Critical Analysis of an Existing Calibration Procedure Built in a White Light Interferometer Microscope and Proposal of an Alternative Spline-Based Approach

C. Ferri, E. Brousseau
Manufacturing Engineering Centre, Cardiff University, CF24 3AA, UK

Abstract

This paper presents a spline-based calibration method in order to overcome the limitations observed in the built – in calibration procedure of a commercial white light interferometer microscope. Quantitative experimental evidence highlighted the presence of inconsistencies of this built-in procedure with the international standard about the linear calibration method. A bias in the measurement results was shown experimentally. The proposed spline-based approach was implemented with reference materials of nominal heights ranging from 182 to 218 μm. The state of control of the measuring process during a calibration and between calibrations was also monitored using purpose developed control chart designs.