4M Knowledge base - papers

T. Grund, M. Heckele and M. Kohl
Forschungszentrum Karlsruhe GmbH, Institute for Microstructure Technology (IMT),Postfach 3640, 76021 Karlsruhe, Germany

Abstract

A batch compatible process flow to overcome the costly piece by piece assembly of hybrid microsystems is shown. Hot embossing is used to fabricate microstructured polymer layers. Wafer scale compatible bonding tasks are carried out by ultrasonic welding and heat activated bonding with micromachined bonding foils. As demonstrator device, a shape memory alloy (SMA) actuated polymer microvalve is introduced. The valve concept, fabrication technologies and device characteristics are discussed.