Metal cutting of microstructures

E. Brinksmeier, O. Riemer
Laboratory for Precision Machining, University of Bremen, Badgasteiner Strasse 2, 28359 Bremen, Germany

Nowadays several qualified technologies have been established for the manufacturing of precision parts and microstructured surfaces in the field of MEMS, e.g. lithography, etching, LIGA, laser beam, ion beam or electron beam machining. However, mechanical processes, e.g. diamond machining, engraving, forming and molding, play also a significant role for the generation of microstructured surfaces and the manufacture of microparts. In this keynote speech the state of the art of mechanical manufacturing methods for microparts and microstructures will be introduced and discussed. Particularly the potential of machining processes like turning, milling and drilling using monocrystallyne diamond tools, deterministic microgrinding and polishing processes for structured surfaces will be concluded. Applications of these methods for optical and mechanical parts will be illustrated . The presentation will also focus on the selection of materials, machining parameters, tool design and measuring techniques.

Keywords

metal cutting, microstructures