Reliability research on the way from micro to nano

B. Michel
Fraunhofer Micro Materials Center Berlin at IZM, Germany

With the development of micro- and nanotechnological products such as sensors, MEMS/NEMS and their broad application in a variety of market segments new reliability issues will arise. The increasing interface to volume ratio in highly integrated systems and nanoparticle (or nanotube) filled materials and unsolved questions of size effects of nanomaterials are major challenges for experimental reliability evaluation.

The terms “microreliability” and “nanoreliability” characterize this new field within the micro-nano transition region. Advanced simulation tools, new test and characterization methods have to be combined with reliability and life-time estimation concepts taking into account local field measuring techniques and materials testing procedures on different levels.

The author will also present practical applications from the field of automotive sensors and MEMS applications and will show how combined simulation, testing, and crack, fatigue and creep failure avoidance strategies will lead to new solutions to improve reliability as life-time estimation in the micro-nano interface region.

Keywords

Microreliability, Nanoreliability, nanoDAC Technique