4M Knowledge base - papers
Analysis of Micro-Structuring Polymer Replication by Micro-Injection Moulding and Hot Embossing
M. Sahli(a)(b)(c), C. Millot(a), C. Roques-Carmes(a), C. Khan Malek(b), J.C. Gelin(c) and T. Barriere(c)
a: Surface Microanalysis Laboratory (LMS), ENSMM, 25030 Besançon cedex, France
b: FEMTO-ST Institute/Dpt. LPMO, CNRS UMR 6174, , 25044 Besançon cedex, France
c: FEMTO-ST Institute, CNRS UMR 6174, ENSMM, 25030 Besançon cedex, France
Abstract
This paper focuses on the comparison between two manufacturing techniques to realize micro-structural replications on a polymer substrate. The micro-technologies that are considered consist in replication through micro-injection moulding on one hand, and in replication through hot embossing in the other hand. The same mould with microstructured cavities produced by high-speed milling or indentation was used for both replication methods. The replication process parameters are analyzed in both cases, and the resulting polymeric shapes and surface states are characterized in using 3D scanning mechanical microscopy. It is shown that both replication processes give accurate results if the processing cycle as well as pressure and temperature are well adapted.
Electrochemical finishing of nickel microstructures
S. Kissling, K. Bade
Forschungszentrum Karlsruhe, Institut für Mikrostrukturtechnik, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
Abstract
One method to manufacture high aspect ratio metallic microstructures is the LIGA technique. The acronym LIGA stands for the German words for lithography, electroforming and moulding. A resist layer (e.g. PMMA) is structured using deep X-ray lithography. The resist is developed and the resulting mould is filled with metal by electroplating. Though electroplating is an essential part of the LIGA process there are still challenges concerning the deposit surfaces. Nevertheless, extremely precise metal structures can be manufactured. In particular, the sidewall surface quality can be in the sub-micrometer range. But due to irregularities during the deposition process, resulting in rough or wavy surfaces, the emerging surface does not meet required tolerances. For this reason, a finishing process is necessary. Electrochemical techniques such as electro- or plasmapolishing have been evaluated. Electropolishing, a common anodic dissolution technique widely used in industry to obtain smooth, bright and burr-free surfaces, as well as plasmapolishing, also a technique based on the anodic dissolution are presented. First results of both an electropolished and a plasmapolished nickel microstructure are reported.
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