X-ray pattern analysis of electroplated two-component moulds used for the production of micro gear wheels

J. Prokop (a),(b), J. Lorenz (a), V. Piotter (a), H.-J. Ritzhaupt-Kleissl (a), A. Roch (a), and J. Haußelt (a),(b)

(a) Forschungszentrum Karlsruhe GmbH, Institute for Materials Research III (IMF III) Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
(b) Department of Microsystems Engineering - IMTEK, University of Freiburg, Germany

Abstract

A process for the fabrication of metal micro components by combining 2-component injection moulding with metal deposition by electroforming will be presented. To produce these 2-component polymer templates, an electrically conductive base plate is generated by injection moulding of electrically conductive carbon black-filled polymers. In a second injection moulding step microstructures consisting of insulating polymers are mounted onto these plates. The quasi-infinite conductivity gradient of such 2-component templates allows controlled electroplating to start from the base plate only, such that defect-free metal micro components can be achieved. The parameter set of the injection moulding process has been investigated by using an experimental method with an x-ray pattern analysis. Nearly defect-free electroplated micro parts could be fabricated by this process so far.