An Investigation on Development of MEMS in LTCC by Embossing Technique

D. Andrijasevic(a), W. Smetana(a), S. Zoppel(b), W. Brenner(a)
a: Institute of Sensor and Actuator Systems, Vienna University of Technology, 1040 Vienna, Austria
b: Forschungszentrum Mikrotechnik, Fachhochschule Vorarlberg, 6850 Dornbirn, Austria

The latest results achieved during the investigation of possibilities for producing MEMS in unfired green Low Temperature Cofired Ceramic (LTCC) by embossing technique are presented in this paper. Ceramic tapes in unfired state are subjected to compression by means of using tools specially designed and developed for this purpose. Structures obtained in this way demonstrate high repeatability and surface quality comparable with those gained by other techniques. In comparison with traditionally used laser cutting or injection moulding for ceramic processing, this technique offers better resolution and further miniaturisation, improved rigidity of small structures and possibility to profile the vertical walls in U- and V-shapes. The main focus of this paper will be on the optimisation of embossing parameters (embossing force, embossing time and temperature) in order to get repeatable and reliable results. Structures produced in this way could be successfully used in optical as well as in medical applications.