Thin Film Polymer Actuators for Micro-Fluid Applications

A. Boersma, R. de Zwart, R. Boot, P.J. Bolt
TNO Science and Industry, Eindhoven, The Netherlands

Abstract

Thin film actuators have been manufactured for application in small devices, such as valves and (micro)pump. These actuators are based on new materials especially suited to be used as electro-active dielectric elastomers. The properties of these elastomers are tuned to the specific requirements. It was found that the electric voltage required for operating could be lowered by a factor of three to five. The thin film actuators were processed into small valves and pumps for the manipulation of gasses and liquids. It was shown that the actuators could be operated when immersed in a liquid (e.g. water) and can be used as valves in microfluidic sensor array devices. The next step in the development is fine-tuning of the valve setting in order to minimize leakage and optimize performance and durability.