel, Institut für Zeitmesstechnik, Fein- und Mikrotechnik, Universität Stuttgart, Germany Botzelmann Tim, Hahn-Schickard-Gesellschaft, Institut für Mikroaufbautechnik, Germany Kück Heinz, Institut für Zeitmesstechnik, Fein- und Mikrotechnik, Universität Stuttgart, Germany Warkentin Danie, Hahn-Schickard-Gesellschaft, Institut für Mikroaufbautechnik, Germany High resolution low cost optical angular resolver V. Mayer, Hahn-Schickard-Gesellschaft, Institute for Micro Assembly Technology, Germany D. Warkentin, Hahn-Schickard-Gesellschaft, Institute for Micro Assembly Technology, Germany H. Kück, Hahn-Schickard-Gesellschaft, Institute for Micro Assembly Technology, Germany All Polymer Electrochemical Sensor M.Bengtsson, Department for Micro- and Nanotechnology, Technical University of Denmark, Denmark G.Thrastardottir, Department for Micro- and Nanotechnology, Technical University of Denmark, Denmark T.S.Hansen, Department of Chemical Engineering, Technical University of Denmark, Denmark O.Geschke, Department for Micro- and Nanotechnology, Technical University of Denmark, Denmark Polymer optical micro-array sensor P.J. Bolt, TNO Science & Industry, The Netherlands R. de Zwart, TNO Science & Industry, The Netherlands R. Houben, TNO Science & Industry, The Netherlands G. van Heck, TNO Science & Industry, The Netherlands F. Dennard, TNO Science & Industry, The Netherlands P. Rensing, TNO Science & Industry, The Netherlands J. van Veen, TNO Quality of Life, The Netherlands B. Langeveld, Holst Centre, The Netherlands M. Koetse, Holst Centre, The Netherlands H. Schoo, Holst Centre, The Netherlands
19:00h - 20.30h
A cocktail reception hosted by the Mayor of Grenoble at Grenoble Museum

Day 3: Friday, 22-Sept-06

09:00h - 10:15h
Keynote speakers Chair: S. Dimov, MEC, UK Recent Evolution of Electrical Discharge Machining N. Mohri, Department of Precision Machinery Engineering, The University of Tokyo, Japan Micro- and nano- structuring using Ion beams Dr. Wilhelm Bruenger, Fraunhofer-ISiT, Germany
10:15h - 10:45h
Coffee Break/Poster Session
10:45h to 12:00h
Session 9 Process Characterisation Chair: A. Schoth, IMTEK, Germany Mechanical properties and bending behaviour of metal foils A. Diehl, University of Erlangen-Nuremberg, Germany U. Engel, University of Erlangen-Nuremberg, Germany M. Geiger, University of Erlangen-Nuremberg, Germany Adapting ECF to steels used for micro mould inserts L. Staemmler, Hahn-Schickard-Institute for Micro Assembly Technology (HSG-IMAT), Germany K. Hofmann, University of Stuttgart, Institute of Micro- and Precision Engeneering (IZFM), Germany M.-H. Kim, University of Stuttgart, Institute of Micro- and Precision Engeneering (IZFM), Germany D. Warkentin, Hahn-Schickard-Institute for Micro Assembly Technology (HSG-IMAT), Germany H. Kück, University of Stuttgart, Institute of Micro- and Precision Engeneering (IZFM), Germany A Comparative Study of Three Technologies for Producing Castings with Micro/Meso-scale Features J-F. Charmeux, Manufacturing Engineering Center, Cardiff University, UK R. Minev, Manufacturing Engineering Center, Cardiff University, UK S. Dimov, Manufacturing Engineering Center, Cardiff University, UK E. Minev, Manufacturing Engineering Center, Cardiff University, UK U. Harrysson, Fcubic, Sweden Influence of EDM machining on surface integrity of WC-Co M.R Shabgard, Manufacturing Engineering Centre, Cardiff University, UK A. Ivanov, Manufacturing Engineering Centre, Cardiff University, UK A. Rees, Manufacturing Engineering Centre, Cardiff University, UK	Session 10 Components Chair: M. Richter, IZM, Germany Surface micromachined three-dimentional solenoid-type inductor D-M. Fang, Institute of Micro and Nano Science & Technology, China Y. Zhou, Institute of Micro and Nano Science & Technology, China W. Ding, Institute of Micro and Nano Science & Technology, China X-N. Wang, Institute of Micro and Nano Science & Technology, China X-L. Zhao, Institute of Micro and Nano Science & Technology, China Development of a MID LED housing R. M. de Zwart, TNO Science & Industry, The Netherlands R. A. Tacken, TNO Science & Industry, The Netherlands P.J. Bolt, TNO Science & Industry, The Netherlands Micropart manipulation by electrical fields for highly parallel batch assembly P. Lazarou, University of Patras, Greece N.A. Aspragathos, University of Patras, Greece E. Jung, Chip Interconnection Technologies, Fraunhofer IZM, Germany Laser Micro-milling of Ceramics, Dielectrics and Metals using nanosecond and picosecond lasers M.R.H Knowles, Oxford Lasers Ltd, UK G. Rutterford, Oxford Lasers Ltd, UK D. Karnakis, Oxford Lasers Ltd, UK T. Dobrev, MEC, Cardiff University, UK P.Petkov, MEC, Cardiff University, UK S.Dimov, MEC, Cardiff University, UK
12:00h - 13:00h
Lunch/Poster Session

Poster Presentations

Session 1 – Process characterisation
Laser polishing T. Dobrev, Manufacturing Engineering Centre, Cardiff University, UK D.T Pham, Manufacturing Engineering Centre, Cardiff University, UK S. Dimov, Manufacturing Engineering Centre, Cardiff University, UK Challenging the sustainability of micro products development A. De Grave, Technical University of Denmark, Denmark S.I. Olsen, Technical University of Denmark, Denmark Process parameter analysis on surface roughness and process forces in micro cutting J. Fleischer, Institute of Production Science (wbk),Universität Karlsruhe (TH), Germany G. Lanza, Institute of Production Science (wbk),Universität Karlsruhe (TH), Germany M. Schlipf, Institute of Production Science (wbk),Universität Karlsruhe (TH), Germany J. Kotschenreuther, Institute of Production Science (wbk),Universität Karlsruhe (TH), Germany J. Peters, Institute of Production Science (wbk),Universität Karlsruhe (TH), Germany On the use of hot embossing for the reproduction of the surface topography of mould microreliefs M. Sahli, Laboratoire de Microanalyse des Surfaces (LMS),Laboratoire FEMTO-ST, France C. Millot, Laboratoire de Microanalyse des Surfaces (LMS), France C. Roques-Carmes, Laboratoire de Microanalyse des Surfaces (LMS), France C. Khan Malek, Laboratoire FEMTO-ST, France J.C. Gelin, Laboratoire FEMTO-ST, France Application of SOI based sensors for MEMS wafer-level packaging F. Ghavanini, Chalmers University of Technology, Sweden C. Rusu, The Imego Institute. Sweden K. Persson, The Imego Institute. Sweden P. Enoksson, Chalmers University of Technology, Sweden Protective Coating of Zinc and Zinc Alloys for Industrial Applications Y. Toshev, Bulgarian Academy of Sciences (BAS), Bulgaria V. Mandova, TDP Group Ltd, Sofia, Bulgaria N. Boshkov, Bulgarian Academy of Sciences (BAS), Bulgaria D. Stoychev, Bulgarian Academy of Sciences (BAS), Bulgaria P. Petrov, Bulgarian Academy of Sciences (BAS), Bulgaria N. Tsvetkova, Bulgarian Academy of Sciences (BAS), Bulgaria G. Raichevski, Bulgarian Academy of Sciences (BAS), Bulgaria Ch. Tsvetanov, Bulgarian Academy of Sciences (BAS), Bulgaria A. Gabev, Gabex Ltd, Sofia, Bulgaria R. Velev, TDP Group Ltd, Sofia, Bulgaria K. Kostadinov, Bulgarian Academy of Sciences (BAS), Bulgaria Size effects in the production of micro strip by the flat rolling of wire K. van Putten, Metal Forming Institute, RWTH Aachen University, Germany R. Kopp, Metal Forming Institute, RWTH Aachen University, Germany G. Hirt, Metal Forming Institute, RWTH Aachen University, Germany Manufacturing and characterization of water repellent surfaces A. De Grave, Technical University of Denmark, Denmark P. Botija, Technical University of Denmark, Denmark H.N. Hansen, Technical University of Denmark, Denmark P.T. Tang, Technical University of Denmark, Denmark Experimental study on the free-sintering process of a micro-porous HDPE membrane D.B. Trifonov, Institute of Information Technologies, Bulgarian Academy of Sciences, Bulgaria Y.E. Toshev, Institute of Information Technologies, Bulgarian Academy of Sciences, Bulgaria Hybrid Tooling: A Review of Process Chains for Tooling Microfabrication within 4M S. Azcarate, Fundación Tekniker, Spain L. Uriarte, Fundación Tekniker, Spain S. Bigot, School of Engineering, Cardiff University, UK P. Bolt, TNO Industrial Technology, The Netherlands L. Staemmler, HSG-IMAT, Germany G. Tosello, Department of Manufacturing Engineering and Management, DTU, Denmark S. Roth, The Bayerisches Laserzentrum, BLZ, Germany A. Schoth, IMTEK, University of Freiburg, Germany
Session 2 – Components
Force fields with one stable equilibrium for micropart 2D manipulation E.K. Xidiasa, University of Patras, Greece N.A. Aspragathosa, University of Patras, Greece Laser transmission welding of micro plastics parts E. Haberstroh, Institute of Plastics Processing (IKV), Germany W.-M. Hoffmann, Institute of Plastics Processing (IKV), Germany Developments in Micro Ultrasonic Machining (MUSM) J. Boy, FEMTO-ST/LCEP, France M. Aiguillé, TEMIS Innovation (Projet µUSM, France A. Boulouize, TEMIS Innovation (Projet µUSM, France C. Khan-Malek, FEMTO-ST / LPMO, France Manufacture of recessed rotating microelectrodes for mass transport investigations in the LIGA process M. Lisinenkova, Institut für Mikrostrukturtechnik, Forschungszentrum Karlsruhe GmbH, Germany L. Hahn, Institut für Mikrostrukturtechnik, Forschungszentrum Karlsruhe GmbH, Germany J. Schulz, Institut für Mikrostrukturtechnik, Forschungszentrum Karlsruhe GmbH, Germany Fabrication of a solenoid-type inductor with electroplated NiFe magnetic Core by MEMS C. Lei, Institute of Micro and Nano Science & Technology, China W. Ding, Institute of Micro and Nano Science & Technology, China Y. Zhou, Institute of Micro and Nano Science & Technology, China X-Y Gao, Institute of Micro and Nano Science & Technology, China H Choi, Samsung Advanced Institute of Technology (SAIT), Korea J Won, Samsung Advanced Institute of Technology (SAIT), Korea The effects of material microstructure in micro-milling K. Popov, MEC, Cardiff University, UK S. Dimov, MEC, Cardiff University, UK D. T. Pham, MEC, Cardiff University, UK R. Minev, MEC, Cardiff University, UK A. Rosochowski, University of Strathclyde, UK L. Olejnik, Warsaw University of Technology, Poland M. Richert, AGH - University of Science and Technology, Poland Replication of micrometric pattern by hot embossing of silica based feedstock L. Federzoni, CEA-Grenoble, France O. Fourcade, CEA-Grenoble, France P. Lourdin, ECAM, France Off-Axis Machining of NURBS Freeform Surfaces by Fast Tool Servo Systems C. Brecher, Fraunhofer Institute for Production Technology IPT, Germany S. Lange, Fraunhofer Institute for Production Technology IPT, Germany M. Merz, Fraunhofer Institute for Production Technology IPT, Germany F. Niehaus, Fraunhofer Institute for Production Technology IPT, Germany M. Winterschladen, Fraunhofer Institute for Production Technology IPT, Germany Prototyping of multilayer waveguides with V-grooves in COC/Topas® F. Bundgaard, Technical University of Denmark, Denmark J. Ducrée, HSG-IMIT, Germany R. Zengerlec, Germany O. Geschke, Technical University of Denmark, Denmark An integrated solenoid-type inductor with Fe-based soft magnetic core C. Lei, Institute of Micro and Nano Science & Technology, China Y. Zhou, Institute of Micro and Nano Science & Technology, China W. Ding, Institute of Micro and Nano Science & Technology, China X-Y. Gao, Institute of Micro and Nano Science & Technology, China Y. Cao, Institute of Micro and Nano Science & Technology, China H. Choi, Samsung Advanced Institute of Technology (SAIT), Samsung Electronics Co, Korea J. Won, Samsung Advanced Institute of Technology (SAIT), Samsung Electronics Co, Korea In-process assembly of micro metal inserts in a polymer matrix G. Tosello, Technical University of Denmark, Denmark H. N. Hansen, Technical University of Denmark, Denmark Low Temperature Adhesive Bonding in MEMS D. Andrijasevic, Vienna University of Technology, Vienna W. Smetana, Vienna University of Technology, Vienna D. Esinenco, The National Institute for R&Development in Microtechnologies, Romania W. Brenners, Vienna University of Technology, Vienna Design and Manufacturing of Micro Heaters for Gas Sensors P. Johander, IVF- Industrial Research and Development Corporation, Sweden, I. Goenaga, Fundacion Tekniker, Micro and Nanotechnology Department, Spain D. Gomez, Fundacion Tekniker, Micro and Nanotechnology Department, Spain C. Moldovan, The National Institute for R&D in Microtechnologies, Romania O. Nedelcu, The National Institute for R&D in Microtechnologies, Romania P. Petkov, Manufacturing Engineering and Multidisciplinary Technology Centre, Cardiff University, Wales U. Kaufmann, Forschungszentrum Karlsruhe, Institut für Materialforschung III, Germany H.-J. Ritzhaupt-Kleissl, R. Dorey, Nanotechnology Group, Cranfield University, Cranfield, UK K. Persson, IMEGO, Sweden
Session 4 – Novel materials
Forming and machining of the nano-crystalline alloys Gy. Krállics, Budapest University of Technology and Economics, Hungary M. Horváth, Budapest University of Technology and Economics, Hungary J. Nyirőb, Budapest University of Technology and Economics, Hungary Micro EDM parameters optimisation S. Bigot, Manufacturing Engineering Centre, Cardiff University, UK J. Valentinčič, Faculty of Mechanical Engineering, University of Ljubljana, Slovenia O. Blatnik, Faculty of Mechanical Engineering, University of Ljubljana, Slovenia M. Junkar, Faculty of Mechanical Engineering, University of Ljubljana, Slovenia Hard Tooling by μEDM-milling for Injection Molding R. Jurischka, IMTEK, Laboratory for Process Technology University of Freiburg, Germany A. Schoth, for Process Technology University of Freiburg, Germany C. Müller, for Process Technology University of Freiburg, Germany D. Thiebaud, Sarix SA, Micro EDM Technology, Switzerland R. Gallera, Sarix SA, Micro EDM Technology, Switzerland H. Reinecke, for Process Technology University of Freiburg, Germany Modelling and design of GaN based piezoelectric MEMS C.R. Bowen, Materials Research Centre, Department of Mechanical Engineering, University of Bath, UK, D.W.E. Allsopp, Department of Electronic and Electrical Engineering, University of Bath, UK R. Stevens, Materials Research Centre, Department of Mechanical Engineering, University of Bath, UK, P.Shields, Department of Physics, University of Bath, UK W.N. Wang, Department of Physics, University of Bath, UK Systematic Interaction of Sedimentation and Electrical Field in Electrophoretic Deposition S. Bonnasa, IMTEK, University of Freiburg, Germany J. Tabellion, IMTEK, University of Freiburg, Germany H.-J. Ritzhaupt-Kleissl, Institute for Materials Research III, Forschungszentrum Karlsruhe,Germany J. Haußelt, Institute for Materials Research III, Forschungszentrum Karlsruhe,Germany Particle size dependent viscosity of polymer-silica-composites T. Hanemann, Albert-Ludwigs-Universität Freiburg, Institut f. Mikrosystemtechnik (IMTEK), Germany R. Heldele, Forschungszentrum Karlsruhe, Institut f. Materialforschung III, Germany J. Hausselt, Albert-Ludwigs-Universität Freiburg, Institut f. Mikrosystemtechnik (IMTEK), Germany Structuring of phosphorescent pigments by two-step hot embossing for signaletic applications M. Sahli, Laboratoire FEMTO-ST, Département LMARC, France F. Legay, Laboratoire de Microanalyse des Surfaces (LMS), France C. Roques-Carmes, Laboratoire de Microanalyse des Surfaces (LMS), France C. Khan Malek, Laboratoire FEMTO-ST, Département LPMO, France J.C. Gelin, Laboratoire FEMTO-ST, Département LMARC, France Fabrication of nano-dimensional features in FOTURAN using focused ion beam technology P.T. Docker, Department of Mechanical Engineering and Manufacturing, University of Birmingham, UK J Teng, Department of Mechanical Engineering and Manufacturing, University of Birmingham, UK P. D. Prewett, Department of Mechanical Engineering and Manufacturing, University of Birmingham, UK K. C. Jiang, Department of Mechanical Engineering and Manufacturing, University of Birmingham, UK Self-assembled nanostructured polymer films from concentrated solutions of block copolymers N. Didier, Ecole Nationale Supérieure de Physique de Grenoble, France P. Panine, European Synchrotron Radiation Facility, France
Session 5 – Modelling/Simulation
On Forces and Interactions at Small Distances in Micro and Nano Assembly Process D. Dantchev, Institute of Mechanics, Bulgarian Academy of Sciences, Bulgaria K. Kostadinov, Institute of Mechanics, Bulgarian Academy of Sciences, Bulgaria Unified Approach For Functional Task Formulation In Domain Of Micro/Nano Handling Operations. K. Kostadinov, Institute of Mechanics, Bulgarian Academy of Sciences, Bulgaria R. Kasper, University “Otto-von Guericke” – Institute of Mobile systems, Germany T. Tiankov, Institute of Mechanics, Bulgarian Academy of Sciences, Bulgaria M. Al-Wahab, University “Otto-von Guericke” – Institute of Mobile systems, Germany D. Chakarov, Institute of Mechanics, Bulgarian Academy of Sciences, Bulgaria D. Gotseva, Technical University, Faculty of Computer Systems and Control, Bulgaria Thermally induced stresses in an adhesively bonded multilayer structure with 30-micron thick film piezoelectric ceramic and metal components R.Jourdain, School of Industrial and Manufacturing Science, Cranfield University, UK S.A.Wilson, School of Industrial and Manufacturing Science, Cranfield University, UK
Session 7 – Metrology
Mechanical Testing of Laser Welded Micro Seams C.B. Nielsen, Danish Technological Institute, Denmark D. Buccoliero, Danish Technological Institute, Denmark T. Ussing, Fluimedix ApS, Denmark Micro particle sizing by using of ray optics Monte Carlo code M.D. Mikrenska, Institute of Mechanics, Bulgarian Academy of Sciences, Bulgaria P.I. Koulev, Institute of Mechanics, Bulgarian Academy of Sciences, Bulgaria J.-B. Renard, Laboratoire de Physique et Chimie de l'Environnement, France Fiber optic temperature sensor based on spectral transmitivity of CdTe Z.V. Djinovic, Vienna University of Technology, Austria M.C. Tomic, Institut Bezbednosti, Serbia and Montenegro S. Ivankovic, Institut Bezbednosti, Serbia and Montenegro A. Vujanic, Integrated Microsystems Austria, Austria Reactive magnetron sputtering deposited ITO thin films : influence of O2 admixture on microstructure and optical properties C. Secouard, CEA Grenoble, Laboratoire des Technologies des Surfaces, France C. Ducros, CEA Grenoble, Laboratoire des Technologies des Surfaces, France P. Roca i Cabarrocas, Laboratoire de Physique des Interfaces et des Couches Minces, France S. Noël, CEA Grenoble, Laboratoire des Composants Hybrides, France F. Sanchette, CEA Grenoble, Laboratoire des Technologies des Surfaces, France
Session 8 – Systems
Ultrasonic Plasticising for Micro Injection Moulding W. Michaeli, Institute of Plastics Processing at RWTH Aachen University, Germany D. Opfermann, Institute of Plastics Processing at RWTH Aachen University, Germany Micro EDM: Accuracy of on-the-machine dressed electrodes A. Rees, Manufacturing Engineering Centre, Cardiff University, U.K. S. Dimov, Manufacturing Engineering Centre, Cardiff University, U.K. A. Ivanov, Manufacturing Engineering Centre, Cardiff University, U.K. A. Herrero, Tekniker, Spain L.G. Uriarte, Tekniker, Avda, Spain Design and testing of a d31 mode piezoelectric unimorph for direct power generation by coupling with a microcombustor G. Liu, Nanotechnology Centre in the Department of Materials, Cranfield University, UK R.W. Whatmore, Tyndall National Institute, Cork, Ireland Water jet machining of MEDM tools O. Blatnik, University of Ljubljana, Slovenia H. Orbanic, University of Ljubljana, Slovenia C. Masclet, University of Grenoble, France H. Paris, University of Grenoble, France M. Museau, University of Grenoble, France J. Valentincic, University of Ljubljana, Slovenia B. Jurisevic, University of Ljubljana, Slovenia M. Junkar, University of Ljubljana, Slovenia Sensor-less measurement of rotational speed for piezoelectric micro-motors A. Venturi, School of Industrial and Manufacturing Science, Cranfield University,UK S. A. Wilson, School of Industrial and Manufacturing Science, Cranfield University,UK The micro-machining evaluation of non-metallic materials – by a fluid guided laser P. Snowdon, School of Engineering, Durham University, UK D. Wood, School of Engineering, Durham University, UK P. Maropoulos, Department of Mechanical Engineering, University of Bath, UK A Novel Protective Cover for Microcomponents A. Cvetanovic, Vienna University of Technology, Institute of Sensor and Actuator Systems, Austria A. Cvetanovic, Vienna University of Technology, Institute of Sensor and Actuator Systems, Austria D. Andrijasevic, Vienna University of Technology, Institute of Sensor and Actuator Systems, Austria I. Gioroudi, Vienna University of Technology, Institute of Sensor and Actuator Systems, Austria W. Brenner, Vienna University of Technology, Institute of Sensor and Actuator Systems, Austria Micro injection moulding: the effects of tool surface finish on melt flow behaviour C.A. Griffiths, Manufacturing Engineering Centre, Cardiff University, UK S. Dimov, Manufacturing Engineering Centre, Cardiff University, UK D.T. Pham, Manufacturing Engineering Centre, Cardiff University, UK Flow control for high-pressure micro hydraulics A.J.M. Moers, Department of Mechanical Engineering, Katholieke Universiteit Leuven, Belgium D. Reynaerts, Department of Mechanical Engineering, Katholieke Universiteit Leuven, Belgium