RAS Nodes

CCLRC - Rutherford Appleton Laboratory


CCLRC is the largest UK national research facility employing ~2000 scientists, engineers and support staff. The project-related tasks for 4M will be carried out by the Central Microstructure Facility (CMF) at CCLRC-RAL. CMF is a division of the CCLRC engaged in R&D activities in micro and nano systems technology for the past 20 years. It has been involved with large number of nationally funded and EC funded projects. CCLRC -RAL has led many Nationally funded programmes including the £19 million Innovations in Industrial Lithography (ISL) programme funded by the UK Department of Trade and Industries. The CMF is a major national centre for microsystems technology. As a national facility we interact with over 100 universities in the UK. Our European involvement is also very strong. We have led many EU projects.
The Central Microstructure Facility (CMF) provides state-of-the-art microfabrication services and R&D facilities, based on electron-beam lithography and semiconductor equipment, to universities and industry. A central well-found research and prototype manufacturing service is available using advanced technology for microelectronics, masks, interconnects, direct write and for microsystems technology/microelectromechanical systems (MEMS). CMF is a neutral site where academic-industry and industry-industry collaborations offer good technology transfer opportunities.


Andreas Schneider
Submitted on March 9, 2005 - 09:07.

CEA Grenoble


The CEA (Atomic Energy Commission) is a French Governmental Research Organisation (1500 employees) devoted to both fundamental and industrial R&D. The CEA-Grenoble research center is operated by the DRT (Technological Research Direction) in the fields of technologies for information, communication and of technologies for new energies. The two main laboratories (LETI and LITEN) involved in 4M are developing polymers micro systems for various fields of applications (biotechnology, micro fluidics, micro fuel cells, photonics and micro heat exchanger).These two laboratories are one of the largest European R&D operators in the micro & nanotechnologies, nano-materials and electronics. It mainly aims at helping companies to increase their competitiveness through technological innovation and transfer of its technical know-how to industry. CEA/DRT has also an active policy of start-up creation. More than 20 permanent people are working on the following topics relevant to 4M:
•UV LIGA micromolding fabrication process: thick photoresist photolithography, mould fabrication, hot embossing
•Prototyping of polymers microcomponents: direct fabrication with thick photoresist, polymer Deep Etching, casting
•Assembling and packaging of polymer Microsystems.
•Manufacturing technologies of energy microsources.
•Active Surface treatment (Hydrophobic, Hydrophilic,…)
•Characterization of polymer properties (Strain, viscosity, Surface roughness,…)


bertrand fillon
Submitted on April 1, 2005 - 08:43.

KTH - Microsystem Technology & Cleanroom fabrication facility


our research and advisory potential: http://www.s3.kth.se/mst/research/index.shtml.
For our cleanroom facilities: http://www.electrumlaboratoriet.se/.

The Microsystem Technology lab (MST) is a part of the department of Signals, Sensors and Systems (S3). Our research is mainly centered around Microelectromechanical Systems (MEMS) and its applications, with a focus on silicon-based applied sensor and actuator technology. Our research staff has developed a significant number of devices with promising performance. The group fabricates its silicon structures and devices at the KTH microelectronics laboratory, comprising 1200m2 of cleanroom area with all the facilities of small-scale microelectronics and for research on and development of special purpose structures and components in silicon. The group works on applications in the medical field (MedMEMS), the biotechnology field (BioMEMS), optical components (OptoMEMS) and radio frequency signal components (RFMEMS).


wouter
Submitted on May 19, 2005 - 15:20.

KU Leuven


K.U.Leuven is one of the three divisions of the department of Mechanical Engineering. PMA is active in the following areas: manufacturing processes, machine and instrument design, structural dynamics, acoustics, CAD/CAM/CIM, robotics, assembly automation, mechatronics, micro- and precision engineering, and metrology. The PMA division work includes original fundamental work as well as successful industry-oriented projects carried out in collaboration with small, medium and large companies and with international organisations like the European Space Agency. An important role of the research activities of the PMA division is based on international collaboration as shown by the participation of the division in more than 40 EC funded projects. The PMA division has also been nominated as Centre of Excellence by the Belgian Government.


dominiek reynaerts
Submitted on April 12, 2005 - 12:40.

minam fp6
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