Dimensional Metrology in Micro Manufacturing

H.N. Hansen
Department of Manufacturing Engineering and Management, Produktionstorvet, Building 427S, Technical University of Denmark, 2800 Kgs. Lyngby, Denmark

Abstract

The need for dimensional metrology at micro and nano scale is evident both in terms of quality assurance of components and products and in terms of process control. As critical dimensions are scaled down and geometrical complexity of objects is increased, the available measurement technologies appear not sufficient. New solutions for measuring principles and instrumentation, tolerancing rules and procedures as well as traceability and calibration are necessary if micro manufacturing is to develop into industrial manufacturing solutions. The current paper describes issues and challenges in dimensional metrology at micro scale by reviewing typical measurement tasks and the measuring capability of available instrumentation. Traceability and calibration issues are discussed subsequently. Finally needs and gaps are identified based on these observations.