Flexible microfluidics based on commercial SU8 foils

Chantal Khan Malek and Laurent Robert
Institute FEMTO-ST/Dpt. MN2S, CNRS UMR 6174, 32 Av. de l’Observatoire, 25044 Besançon, FRANCE

Abstract

Polymer-based microfabrication technologies are gaining momentum as they enable low cost fabrication of a variety of microsystems, with major developments in optical and microfluidic systems. The use of dry film resist for microsystem applications is briefly reviewed. A method based on the lamination of commercial SU8 dry films and photolithography for the formation of flexible thin film micro-devices is presented. Fast prototyping of multi-layer microfluidic simple chips with embedded channels is reported.