4M Knowledge base - papers

3D micro and nanostructuring of an epoxy based resist by electron beam lithography

G. Rius, J. Bausells, C. Martín, A. Llobera and F. Pérez-Murano
Institut de Microelectrònica de Barcelona, IMB-CNM-CSIC, Barcelona, SPAIN


We present the results of producing three dimensional micro- and nanostructures on an epoxy based resist. Epoxy based resists are very interesting in microsystems technology for their good mechanical properties, that allow to produce high aspect ratio microstructures. We have optimized the definition of free standing structures by either using electron beam lithography alone or combining electron beam lithography and UV optical lithography. To tune the energy and dose of the electron beam exposure properly, Monte Carlo simulations are used.

Submitted on July 30, 2008 - 13:53.

Low-power humidity sensor for RFID applications

L. Löfgren (a), B. Löfving (a), T. Pettersson (a), B. Ottosson (a), C. Rusu (a), S. Haasl (a), K. Persson (a), O. Vermesan (b), N. Pesonen (c), P. Enoksson (d)

(a) The Imego Institute, Arvid Hedvalls Backe 4, SE-400 14 Göteborg, Sweden
(b) SINTEF ICT, N-0314 Oslo, Norway
(c) VTT, Wireless sensors, FIN-02044, Espoo, Finland
(d) Chalmers University of Technology, Micro and Nanosystems group, SE-41296 Göteborg, Sweden


Wireless sensors incorporated in RFID systems are important in several industrial, consumer and logistics applications. By extending RFID tags to sensing applications, the products become smarter. Application areas for these smart tags include; health care (verification of the environmental conditions during transport or in storage of e.g. diapers, bandages, etc.), food monitoring (food quality during transport, storage and sales) and construction industry (e.g. building material).
In this paper, a small, very low power and low cost humidity sensor tailor made for passive RFID applications is presented. The sensor consists of a glass chip substrate with a sub-micron interdigitated gold electrode structure covered with a humidity sensitive polyimide layer. The humidity absorbed by the sensing layer is measured capacitively. Finite element modeling and analytic calculations were used to determine the design of the interdigitated electrodes and the optimal thickness of the polyimide layer. A read-out electronics circuit was designed and used to evaluate the sensor. Sensors were fabricated and calibrations have been made to verify their function. The sensor response was close to linear from below 20 to above 90 %RH and its response time was proven to be at least as short as that of the climate chamber, namely 0.1 %RH/s. The concept can easily be adapted to measure a range of other parameters such as temperature or the presence of certain substances.

Submitted on August 6, 2008 - 15:42.

Towards automation in AFM based nanomanipulation and electron beam induced deposition for microstructuring

. Krohs (a), T. Luttermann (a), C. Stolle (a), S. Fatikow (a), E. Brousseaub, S. Dimov (b)

(a) Div. Microrobotics and Control Engin., Univ. of Oldenburg, Germany;
(b) The Manufacturing Engineering Centre (MEC), Cardiff University, Wales


To move towards complex assemblies at the micro- and nanoscale, manipulation processes have to be automated to increase throughput and accuracy. First, this paper addresses manipulation at the nanoscale by an AFM and second, automated electron beam induced deposition as a method for structuring at the microscale is presented. Nowadays, AFM based nanomanipulation still requires frequent user interaction and remains a very labor intensive task. Spatial uncertainties are identified as a major problem that prevents reliable automation of AFM based manipulation. Results of a novel particle filter based method for measuring thermal drift in an AFM system is presented and future applications for probabilistic methods are discussed.
The automation of electron beam induced deposition (EBiD) for microstructuring purposes builds a multifunctional tool for additive structuring and also bonding inside an SEM. The presented system has the ability to create EBiD depositions from two different precursor materials by automatically executing predefined sequences. The automation includes the precursor flux control with the possibility to alternate between two materials, the deposition of points and lines at defined positions, as well as the ability to find and track already deposited structures with the use of digital image processing. This assures precise positioning of depositions relative to others even in cases of thermal or electrostatic drifting of the specimen substrate or the electron beam.

Submitted on July 30, 2008 - 10:46.

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