Day 2, June 30, 2005

Time 8:30h to 10:15h

Invited Talks
Chair: S. Dimov, Cardiff University, UK

Reliability Research on the way from Micro to Nano
Bernd Michel, IZM, Germany

Challenges in micro-optics
H. P. Herzig, Institut de Microtechnique, Neuchatel Switzerland

Lab-on-Chip Microsystems for cancer diagnostics and for monitoring of cancer therapy
Stanislas Krawczyk, CNRS, France

Time 10:15h to 10:35h
Coffee Break
Time 10:35h to 11:30h

Panel Discussion (4M Scientific Advisory Board)
Multi-Material Micro Manufacture: Research Challenges

Moderators: W. Menz, Germany & S. Dimov, Cardiff University, UK

Participants:
K. Takamasu, University of Tokyo, Japan
H. Reinecke, IMTEK, Germany
E. Brinksmeier, Universitat Bremen, Germany
E. Carlstrom, SCI, Sweden
T. Vorburger, NIST, USA,
B. Michel, Fraunhofer-IZM, Germany
S. Krawczyk, CNRS, France
H. P. Herzig, Institut de Microtechnique, Neuchatel , Switzerland
M. Cain, NPL, UK
A. Dietzel, TU Eindhoven, The Netherlands

Time 11:35h to 12:45h
Session 5 - Tooling Technologies
Chair: C Wenzel S Lange, IPT, Germany

Adaptable Five-Axis Polishing Machine Head
C. Brecher, C. Wenzel, IPT, Germany

Miniaturization of the injection abrasive water jet machining process
H. Orbanic, B. Jurisevic, D. Kramar, M. Junkar, University of Ljubljana, Slovenia
M. Grah, Litostroj E.I., Slovenia

A Comparison between Microfabrication Technologies for Metal Tooling
L. Uriarte, Tekniker, Spain
A. Ivanov, Cardiff University, UK
H. Oosterling, TNO, The Netherlands
L. Staemmler, HSG-IMAT, Germany
P. Torben, DTU, Denmark
D. Allen, Cranfield University, UK

New methods for tool failure detection in micro-milling
E. Gandarias, S. Dimov, D. T. Pham, A. Ivanov, K. Popov, Cardiff University, UK
R. Lizarralde, Ideko S.Coop, Spain.
P.J. Arrazola, Mondragon Unibertsitatea, Spain.

Session - 6 Micro-Fluidics
Chair: P. Johander, IVF, Sweden

Intelligent intraoral drug delivery microsystem
T. Velten, H. H. Ruf, T. Knoll, T. Koch, O. Scholz, IBMT, Germany
A. Wolff, B. Z. Beiski, Assuta Hospital, Israel

An extended toolbox for fully integrated sample processing and detection on a high-frequency centrifugal microfluidic platform
T.Brenner, M.Grumann, S.Haeberle, L.Riegger, J.Steigert, F.v. Stetten, R.Zengerle and J. Ducrée, IMTEK, Germany,

Control of fluidic in a plastic disposable chip used of POC-diagnostics
J.E. Wipenmyr, A. Krozer, Imego AB, Sweden

Microfluidic Devices with Micronozzles Fabricated by Injection Moulding
H. Kück, D. Warkentin, HSG-IMAT, Germany
K. Hiltmann, P. S. Messner, HSG-IMIT, Germany
Koltay, R. Steger, R. Zengerle, IMTEK, Germany

Time 12:45h to 14:00h
Lunch
Time 14:00h to 15:45h

Invited Talks

Metal Cutting of Microstructures
Prof. E. Brinksmeier, University of Bremen, Germany

Comparison of Optical and Stylus Methods for Measurement of Surface Texture
Dr. Theodore Vorburger, National Institute of Standards and Technology, NIST, USA

Measurement issues related to the characterisation of piezo-actuators
Dr. Markys Cain, National Physical Laboratory (NPL), UK

Time 15:45h to 16:15h
Coffee Break
Time 16:15 to 17:30
Session - 7 Assembly and Packaging
Chair: E. Jung, IZM, Berlin, Germany

Innovative handling techniques of thin flexible micro parts
C. Brecher, C. Peschke, IPT, Germany

Micro laser welding of polymer microstructures using low power laser diodes
T. Ussing, L.V. Petersen, MEMSflow ApS, Denmark
B. Helbo, L. Højslet, DTI, Denmark

Multifunctional Packages by Assembly of SMD and Bare Dies on Moulded Interconnect Devices (MID)
Ulrich Keßler, Wolfgang Eberhardt, Heinz Kück, HSG-IMAT, Germany

Development of Highly Precise Bonding Procedures for Structured Polyimide Films on Silicon Substrates
T.Goettsche, M.Stehr, H.Ashauer, P.Nommensen, HSG-IMIT, Germany

Session - 8 Metrology
Chair: L Mattsson, KTH, Sweden

Metrological characterisation of micro particles by direct simulation Monte Carlo
M.D. Mikrenska, P.I. Koulev, Bulgarian Academy of Sciences, Bulgaria
J.-B. Renard, CNRS, France

Through-Transmissive-Media (TTM) Interferometric Techniques Applied to Characterizing Packaged MEMS and MOEMS Devices
Sen Hana, Veeco Tucson Inc., USA
Freek Pasop, Udo Volz, Veeco Instruments GmbH, Germany

Surface characterisation in forming processes by functional 3D parameters
S. Weidel, U. Engel, M. Geiger , University of Erlangen-Nuremberg, Germany

Assessment of digital cameras for micro-structural sensing of low contrast surface features
A. Temun, L. Mattsson, KTH, Sweden

Time 17:35 to 18:30
Posters Session 2

Tooling Technologies, Micro Fluidics, Assembly and Packaging, Sensors and Actuators
Chair: B. Peat, Cardiff University, UK
Short Presentations (2 slides and up to 2 min per presentation)

Tooling Technologies

Evaluation of dynamic parameters of micromilling tools smaller than 0.3 mm diameter
L. Uriarte, M. Zatarain, G. Santiso, Tekniker, Spain
L.N. Lopéz de Lacalle, J. Albizuri, ETSII, Spain

Micromechanical structuring of polymers, metals and ceramics
T. Gietzelt, L. Eichhorn, K. Schubert, FZK, Germany

Manufacturing of Free-Form Surfaces using a Fast Tool Servo (FTS) and an online Trajectory Generator
C. Brecher, M. Winterschladen, M. Merz, IPT, Germany

Polymeric thin films patterning for direct fabrication of micro-photonic components
P. Obreja, D. Cristea, E. Manea, M. Kusko, IMT, Romania

Comparison of optimal machining parameters of sinking EDM and micro EDM processes
O. Blatnik, J. Valentinčič, M. Junkar, University of Ljubljana, Slovenia

Single crystalline Cubic Boron Nitride as cutting material for the Ultra precision Machining of steel
U. Grimm, C. Müller, H. Reinecke, M. Wölfle, IMTEK, Germany

A study of micro EDM electrode wear
S. Bigot, A. Ivanov, K. Popov, Cardiff University, UK

Some Cutting Technology Problems of Microcutting
I. Mészáros, M. Takács, J. Nyir, Budapest University of Technology and Economics, Hungary

Realisation of a New Concept for Optical-Mechanical Precision Parts Produced by Polymers Processing
J. Wilde , D. Arnold , A. Schoth, W. Greger, H. Reinecke, I MTEK, Germany,

ECF - An Innovative Technique for Micro Mould Fabrication
L. Staemmler, K. Hofmann, H. Kück, HSG-IMAT, Germany

Micro Fluidics

Microfluidic Devices Made by Automated Metal Foil LOM
M. Prechtl, BLZ gGmbH, Germany
S. Seidel, A. Otto, University of Erlangen-Nuremberg, Germany

A multi-material micropump for applications in microfluidics
M. Richter, Y. Congar, M. Wackerle, IZM, Munich, Germany

Fast packaging of polymeric cantilever chip by micro milling
A. Johansson, G. Perozziello, O. Geschke, A. Boisen, DTU, Denamrk

Rapid prototyping of all-COC/Topas fluidic microsystems
F. Bundgaard, G. Perrozziello, O. Geschke, DTU, Denmark

Mechanical sealing of microfluidic structures
I. Tahhan, C. Blattert, R. Jurischka, A. Schoth, H. Reinecke, IMTEK, Germany

Fabrication of a geometrically complex brain slice perfusion device via contact liquid photolithographic polymerization (CLiPP)
K.T. Haraldssona,KTH, Sweden
P.A. Passeraub,University of Applied Sciences, Switzerland,

Assembly & Packaging

Thermal Process Control for Laser Radiation Bonding of Silicon and Glass
F. Sari, A. Gillner, R. Poprawe, Fraunhofer Institute for Laser Technology, Germany

Mechanical evaluation and improvement of microgrippers
F. Székely, T. Szalay, Budapest University of Technology and Economics, Hungary

Three dimensional force fields for micropart manipulation
P. Lazarou, N.A. Aspragathos, University of Patras, Greece

Classification of assembly techniques for micro products
G. Tosello, H.N. Hansen, A. Gegeckait*, M. Arentoft, L. Marin, DTU, Denmark

Automation of microfactories: towards using small industrial robots
T. Eriksson, H. N. Hansen, DTU, Denmark

Fuzzy control in micropart manipulation using programmable force fields
N. Aspragathos, K. Papaxrisanthou, University of Patras, Patras Greece

Robot based assembly and processing micro/nano operations
K. Gr. Kostadinov, R. L. Hradynarski, T. Tiankov, Bulgarian Academy of Sciences, Bulgaria
F. Ionescub, University of Applied Sciences, Germany

LTCC Packaging for Microsystems
K. Persson, C. Rusu, B. Ottosson, Imego, Sweden

Correct Modelling of the Material Properties in the Design and Simulation of Precision Micro-Parts
J. Wilde, IMTEK, Germany

Maskless and electroless Ni-Au bump deposition
R.Brennera, F.Edling, Uppsala University, Sweden
T. Gruszecki, P.Johander, IVF, Sweden

Micro Sensors & Actuators

A novel non-resonant technique for measuring the rheological properties of fluids using microfabricated thermal bimorph actuators
R.J. Dunn, Heriot-Watt University, UK
V. Djakov, S.E. Huq, Rutherford Appleton Laboratory, UK
M.Y. Al Aioubi, University of Birmingham, UK

Micro product development - how do we focus on the right issues?
H. N. Hansen, A. De Grave, G. Bissacco, DTU, Denmark

Spectrally encoded fiber optic measurement of diffusive target displacement
Z.V. Djinovic, A. Vujanic, Vienna University of Technology, Austria
M.C. Tomic, Institut Bezbednosti, Serbia and Montenegro

Micropellistor for methane detection
S. Sosin, C. Moldovan, R. Iosub, M. Zaharescu, IMT, Romania

Magnetic field flux density study of MEMS component mini actuator
G. Todorov, K. Kamberov, A. Ivanov, L. Dimitrov, Technical University of Sofia, Bulgaria

Micro Power Generation with Micro Gas Turbines: a Challenge
J. Peirs, T. Waumans, P. Vleugels, S. Stevens, R. D'hulst, T. Stevens, F. Verplaetsen, J. Driesen, R. Belmans, M. Baelmans, D. Reynaerts, K.U.Leuven, Belgium
R. Van den Braembussche, von Karman Institute for Fluid Dynamics, Belgium

Determination of critical volume fraction for composite sensors and actuators
C.R.Bowen, A.C.Dent, R.Stevens, University of Bath, Bath, BA2 7AY, UK
M.Cain, M.Stewart, NPL, UK

Complex contour features in silicon by modified Deep Reactive Ion Etching (DRIE) processes for infrared collection applications and hot embossing applications
S. Landi, C. P. Shaw, P. B. Kirby and R. W. Whatmore, Cranfield University, UK

Time 18:30h to 20:00h
Posters Session 2 (Continuation)
Cocktail

Details about the oral and poster presentation papers can be found in the book of abstracts

Submitted on June 3, 2005 - 14:42.

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