Design and Optimization of Flat Solenoid MEMS Actuator by Selection of Proper Material Properties

G. Todorov, K. Kamberov, and L. Dimitrov
CAD/CAM/CAE Laboratory, Technical University of Sofia, Sofia 1000, Bulgaria

Abstract

MEMS actuators are widely used in modern industry. Their main advantage is the concentration of desired mechanical characteristics in a limited space. This paper presents a design and optimization of a flat solid MEMS actuator. The optimization is based of the selection of material properties needed for the achievement of the actuator mechanical characteristics required for good performance. The main goal is to reach necessary output mechanical force with minimal side force effects. The output mechanical force is evaluated by modeling and simulation of the magnetic field and its parameters by the use of FE Analyses. In order to make proper simulations, a finite element model of the complete actuator structure is made up suggested).

Another problem that has been solved in the paper is checking of actuator’s geometry and its dimensions in order to evaluate the effective use of the material. As a result of the study, the optimal output function of the mechanical force versus the stage position has been determined. This has been done on the basis of updated material specifications. The optimal design of a flat solenoid MEMS actuator is proposed.