Metrology Workshop

1st July 2005

Prof. Kiyoshi Takamasu

Department of Precision Engineering, The University of Tokyo

1. Introduction
2. Tutorial: Traceability and traceable nanometrology
   
   • What is “Traceability”?
     
     • Definition of Traceability
     • Traceability of Length: definition of metre, iodine stabilized laser, gauge block
   • Uncertainty of measurement
     
     • Analysis procedure of uncertainty of measurement: examples
     • Uncertainty in comparison measurement
     • Uncertainty in length measurement
   • Traceable nanometrology
     
     • Gaps in nanometrology
     • NanoSurf: Precision surface roughness measurement with laser interferometer
     • Metrological AFM (Atomic Force Microscope)
     • Combined optical and X-ray Interferometer: COXI
     • Precision CMM (Coordinate Measuring Machine)
3. Standardization in nanometrology by CD (Critical Dimension) -AFM (Atomic Force Microscope)
   
   • Principle of AFM
     
     • Construction of AFM: force curve, piezo actuator, optical lever
     • Cantilever of AFM
   • CD-AFM
     
     • CD-AFM at standard laboratories: NMIJ/AIST, NIST, PTB, METS, NPL
       Standard artifact for nanometrology: pitch, level, two dimension grating, line width
     • Establishment of traceability in nanometrology by CD-AFM
   • Development of CD-AFM with laser interferometer (NMIJ: National Metrology Institute of Japan)
     
     • Construction of CD-AFM
     • Uncertainty estimation of pitch measurement for 240 nm and 50 nm pitch
     • Design for pitch standard under 100 nm
     • Level measurement for 20 nm, 70 nm and 300 nm levels
4. Development of Nano-CMM
   
   • Basic construction of CMM (Coordinate Measuring Machine)
     
     • Cartesian coordinates system and three scales
     • Probing system: touch probe, optical probe, scanning probe
     • Calibration of CMM: ball plate, step gauge
     • Virtual CMM: uncertainty estimation of CMM
   • Precision CMM and probing system for nanometrology
     
     • Precision CMM: IBS (TUE), small scale CMM (NPL), Ultra precision CMM (METAS)
     • Precision probe: NPL, TUE, PTB, METAS, Mitutoyo
   • Development of Nano-CMM (The University of Tokyo)
     
     • Concept and construction of Nano-CMM
     • Development of Nano-probe
5. Conclusions and future on nanometrology