Papers are invited to present the latest advances in developing new processes and process chains for multi-material micro manufacture and their applications in microsystems-based products, in particular but not limited to:

  • Novel materials: characterisation and processing;
  • Process modelling and simulation;
  • Process characterisation including process chains;
  • Metrology: inspection and characterisation methods;
  • Components: fabrication and assembly technologies;
  • Systems: novel product and system designs.

The above six sub-topics represent the intended topics of the thematic sessions of the Conference to which the authors are invited to submit papers.

Submitted on October 24, 2007 - 14:19.


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