4M Knowledge base - papers

R. Teti (a), L. Mattsson (b), Andrej Lebar (c), Mihael Junkar (c)

a Department of Materials and Production Engineering, University of Naples Federico II, Piazzale Tecchio 80, 80125 Naples, Italy
b Department of Production Engineering, KTH – the Royal Institute of Technology, SE-10044 Stockholm, Sweden
c Laboratory for Alternative Technologies, Faculty of Mechanical Engineering, University of Ljubljana, Askerceva 6, SI-1000 Ljubljana, Slovenia

Abstract

In this paper, the characterisation of micro-features involved in metrology applications within the scope of 4M is carried out through the use of different two-dimensional frequency analysis procedures. Firstly, the analysis methods are introduced and their basic principles are illustrated. Secondly, selected test cases, representing the issue of experimental research activities performed at the laboratory sites of the co-author’s partner organisations, are presented with reference to diverse metrology purposes in different fields of applications.