Papers are invited to present the latest advances in developing new processes and process chains for multi-material micro manufacture and their applications in microsystems-based products, in particular but not limited to:
- Novel materials: characterisation and processing;
- Process modelling and simulation;
- Process characterisation including process chains;
- Metrology: inspection and characterisation methods;
- Components: fabrication and assembly technologies;
- Systems: novel product and system designs.
The above six sub-topics represent the intended topics of the thematic sessions of the Conference to which the authors are invited to submit papers.
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